Operation
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GA12119_002_A3 - 01/2012 - © Oerlikon Leybold Vacuum
CAUTION
In the event of frequent heating, e.g. when performing the routine regene-
ration of a cryopump, limit the temperatures to 30 °C at the 1st stage and to
40 °C at the 2nd stage.
Never operate electrical heaters at the stages of the cold head without a
temperature monitor or temperature controller. Please consult us when selec-
ting suitable temperature monitors and temperature controllers.
4.1
Removing from Service
Switch off the compressor unit.
Allow the cold head to warm-up before detaching the flexlines.
Loosening the flexlines with the cold head at low temperatures can result in a
loss of helium.
Detaching the flexlines with the cold head at low temperature can, when
they heat up, result in a rise in pressure beyond the permissible 28 bar
(406 psig; 2.8 MPa) operating pressure. All the self-sealing couplings
which are not in use shall be provided with protective caps.
frequent heating
