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19

4.3

Conductive Target Thickness Measurements

The  dual  probe  amplifier,  Accumeasure  System  9000-2  may  be  used  to  perform  thickness
measurements.    The  probe  amplifier  summation  circuit  in  the  9000-2  unit  should  be  set  to  produce  a
[Channel 1 + Channel 2] summation for the correct addition of the two probe signals (contact MTI if there
is  a  question  about  the  exact  configuration  of  the  summation  circuit).  With  the  9000-2  unit  set  up  to
perform the thickness measurement, the rear panel located, Sum Signal Output (refer to Figures 3-5 and
3-6,  on  pg.13)  produces  an  output  that  has  an

increasingly

  positive  magnitude  as  the  target  thickness

decreases.

MEASUREMENT PROCEDURE

1.

Fixture  the  probes  on  opposite  sides  of  the  target  with  the  centerline  of  the  two  probe  sensing
faces  directly  in  line  with  each  other.  Remove  the  target  and  set  the  air  gap  between  the  probe
sensing faces so it is equal to the mean thickness of the target plus the sensing range of probes.
6mm (0.236 inches) and probes with a range of 1.5mm (0.059 inch) are being used, the total gap
between the probe faces would be set at approximately 9mm (0.354 inch). Make sure the probe-
to-target air gap for Probe 1 and Probe 2 does not exceed the measuring range of the probes.

2.

Connect the probes to the Accumeasure System 9000.

3.

Place  a  target  with  known  thickness  midway  between  the  probes.  This  test  target  should be the
same thickness as the object that will be gauged.

4.

Ground the target.

5.

Connect a digital voltmeter (DVM) or oscilloscope (whichever is used) to the Channel 1 output.

6.

Adjust the probe gap until the output voltage is between 0 and +10V (+5 to +7 volts is ideal). Keep
in  mind  the  maximum  excursion  of targets  to  be  gaged.  The  output  voltage  (gap)  should  not
exceed the linear range of the probe.

7.

Press the Channel 1 offset switch on the front panel until the blue “offset on” LED is lit. Adjust the
offset control to 0 volts.

8.

Connect the DVM or oscilloscope to the Channel 2 output and repeat steps 6 and 7 for Channel 2
output.

9.

Connect  the  DVM  or  oscilloscope  to  the  sum  signal  output  on  the  rear  panel.  It  should  read  0
volts, corresponding to the test target thickness. Thicker targets will read as positive numbers on
the meter display. Thinner targets will read as negative displacement values.

10. To determine thickness, multiply the voltage change by the probe sensitivity factor. For example,

1.27mm (50 mil) range probes have a sensitivity factor of 0.127um (5 mils) per mV. If the output
signal increases by +20mV, then the target is increasing in thickness by 2.54um (100 mils).

THICKNESS MEASUREMENTS NOTES

1) A very large guard signal in close proximity to an adjacent very low signal can easily cause a 1%

thickness  error.    Therefore,  when  possible  the  probe  cables  should  not  be  routed  in  close
proximity to each other.

2) The  fixtures  that  hold  the  probes  can  contribute  significantly  to  poor  readings.    Use  of  low

coefficient of thermal expansion materials, isothermal designs, and capturing the probes as close
to their measurement ends as possible can help minimize drift effects.

3) The  field  from  the  probes  can  interact  with  adjacent  and  proximate  conductors.  For  example,  a

probe  that  is  operating  in  a  well  can  couple  to  the  walls  of  the  well  and  produces  erroneous
effects.  It is recommended that the well diameter be 50% greater than the probe outer diameter
to ensure linear operation at large gaps. It may be necessary to re-calibrate the probes if they are
operating in recessed conditions.

4) Avoid target tilt errors. Range-extended probes (“pushed probes”) are less susceptible to target tilt

error. However, noise increases with push. Target tilt warps the capacitance field, starting at the
point of the target’s closest approach. Using smaller probe sensing areas with large air gaps will
minimize the tilt effect.

5) For  thickness  measurement  of  non-conductive,  dielectric  materials  contact  MTII  to  obtain

application notes that describe the use of the Accumeasure

TM

 System on non-conductive targets.

Summary of Contents for AccuMeasure 9000

Page 1: ...013 AccuMeasure 9000 Capacitance Sensor Amplifier Users Manual MTI Instruments Incorporated 325 Washington Avenue Extension Albany New York 12205 USA Phone 518 218 2550 or 800 342 2203 USA Only Fax 51...

Page 2: ...This page was intentionally left blank...

Page 3: ...i Revision History Rev 4 0 Release...

Page 4: ...vided and upon the expiration of the warranty period of all such a liability shall terminate The foregoing shall constitute the exclusive remedy of the purchaser and the exclusive liability of the Sel...

Page 5: ...al is written in an official language of the Member State Contact MTI Instruments for the availability of translated manuals WARNING ELECTRICAL SHOCK ELECTROCUTION HAZARD This equipment is connected t...

Page 6: ...RN SHIPMENT PROCEDURE 5 2 OPERATING PRINCIPLES 6 3 INSTALLATION INSTRUCTIONS 8 3 1 POWER REQUIREMENTS 8 3 2 CONNECTIONS 9 3 3 CONTROL SWITCHES 13 3 4 DISPLAYS 13 3 5 PROBE MOUNTING 14 3 6 PROBE CABLES...

