©Newport Corporation
MKS Spectra-Physics Confidential
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Required Maintenance
:
Power supply filters should be cleaned or replaced every 3 to 6 months.
Chiller should have its fluid changed every 6 months at a minimum. Check chiller hoses every 3
to 6 months.
Laser head desiccant should be replaced every 12 months.
ALPS (active laser purification system) should be replaced every 12 months.
