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14

Panel –  Bargraph  Display, Figure 5: Accumeasure™  9000-2  Front  Panel-Digital  Display,  and Figure 4:
Accumeasure™ 9000-2 Front Panel-Bargraph Display.  The

offset switch indicator

is a blue, LED lamp

that is lighted when the offset switch is positioned in its “in” position and the front panel located, external
offset potentiometer, is engaged.

The Accumeasure 9000 probe amplifier has a

bargraph display

on the front panel to indicate the value of

the  probe-to-target  gap.    Each  bargraph  is  a  ten  element,  green  LED  array  that  is  calibrated  to  display,
/-5% of the full scale probe range, the relative gap value.  The number of display elements lighted
indicates the gap magnitude.  For instance, for a gap value between touch and 10% of the full-scale gap,
only  the  left  element  is  lighted,  and  for  a gap  value  between  50%  and  60%  of  full  scale,  the  six  left
elements  are  lighted.    The  location  of  the

bargraph  display

(s)  is  shown  on Figure 2: Accumeasure™

9000-1  Front  Panel –  Bargraph  Display  and Figure 4: Accumeasure™  9000-2  Front  Panel-Bargraph
Display.

A back lighted,

digital panel meter

 to display the probe gap signal for each probe channel is available, as

an option, to replace the

bargraph display

 in the Accumeasure 9000.  The meter has a 3 1/2 digit display

that is calibrated to produce a reading equal to the rear panel output signal voltage with a full scale range
of +/-10.00 VDC.  The meter has a resolution of 0.01 VDC, and an accuracy of +/-0.02 VDC. The location
of the

digital display

(s) is shown on Figure 3: Accumeasure™ 9000-1 Front Panel – Digital DisplayFigure

5: Accumeasure™ 9000-2 Front Panel-Digital Display.

3.5

Probe Mounting

Since Accumeasure

TM

9000 measures probe-to-target gap, the probe fixture must have good mechanical

stability  and  alignment.  The  fixture  must  hold  the  probe  securely  and maintain the probe face parallel to
the  target  surface.  Probe  tilt  causes  measurement  errors,  so  a  tilt  of  less  than  5%  of  range  is
recommended.  That would mean that for a 500um (20 mil) range sensor, the edge of the sensor should
tilt no more than 25um (1 mil) on a side.

It is recommended that the probe fixture be connected to the same ground return as the target if the target
is grounded.  The fixture should have a noise-free, low-impedance return path to the DC supply ground of
the  power  supply  that  provides  the  DC  voltages  to  the  Accumeasure

TM

9000  single  channel  probe

amplifier board unit. Values of up to 1 kilo-ohm resistance may be tolerated under certain conditions, such
as when maximum system linearity and resolution are not required.

If a direct ground connection is not possible, a capacitive-coupled connection can be used. Be aware that
a  350pF  value  in  the  return  path  will  introduce  a  small  amount  of  measurement  noise.  Larger
capacitances will introduce correspondingly smaller amounts of noise (1000pF or larger is recommended).
In practice, the ground return path may be provided automatically if the target is at ground potential and is
connected back to the amplifier ground connector through the ground terminal on the AC supply line. To
minimize the measurement noise, connect a ground lead directly from the probe fixture and target to the
ground connector on the probe amplifier module.

The probe should be mounted to meet two important conditions:

1) At a minimum excursion, the probe-to-target gap should be no less than 5% of the probe range.

2) At maximum excursion, the target gap must not exceed 95% of the full-scale probe range.

Before  performing  a  measurement, ensure  that  the  probe  and  target  under  test  are clean and free from
debris.

CAUTION

The  probe  connector  and  the  probe  body  on  ASP-1,  ASP-2,  ASP-5,  and  ASP-10  probes  carry  a  3  to
5Vrms electrical guard voltage for the cable shield and the probe. These must not be shorted to ground
by the fixture or the system will be inoperative.

Summary of Contents for AccuMeasure 9000

Page 1: ...013 AccuMeasure 9000 Capacitance Sensor Amplifier Users Manual MTI Instruments Incorporated 325 Washington Avenue Extension Albany New York 12205 USA Phone 518 218 2550 or 800 342 2203 USA Only Fax 51...

Page 2: ...This page was intentionally left blank...

Page 3: ...i Revision History Rev 4 0 Release...

Page 4: ...vided and upon the expiration of the warranty period of all such a liability shall terminate The foregoing shall constitute the exclusive remedy of the purchaser and the exclusive liability of the Sel...

Page 5: ...al is written in an official language of the Member State Contact MTI Instruments for the availability of translated manuals WARNING ELECTRICAL SHOCK ELECTROCUTION HAZARD This equipment is connected t...

Page 6: ...RN SHIPMENT PROCEDURE 5 2 OPERATING PRINCIPLES 6 3 INSTALLATION INSTRUCTIONS 8 3 1 POWER REQUIREMENTS 8 3 2 CONNECTIONS 9 3 3 CONTROL SWITCHES 13 3 4 DISPLAYS 13 3 5 PROBE MOUNTING 14 3 6 PROBE CABLES...