Page 7: ...parasitic capacitance and ensure the highest linearity Front panel gain and offset controls permit minor adjustments of the probe calibration characteristics An internal 5 pole Butterworth low pass f...

Page 8: ...to 40 C 40 to 100 F Storage Temperature 15 to 65 C 5 to 150 F Dimensions LxWxH 241x165x56mm 9 5x6 5x2 2 Mass 2 3kg 5lbs Probe Voltage 8 5Vrms Max Bargraph Proportional to gap 10 of range per bar 1 Al...

Page 9: ...Cryogenic and Vacuum compatible probes are available Contact the factory Accuracy 0 05 of range when calibrated to a known standard Probe Cable Interchangeability Accurate within 0 5 of range without...

Page 10: ...r optional digital panel meter s should be illuminated Without a probe cable s attached to the probe connector on the front panel all of the bargraph display segments should be fully illuminated Instr...

Page 11: ...al shipping carton if available and forward prepaid to MTI Instruments Inc Supervisor of Manufacturing 325 Washington Avenue Extension Albany NY 12205 5505 Mark RMA and the RMA number if a number is i...

Page 12: ...on the principle of parallel plate capacitor measurement The electrical capacitance formed between an Accumeasure TM probe and a target surface varies as a function of the distance gap between these...

Page 13: ...C voltage that is linearly proportional to the average value of the probe gap impedance and an AC voltage variation from the DC voltage that is directly proportional to the amplitude of the target vib...

Page 14: ...1 Remove the power cord from the rear panel power receptacle 2 Pry up one end of the power receptacle cover by inserting the blade of a small screwdriver under the tab next to the CORCOM lettering 3...

Page 15: ...ding post labeled GROUND on the rear panel see Figure 7 Accumeasure 9000 1 Rear Panel or The displacement voltage output signal s is available from the BNC connector s labeled 1 2 and SUM on the rear...

Page 16: ...fset Switch Indicator Offset Adjustment Probe Input Offset Switch Indicator Offset Adjustment Digital Display Power Indicator Gain Adjustment Figure 3 Accumeasure 9000 1 Front Panel Digital Display Fi...

Page 17: ...2 Gain Adjustment Channel 1 Bargraph Display Channel 1 Offset Switch Indicator Channel 2 Offset Switch Indicator Probe Input Channel 1 Probe Input Channel 2 Channel 2 Offset Adjustment Channel 2 Digi...

Page 18: ...ignal Output 20 W 50 60 Hz 1 100 240 VAC T 0 4A 250V Signal Output Signal Output Ground Connection Power Cable Connection Fuse On Off Switch Signal Output 2 1 20 W T 0 4A 250V 100 240 VAC 50 60 Hz SUM...

Page 19: ...see 4 1 Probe Amplifier Calibration Check The external offset potentiometer is dis engaged when the switch is set to its out position The control is engaged for offset adjustment when the switch set...

Page 20: ...e probe face parallel to the target surface Probe tilt causes measurement errors so a tilt of less than 5 of range is recommended That would mean that for a 500um 20 mil range sensor the edge of the s...

Page 21: ...manufactured feed through assemblies 3 7 Target Grounding The target being measured by the probes connected to the Accumeasure 9000 must be grounded directly to the board power supply grounds for the...

Page 22: ...nge Gain is adjusted at 100 of range Use the following procedure 1 Set the voltmeter to monitor the output of the amplifier 2 With the unit turned off adjust the probe so it is lightly touching the ta...

Page 23: ...n air gap equal to the maximum probe range value for the probe provided with the system The full range value is a function of the probe used and the zero voltage gap value For example a 20 mil range p...

Page 24: ...ush that can be achieved and this is dependant on several factors including probe type and cable length The maximum push recommended is 40X When employing pushed amplifier and probe combinations the o...

Page 25: ...0 volts 8 Connect the DVM or oscilloscope to the Channel 2 output and repeat steps 6 and 7 for Channel 2 output 9 Connect the DVM or oscilloscope to the sum signal output on the rear panel It should...

Page 26: ...00 it should be returned to the factory for servicing Before following the troubleshooting procedure 1 Set up a probe and grounded target so that probe to target gap is within the probe full scale ran...

Page 27: ...ield to center short circuit and probe for interelectrode short circuits 2 If jumper changes on the probe amplifier board have been performed since the unit has been received from MTI contact MTI to r...

Page 28: ...ighted 1 Check the probe cable connection to the front panel ensure that the cable is securely attached to the receptacle 2 Check for an open circuit in the center wire of the probe cable 3 Check for...

Page 29: ...probe support fixture to ensure the probe and the fixture are not loose 2 Check the shield on the sensor cable and the connectors in the sensor cable signal path for 100 shield integrity and connector...

Page 30: ...FROM MTI INSTRUMENTS 1510A Battery Powered Signal Simulator Generator Proforma 300 Semiconductor Wafer Qualification and General Thickness measurement Capacitance MicroTrak Laser Triangulation Displa...

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