ONTRAK Synergy Integra, Operation Manual, Page: 138 / 350

6-20 INTEGRA Operations Revision A 7/26/00
20-0200-231 (CR), 20-0200-232 (Std), 20-0200-251 (CD)
L
OST
W
AFER
R
ECOVERY
- I
NPUT
R
OBOT
The Input Robot wafer recovery procedure is independent from all
Integra wafer recovery procedures. The Integra cleaner does NOT
directly communicate with the Input Robot (from CMP). Only the
CMP host computer communicates or “talks” to the Input Robot
using GEM messages. Input Robot wafer recovery can only be
performed from the CMP host’s user interface console.
If/when the operator detects a lost wafer at the interface between the
Input Robot and Input Station or other processing difficulty, use the
Input Robot Wafer Recovery Procedure table (below). Space is
provided to document the procedure for removing/recovering one
or more wafers.
Input Robot Wafer Recovery Procedure
STEP PROCEDURE COMMENTS
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15