MKS 356 Micro-Ion Plus Series, Instruction Manual

Page: 54 / 76

Chapter 3
54
Micro-Ion
®
Module Instruction Manual - 356007-GP
TS - Calibrate the Module
at Atmosphere
Example TS command from host:
#01TS
↵
Example response from module:
*01 PROGM OK
↵
If the module returns a “RANGE ER” message in response to the TS
command, the atmospheric calibration has failed. The raw sensor voltage is
outside the normal range for the Conductron sensor. See Table 3-20 on
page 57 to troubleshoot the problem.
If the module has an optional display, the display will indicate “– – –”
during the push-button calibration.
TZ - Calibrate the Module
at Vacuum
Example TZ command from host:
#01TZ
↵
Example response from module:
*01 PROGM OK
↵
If the module returns a “RANGE ER” message in response to the TZ
command, the vacuum pressure calibration has failed. The raw sensor
voltage is outside the normal range for the offset of the Conductron sensor.
See page 57 to troubleshoot the problem.
The Micro-Ion gauge will turn ON after the TZ command has been sent.
SU – Set the Pressure Unit
The example set unit (SU) command sets the pressure unit to Torr:
Example SU command from host:
#01SUT
↵
Response from module:
*01 PROGM OK
↵
• An SUT command sets the pressure unit to Torr.
• An SUM command sets the pressure unit to millibar.
• An SUP command sets the pressure unit to Pascal.
RST – Reset the Module
to Power-up State
The reset (RST) command resets the module to power-up status.
RST command from host:
#01RST
↵
Response from module: None
Sending the RST command has the same effect as cycling power to the
module. Communication is re-enabled two seconds after you’ve sent the
RST command.
TLU – Toggle the Locked
Functions
In the default operating mode, all interface functions are unlocked. Use the
toggle lock/unlock (TLU) command to lock or unlock any of the interface
functions listed in Table 3-18.