647C
3. Functionality
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3. Functionality
3.1 The MAIN MENU
After turning on the power switch (1) the MAIN MENU is displayed. From this menu the different
submenus are accessible. (See also figure 4).
3.2 The USER DISPLAY menu
MGC 647C V3.0
CH1 CH2 CH3 CH4
0.000 1.750 1.400 0.000
SCCM SCCM SLM SLM
CH5 CH6 CH7 CH8
0.000 0.000 0.000 0.000
SLM SCCM SCCM SCCM
PRESSURE 0000.0 mbar
TOTAL FLOW: 001.4 SLM GAS MENU: X
00 ERRORS FLOW ON INPUT DIRECT
Figure 6
The USER DISPLAY menu allows monitoring the system during operation. It displays all gas flows
of the connected Mass Flow Controllers.
All gas flow values are displayed in a 4 digit format without limiting the resolution.
Additionally the physical unit of the gas flow is shown below. The sum of all gas flow
values (TOTAL FLOW) is displayed additionally. The unit of the total flow can be selected through
the keyboard.
The user can select one out of five predefined composition ratios (see also GAS COMPOSITION
menu) through the GAS MENU parameter. The stored composition
ratios are labled with numbers 1 to 5. X means that none of the stored ratios is activated. In this
case the setpoints for the mass flow controllers are the ones defined in EXTENDED DISPLAY.
The displayed value of TOTAL FLOW is the sum of all single gas flows. Because flow units of
different decades (e.g. SCCM and SLM) are added, it might come to discrepancies between the
two displays, which are due to rounding errors. Step through the flow units of the TOTAL FLOW, in
order to optimize TOTAL FLOW display.
Since negative flow values are not added to TOTAL FLOW, channels wich are turned off can not
cause errors.