Nanometrics TC120-PH1, User Manual

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Trillium Compact User Guide
16889R5

2014-03-04
41
Chapter 8
Specifications
8.1 Technology
8.2 Performance
Table 8-1 Technology specifications
Topology Symmetric triaxial
Feedback Force balance with capacitive transducer
Mass Centring Not required
Table 8-2 Performance specifications
Self-noise
120 s models See Figure 9-2 “Self-noise for 120 s models” on page 49
20 s models See Figure 9-3 “Self-noise for 20 s models” on page 50
Sensitivity
120 s models
754.3 nominal ± 0.5% precision
20 s models
753.1 nominal ± 0.5% precision
Off-axis sensitivity ±0.5%
Bandwidth
120 s models –3 dB points at 120.2 s and 108 Hz
20 s models –3 dB points at 20.04 s and 108 Hz
Transfer function Lower corner poles within ±0.5% of nominal provided
High frequency response within 1 dB of nominal up to 45 Hz
No peak in response at high frequency
See
Figure 9-1 “Bode plot for 120 s and 20 s models” on
page 45
Clip level 26 mm/s from 0.1 Hz to 10 Hz
Tilt
120 s models Dynamic and operational tilt range of ±2.5°
20 s models Dynamic and operational tilt range of ±10°
Parasitic resonances None below 200 Hz
V s m ⁄ ⋅
V s m ⁄ ⋅