1 Features and System Configuration
1 - 10
OMNUC G5-series (Pulse-train Input Type) AC Servomotors and Servo Drives User’s Manual
1-5
Applicable Standards
Note To conform to EMC Directives, the Servomotor and Servo Drive must be installed under the conditions
described in 4-3 Wiring Conforming to EMC Directives on page 4-20.
• Servo Drives conform to the SEMI F47 standard for momentary power interruptions (voltage sag
immunity) for no-load or light-load operation.
• This standard applies to semiconductor manufacturing equipment.
Note 1 It does not apply to Servo Drives with 24 VDC specifications for the control power input.
2 Always perform evaluation testing for SEMI F47 compliance in the actual system.
1-5-1
EC Directives
EC directive
Product
Applicable standards
Low Voltage
Directive
AC Servo Drives
EN61800-5-1
AC Servomotors
EN60034-1/-5
EMC Directive
AC Servo Drives
EN55011 class A group1
IEC61800-3
EN61000-6-2
1-5-2
UL and cUL Standards
Standard
Product
Applicable standards
File number
UL standards
AC Servo Drives
UL508C
E179149
AC Servomotors
UL1004-1
E331224
CSA standards
AC Servo Drives
CSA22.2 No.14
E179149
AC Servomotors
CSA22.2 No.100
E331224
1-5-3
SEMI F47
Summary of Contents for G5 R88D-KE Series
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