EDH0387En1020 — 09/18
4
BG Series Goniometric Cradles
3.2
Mechanical Specifications
CAUTION
To reach specifications stated, stages must be fixed on a plane surface
with a flatness of 5 µm.
3.3
Load Specification Definitions
Normal Load Capacity (Cz)
Maximum load a rotation stage can move while maintaining specifications.
This value is given with speed and acceleration specified for each rotation
stage, and with a load perpendicular to bearings.
Off-Centered Load (Q)
Maximum cantilever-load a rotation stage can move: Q
≤
Cz ÷ (1 + D/a)
D: Cantilever distance.
3.4
Load Characteristics and Stiffness
Guaranteed and Typical Specifications
Guaranteed maximum performance values are verified per Newport's A167
metrology test procedure. For more information, please consult the
metrology tutorial section in the Newport catalog or at
www.newport.com
BGS50CC BGS50PP BGS80CC
BGS80PP
BGM120, BGM160,
BGM200
Travel Range (°) ±30 ±30 ±45
±45
±45
Minimum Incremental Motion (°) 0.0005 0.0002 0.0005
0.0002
0.002
Uni-directional Repeatability Typical
(1)
(°) 0.001 0.001 0.001
0.001
0.004
Bi-directional Repeatability, Typical
(1)
(°) 0.013 or ±0.0065 0.016 or ±0.008 0.003 or ±0.0015
0.005 or ±0.0025
0.024 or ±0.012
Absolute Accuracy, Typical
(1)
(°) 0.05 or ±0.025 0.07 or ±0.035 0.05 or ±0.025
0.06 or ±0.03
0.05 or ±0.025
Maximum Speed (°/s) 10 4 20
20
CC and BPP: 20, PE: 2
Wobble, Typical
(1)
(µrad) 200 or ±100 200 or ±100 200 or ±100
200 or ±100
200 or ±100
MTBF (h) 20,000
1)
For the definition of Typical and Guaranteed specifications see "Motion Basics Terminology & Standards" Tutorial at www.newport.com
The actual performance of BG stages are not verified on all production units, hence typical specifications are provided.
G
U
AR
ANTE
E
D
S
P
E
CIFICATIO
N
S
BGS50
BGS80
BGM120
BGM160
BGM200
Cz, Normal centered load capacity (N)
20
60
200
300
500
a, Construction parameter (mm)
30
40
70
90
120
k
a
, Radial compliance (µrad/Nm)
100
20
10
5
2
My, Maximum torque (Nm) PE:
–
–
10
20
29
BPP:
0.5
1
6
16
17
CC:
0.5
1
9
10
10
Q, Off-center load:
Q
≤
Cz ÷ (1 + D/a)
Where D = Cantilever distance in mm
k
α
Z
Q
Y
D
Cz
X
My
