902B Abs Piezo
Operation manual
5
Unpacking
Before unpacking the 902B Absolute Piezo transducer, check all surfaces of the packing material for
shipping damage. Inspect for visible damage. If found, notify the carrier immediately.
Check to be sure the 902B package contains these items:
Part number
Description
902B-xxxxx
902B Transducer
100017632/100017729
Short form manual (15 pin version)/Short form manual (9 pin version)
100017096
Documentation & Software DVD
If any items are missing, contact MKS Customer Service at +1-833-986-1686 or your local MKS sales office
or distributor.
Part number
The 902B Absolute Piezo part number system has 5 digits that identify flange, communication interface,
analog output type, I/O connector and sensor sealing type. Transducers can be delivered with customer
configuration of various parameters like setpoint settings. These specials have an additional 4 digits after the
regular part number.
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902B-
1
1
0
2
0
-
0 Standard
2 IP54
4 Display
6 Display SI
1 SUBD 9 pin male / one relay
2 SUBD 15 pin HD male / no relay
3 SUBD 15 pin HD male / three relays
5 SUBD 15 pin HD male / three relays / Dual analog out
8 RJ45/FCC68 8 pin (Edwards, Oerlikon type)
9 Hirschmann 6 pin (Pfeiffer / Inficon type)
0 0-10 V (Linear 10 mV/Torr)
1 0-5 V (Linear 5 mV/Torr)
2 2-10 V (LOG10)
3 1-5 V (LOG5)
4 1 V/decade
5 0-10 V (100 mV/Torr)
6 1-9.8 V
1 RS232 / Analog
2 RS485 / Analog
0 Custom
1 KF16
3 NPT 1/8”
4 VCR4
5 VCR8