Page 7: ...parasitic capacitance and ensure the highest linearity Front panel gain and offset controls permit minor adjustments of the probe calibration characteristics An internal 5 pole Butterworth low pass f...

Page 8: ...to 40 C 40 to 100 F Storage Temperature 15 to 65 C 5 to 150 F Dimensions LxWxH 241x165x56mm 9 5x6 5x2 2 Mass 2 3kg 5lbs Probe Voltage 8 5Vrms Max Bargraph Proportional to gap 10 of range per bar 1 Al...

Page 9: ...Cryogenic and Vacuum compatible probes are available Contact the factory Accuracy 0 05 of range when calibrated to a known standard Probe Cable Interchangeability Accurate within 0 5 of range without...

Page 10: ...r optional digital panel meter s should be illuminated Without a probe cable s attached to the probe connector on the front panel all of the bargraph display segments should be fully illuminated Instr...

Page 11: ...al shipping carton if available and forward prepaid to MTI Instruments Inc Supervisor of Manufacturing 325 Washington Avenue Extension Albany NY 12205 5505 Mark RMA and the RMA number if a number is i...

Page 12: ...on the principle of parallel plate capacitor measurement The electrical capacitance formed between an Accumeasure TM probe and a target surface varies as a function of the distance gap between these...

Page 13: ...C voltage that is linearly proportional to the average value of the probe gap impedance and an AC voltage variation from the DC voltage that is directly proportional to the amplitude of the target vib...

Page 14: ...1 Remove the power cord from the rear panel power receptacle 2 Pry up one end of the power receptacle cover by inserting the blade of a small screwdriver under the tab next to the CORCOM lettering 3...

Page 15: ...ding post labeled GROUND on the rear panel see Figure 7 Accumeasure 9000 1 Rear Panel or The displacement voltage output signal s is available from the BNC connector s labeled 1 2 and SUM on the rear...

Page 16: ...fset Switch Indicator Offset Adjustment Probe Input Offset Switch Indicator Offset Adjustment Digital Display Power Indicator Gain Adjustment Figure 3 Accumeasure 9000 1 Front Panel Digital Display Fi...

Page 17: ...2 Gain Adjustment Channel 1 Bargraph Display Channel 1 Offset Switch Indicator Channel 2 Offset Switch Indicator Probe Input Channel 1 Probe Input Channel 2 Channel 2 Offset Adjustment Channel 2 Digi...

Page 18: ...ignal Output 20 W 50 60 Hz 1 100 240 VAC T 0 4A 250V Signal Output Signal Output Ground Connection Power Cable Connection Fuse On Off Switch Signal Output 2 1 20 W T 0 4A 250V 100 240 VAC 50 60 Hz SUM...

Page 19: ...see 4 1 Probe Amplifier Calibration Check The external offset potentiometer is dis engaged when the switch is set to its out position The control is engaged for offset adjustment when the switch set...

Page 20: ...e probe face parallel to the target surface Probe tilt causes measurement errors so a tilt of less than 5 of range is recommended That would mean that for a 500um 20 mil range sensor the edge of the s...

Page 21: ...manufactured feed through assemblies 3 7 Target Grounding The target being measured by the probes connected to the Accumeasure 9000 must be grounded directly to the board power supply grounds for the...

Page 22: ...nge Gain is adjusted at 100 of range Use the following procedure 1 Set the voltmeter to monitor the output of the amplifier 2 With the unit turned off adjust the probe so it is lightly touching the ta...

Page 23: ...n air gap equal to the maximum probe range value for the probe provided with the system The full range value is a function of the probe used and the zero voltage gap value For example a 20 mil range p...

Page 24: ...ush that can be achieved and this is dependant on several factors including probe type and cable length The maximum push recommended is 40X When employing pushed amplifier and probe combinations the o...

Page 25: ...0 volts 8 Connect the DVM or oscilloscope to the Channel 2 output and repeat steps 6 and 7 for Channel 2 output 9 Connect the DVM or oscilloscope to the sum signal output on the rear panel It should...

Page 26: ...00 it should be returned to the factory for servicing Before following the troubleshooting procedure 1 Set up a probe and grounded target so that probe to target gap is within the probe full scale ran...

Page 27: ...ield to center short circuit and probe for interelectrode short circuits 2 If jumper changes on the probe amplifier board have been performed since the unit has been received from MTI contact MTI to r...

Page 28: ...ighted 1 Check the probe cable connection to the front panel ensure that the cable is securely attached to the receptacle 2 Check for an open circuit in the center wire of the probe cable 3 Check for...

Page 29: ...probe support fixture to ensure the probe and the fixture are not loose 2 Check the shield on the sensor cable and the connectors in the sensor cable signal path for 100 shield integrity and connector...

Page 30: ...FROM MTI INSTRUMENTS 1510A Battery Powered Signal Simulator Generator Proforma 300 Semiconductor Wafer Qualification and General Thickness measurement Capacitance MicroTrak Laser Triangulation Displa...

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