96
6.6 Top Panel (40274-M144)
1 . Turn off the instrument breaker.
2 . Unscrew the machine screws (40274-
M149 [n = 4]) to remove the top panel
(40274-M144).
6.7 Attaching the Splatter Guard (40274-M051)
1 . Open the processing chamber door.
2 . Insert the splatter guard (40274-M051)
into the groove in front of the processing
chamber door, being aware of the follow-
ing.
1 ) The protrusions are upside.
2 ) The rough surface faces front.
Caution
Be sure to attach the splatter guard (40274-M051) when connecting the SE-9090 Supra
and Robotic Handling Unit (RHU-1000 series).
/
/
/
Protrusion
Summary of Contents for SE-9090 Supra
Page 1: ...SYSTEM EDGER SE 9090 Supra SERVICE MANUAL September 2012 Pages in total 350 LLE7D RDA002B...
Page 12: ...LLE7D RDA002B X This page is intentionally left blank...
Page 14: ...LLE7D RDA002B 2 This page is intentionally left blank...
Page 22: ...LLE7D RDA002B 10 This page is intentionally left blank...
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Page 310: ...LLE7D RDA002B 298 9 3 Wiring Diagram...
Page 311: ...LLE7D RDA002B 299 9 4 Connector Cable...
Page 312: ...LLE7D RDA002B 300...
Page 313: ...LLE7D RDA002B 301 9 5 Layout Drawing 9 5 1 ASSYs 40274 2000...
Page 314: ...LLE7D RDA002B 302 40274 3000 40274 5000 40274 6000...
Page 315: ...LLE7D RDA002B 303...
Page 316: ...LLE7D RDA002B 304 40274 4000 40274 8000...
Page 317: ...LLE7D RDA002B 305 40274 7100 40274 7200 40273 7200 2 2 5 2 5 5 2 2 2 5...
Page 318: ...LLE7D RDA002B 306 9 5 2 Boards S N 700019 and earlier...
Page 319: ...LLE7D RDA002B 307 S N 700020 and later...
Page 320: ...LLE7D RDA002B 308 9 5 3 Cable ASSYs...
Page 321: ...LLE7D RDA002B 309 9 5 4 Other electrical components...
Page 322: ...LLE7D RDA002B 310...
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