MKS Stabil-Ion 370 Series, Instruction Manual, Page: 16 / 122

1 System Components
1-2
Series 370 Stabil-Ion Instruction Manual - 370119
Figure 1-3 Mounting and Installing Hardware
1. Units, Gas and chamber labels 8. Washer (4 ea.)
2. Rubber stick-on feet 9. Screw 10–32 x .50 in. (4 ea.)
3. Connector, 1/8 in. phone 10. Screwdriver
4. Mounting Bracket (4 ea.) 11. Connector, DA-26P, remote input
5. Screw 10–32 x .31 in. (4 ea.) 12. Connector, DA-15S, remote output
6. Fuses: 3.0 amp, 2.0 amp 13. Connector, process control
7. Fuses: 1.6 amp, 1.0 amp 14. Connector, DB-25S, RS-232
Figure 1-4 Stabil-Ion Vacuum Gauge Control Unit Front Panel
1. Stabil-Ion display, for gauge 1 or 2 8. Stabil-Ion Gauge 2 power switch
2. Convectron Gauge A display 9. Stabil-Ion Gauge 1 power switch
3. Convectron Gauge B display 10. Process Control channel indicator lights
4. Unit of measure label, Torr, mbar or Pascal, user selectable 11. Process Control channel labels
5. Degas power switch 12. Gas selection indicator label
6. Controller power switch 13. Gas selection indicator lights
7. Front door closure
He
N
2
Air
H
2
Ar
Kr
Hg
H
2
O
Ne
N
2
Air
O
2
Ar
SF
NO
D
2
N
2
Air
CO
Ar
Xe
CO
2
chamber 1
chamber 2
chamber 3
roughing
backfill
source
beam line
annealing
residual
e-beam
sputtering
accelerator
system 1
system 2
system 3
implant
diffusion
etching
deposition
metalizing
process 1
process 2
process 3
vent
TORR
PASCAL
MBAR
1
2 3 4 5 6 7 8
10 11 12 13 14
9
IG
2.13 -8
A
B
5.67 -2
745
1
2
3
4
5
6
O
I G 1
O
DEGAS
O
POWER
O
I G 2
O
TORR
12 11 9 8
1
2
3
7
4 5 6
Chamber 1
Chamber 2
Chamber 3
Chamber 4
Chamber 5
Chamber 6
N
2
N
2
N
2
Ar
Ar
10 13