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FSC1/7 and FSC1000 Operation
FSC1/7, FSC1000
5.5.4
Performing an Adjustment
i
Only use undamaged calibration foils. Contamination, bends or damage within the black circle will lead
to incorrect results.
Only use the foil within the black circle for the adjustment.
1
Foils are also available with a certificate.
It is not possible to certify, or recertify, the foils after the fact.
Switch to the
New Calibration
menu.
The adjustment can be started when
Ready
is displayed in the
status window.
Fig. 15 Adjustment ready
You must select at least two support points for an adjustment,
e.g. 0 µm (= without calibration foil, measurement directly on the substrate) and 100 µm.
Place the first calibration foil on the substrate, place the
sensor on top, avoid vibrations/tilting and trigger the mea-
surement.
Calibration foil 1
Substrate
1) Influences due to film tolerances are not considered with the adjustment.