NDT Supply.com, Inc.
7952 Nieman Road
Lenexa, KS 66214-1560 USA
Phone: 913-685-0675
Fax: 913-685-1125
www.ndtsupply.com
JIMA RT RC-02B Micro Resolution Chart for X-Ray
Micro-focus type of X-Ray inspection systems are currently in common use. The resolution chart is
indispensable to adjust focalpoint. In general, it is necessary to maintain the capability of X-Ray
systems. This micro-chart has been fabricated by using the latest semiconductor lithography
techniques. As a result, sub-micron slits down to 0.4 micron. (0.4, 0.5, 0.6, 0.7, 0.8, 0.9, 1.0, 1.5, 2.0,
3.0, 4.0, 5.0, 6.0, 7.0, 10.0, 15.0 µ
m, 16 different widths).
Line and Space Pattern
1.5
mm
The layout of slits is designed at horizontal and vertical positioning as per the above drawing for 2.0
micron. Black lines are Tungsten absorption material. Each width of Tungsten line and space is 2.0
micron. There are 7 lines (15 micron has only 5 lines). The outer edge is surrounded by wider lines of
Tungsten
■
Cross Section
（
Si Base thickness: 60 micron)
P-
SiO2 (0.1μm) SiO2 (1.1μm)
W (1μm)
Protection Layer
Si Base
Specifications:
•
Whole Size: 40 x 30 x 5 mm
•
Si Plate: 5 x 5 x 0.06 mm
•
Absorption Material: Tungsten (W) 1.0μm thickness
•
Protection Film: Polycarbonate 0.1 mm thickness
•
Tolerance of Slit: +/-
10% or less under 2μm, +/-8% or less over 3μm (at 23 degrees C).
•
Protection Case included: Micro-Chart, Certification, Operation Manual
•
Operation Temperature Range: 10
℃
to 70
℃
190 μm
320
µ
m
Tungsten chart is drawn on 5 mm square Si
base filling the gap with SiO2, then polished
to have 1 micron thickness and SI
Block is fixed on 30x40 mm Aluminum plate.
