Malema M-1500 Series Installation And Operating Manual Download Page 1

malema flow sensors

malema flow sensors

malema flow sensors

malema flow sensors

malema flow sensors

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Inline Ultrasonic Flowmeter

Ultrasonic Flowmeters

Installation and Operating Manual

Installation and Operating Manual

Installation and Operating Manual

Installation and Operating Manual

Installation and Operating Manual

M-1500 Series

M-1500 Series

M-1500 Series

M-1500 Series

M-1500 Series

• Ultrasonic flow sensing technology - robust

proven technology

• Capable of measuring flows from

       1 - 4000 ml/min

• Measuring accuracy of ±2% of READING

(5% of reading below 20% of flow range)

• Compact design - ideal for use in semi-

conductor process tools

• Sensors/Transducers sit outside tube - hence

completely non-invasive

   • No pressure drop - since there is no

obstruction in flow path

   •    Minimal bubble entrapment compared to
       other designs due to INLINE flow path
   • Ideal for precise measurements in low flow

applications

   • No moving parts: hence no particle

generation

   • Fast response time (0.1 sec) ideal for CMP

process measurements where flow
fluctuations are high due to use of peristaltic
pumps

   • Transducers resistant to harsh chemical

environments (NEMA 4X compliance)

• CVD, CMP, and lithography tools
• Medical Devices
• Wet process systems
• Corrosive chemical distribution
• Laser equipment
• Cooling systems

This flowmeter uses a non-intrusive method to determine the
flow rate of the liquid. Two piezoelectric transducers are
mounted on the outer diameter of the flow tube and are excited
producing a vibration. Alternately each transducer’s ultrasonic
disturbance transmits through the tubing wall and is propagated
along with the liquid flow and back against the flow. The
propagation wave velocity varies with flow rate and is
proportional to flow rate. The flow rate can be determined by
measuring the variation of these propagation wave velocities.
(Covered by U.S. Patents)

A p p l i c a t i o n s

A p p l i c a t i o n s

A p p l i c a t i o n s

A p p l i c a t i o n s

A p p l i c a t i o n s

F e a t u r e s

F e a t u r e s

F e a t u r e s

F e a t u r e s

F e a t u r e s

Operation

Operation

Operation

Operation

Operation

C e r t i f i c a t i o n s

C e r t i f i c a t i o n s

C e r t i f i c a t i o n s

C e r t i f i c a t i o n s

C e r t i f i c a t i o n s

Applied for UL and CE certificates.

The M-1500 series is an inline primary flow sensor and
externally mounted controller unit. The flow sensor is a
straight through flow tube that uses “Transit Time” differential
method with a microprocessor based measurement design
for precise measurement of flow rate. The controller elec-
tronics receives the raw flow rate signal from the sensor and
provides flow rate information in terms of analog and pulse
output signals.

Summary of Contents for M-1500 Series

Page 1: ...and lithography tools Medical Devices Wet process systems Corrosive chemical distribution Laser equipment Cooling systems This flowmeter uses a non intrusive method to determine the flow rate of the liquid Two piezoelectric transducers are mountedontheouterdiameteroftheflowtubeandareexcited producingavibration Alternatelyeachtransducer sultrasonic disturbancetransmitsthroughthetubingwallandispropa...

Page 2: ...wmeters M 1500 Series Dimensions Dimensions Dimensions Dimensions Dimensions SENSOR DIMENSIONS SENSOR DIMENSIONS SENSOR DIMENSIONS SENSOR DIMENSIONS SENSOR DIMENSIONS DIMENSIONS FOR DIMENSIONS FOR DIMENSIONS FOR DIMENSIONS FOR DIMENSIONS FOR SINGLE CONTROLLER SINGLE CONTROLLER SINGLE CONTROLLER SINGLE CONTROLLER SINGLE CONTROLLER Figure 1 Figure 2 Available in 1 16 1 4 Also ...

Page 3: ... VDC 10 300mA OptionalDisplay 4digit7segmentdisplay indicates instantaneous flow rate in ml min AmbientTemperaturerange 32 115 F 0 46 deg C Fluid Temperaturerange 50 140 F 10 60 deg C MaximumOperatingPressure 70 psig for PFA CableMaterial PTFE Jacketed Custom shieldedcable CableLength 3 Meters max FluidViscosity 8 cP max 1 TimeConstant Field Adjustable 0 1s to 5s 1 Higher viscosities would require...

Page 4: ...ing Hardware Use four M4 x X X 0 35 thickness of the mounting plate Philip pan head screw not provided to secure the M 1500 sensor onto the panel Itisadvisabletomounttheflowsensorwiththeflowgoingverticallyupward Thisensuresthatnobubblesget trappedwithinthesensor Thisalsopreventsanysedimentationfromthefluidfromaccumulatinginsidethe sensorsection Itisadvisabletomountthesensoratapositionintheflowcirc...

Page 5: ...Inline Ultrasonic Flowmeter Ultrasonic Flowmeters Controller The controller module can be panel mounted as shown in figure4 below CAUTION All possible electric noise sources in the vicinity of flowmeter such as motors pumps power relays or solenoid valves should be fitted with suitable surge suppressor Figure 4 ...

Page 6: ...alfunction of the unit In case this sequence is not followed please power the unit down disconnect and reconnect the sensor connector and then power the unit up The figure below shows the connector located on the back of the controller The description of each terminal is listedonthefigure5 Please use electrical conductors of size AWG 24 20 stripped and tinned about 5 mm These can be inserted intot...

Page 7: ...hereadingonthecontrollerunitas ZERO If yes the ultrasonic flowmeter is ready to use and does not have to be ZERO SET If not ensure that the reading is STEADY This indicates that the flowmeter needs to be ZERO set Press ZERO buttononthecontrollerwhilemaintainingSTATIONARYliquidinsidethetube You should see the reading on the controller go to zero in a few seconds Whiletheflowmeterisbeing ZEROSET the...

Page 8: ... t n o g n i d a e r 5 r O w o h s y a l p s i D e h t e d i s n i w o l f e h t f i d e y a l p s i d s i r O d e i f i c e p s e h t n a h t r e t a e r g s i e b u t w o l f t s u j d A t i n u r a l u c i t r a p t a h t f o e l a c s l l u f e h t d n a e l a c s l l u f w o l e b e t a r w o l f e h t g n i d a e r d i l a v a w o h s d l u o h s r e t e m w o l f 6 s w o h s y a l p s i D r...

Page 9: ... N O e g n a R w o l F h g i H F F O 6 t n a t s n o C e m i T t u p t u O w o l e B e l b a T e e S 7 t n a t s n o C e m i T t u p t u O w o l e B e l b a T e e S 8 t n a t s n o C e m i T t u p t u O w o l e B e l b a T e e S P I D H C T I W S 6 P I D H C T I W S 7 P I D H C T I W S 8 e m i T t u p t u O t n a t s n o C S U T A T S N O N O N O c e S 5 0 N O N O F F O c e S 0 1 N O F F O N O c e...

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