MKS Granville-Phillips 358 series, Instruction Manual

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Chapter 2
22
Series 358 Micro-Ion Controller Instruction Manual - 358013 - Rev. B
Convectron Gauge
Pressure Range 1 x 10
–4
Torr to 990 Torr, N
2
equivalent
Display Resolution 2 significant digits, except for 1 significant digit in 1 x 10
–4
Torr decade
Gas Type N
2
, air (for direct reading)
Display Update Time 0.5 sec. typical. Switch selectable to 3 sec./reading, averaged
Analog Output 0 – 7 Vdc, logarithmic, 1 V/decade
Ion Gauge Turn-On Range Less than or equal to 100 mTorr (1 x 10 -1 Torr)
Sensor Material Gold-plated tungsten
Mounting Orientation Gauge axis must be horizontal to provide accurate measurement above about
1 Torr
Operating Temperature +4 °C to +50 °C ambient, noncondensing
Bakeout Temperature +150 °C maximum, nonoperating, cable disconnected
Cable Bakeout Temperature +105 °C maximum
Ion Gauge Pressure Range* See Table 3-1 on page 30
Table 2-3 Specifications