DSX1000
6.2 Combination of units
Stage
Stage holder and stage plate
Rotatable motorized XY stage
DSX10-RMTS
Black-and-white plate *1
High-precision plate *1
*1: Provided with stage
XY motorized stage
DSX10-MTS
Manual stage
U-SIC4R2
Wafer holder plate
U-WHP2
Rotating wafer holder
BH2-WHR43
Stage plate
U-MSSP4
Objective
Lens attachment
Adapter
Long working distance objective lens
DSX10-XLOB3X
DSX10-XLOB10X
DSX10-XLOB20X
DSX10-XLOB40X
Lens attachment for XLOB
DSX10-LAXL
－
UIS objective
MPLAPON50X *2
MPLFLN1.25X *2
MPLFLN2.5X *2
MPLFLN5XBDP
MPLFLN10XBDP
MPLFLN20XBDP
MPLFLN50XBDP
LMPLFLN10XBD
LMPLFLN20XBD
LMPLFLN50XBD
*2: The adapter BD-M-AD
is necessary.
Lens attachment for UIS
DSX10-LAUIS
－
Super long working distance objective lens
DSX10-SXLOB1X
DSX10-SXLOB10X
Polarized illumination adapter for DSX10-SXLOB
DSX10-POAD
Diffused illumination adapter for DSX10-SXLOB1X/10X
DSX10-DIAD1X10X
Super long working distance objective lens
DSX10-SXLOB3X
Polarized illumination adapter for DSX10-SXLOB
DSX10-POAD
Diffused illumination adapter for DSX10-SXLOB3X
DSX10-DIAD3X
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6. List of combinable units
6.2 Combination of units
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