System Schematic
3Flex Service Manual
2-18
Aug 2013
System Schematic
The schematic diagram in the 3Flex software displays the following:
Schematic valves are as follows:
All instruments have 1000-Torr on all three ports.
1-port Micropore units: Port 2 has 10 and 0.1 transducers
2-port Micropore units: Ports 1 and 2 have 10 and 0.1 transducers
3-port Micropore units: All ports have three transducers
• Valves and their current states
• Pressure reading from the transducers
• Temperature readings
• Sample and Po ports
• Location and status of the elevator
• During operation, status of the analysis
1 thru 3
Sample ports
7
Vacuum isolation
4
Po port
8
Gas inlet vacuum
5
Servo supply
11 thru 16
Gas inlets
6
Manifold vacuum
Unmarked
Servo valve
Green = open
White = closed (when in Manual Mode, yellow = closed)
Temperature
Po port transducer reading
Vacuum gauge reading
readings
Sample port
transducer
readings
Manifold transducer reading
Elevator
