ONTRAK Synergy Integra, Operation Manual, Page: 125 / 350

C h a p t e r 6 S T A R T- U P A F T E R E M O & WA F E R R E C O V E R Y
7/26/00 INTEGRA Operations Revision A 6-7
20-0200-231 (CR), 20-0200-232 (Std), 20-0200-251 (CD)
Start Wafer Recovery Message
From this point on, the system will begin to recover wafers from
every station where they were stranded. It may be necessary for the
operator to answer a few inquiries throughout the recover wafer
process, depending on the extent of the required recovery.
R
ECOVERY
P
ROCEDURE
F
OLLOWING
P
OWER
F
AILURE
(
OR
EMO)
If the system suffers a power failure or an EMO button is pressed, use
the following procedure (see following table) to initiate the Wafer
Recovery procedure.
A
NOTE:
All wafers recovered during wafer recovery should be reprocessed through
the cleaning cycle to ensure proper cleaning.
3 If the question reappears or if another
message is displayed asking if you want to
start recovery now, touch the
YES
button.
This initiates the Wafer Recovery process. The
procedure is automated from this point on.
A
NOTE:
If the operator responds by
touching NO to the “RECOVER the
wafer, NOW” message, the system
will not allow a new wafer into any
station that shows a wafer is
already present.
STEP PROCEDURE COMMENTS
Start wafer recovery ?