LN0369E2108E0
Mass Flow Controller
Instruction Manual
MC-3000L-TC Series
Safety Precautions
Incorrect handling may cause death or injury
(1)
Before connecting the fittings, check that no damage or defects are found on
the fittings. Make connections properly and make sure that a leak test is
conducted before actual operation to prevent fluid from leaking into the
atmosphere (Hereafter, the measured fluid is called “gas” or “fluid”).
(2)
DO NOT
apply any fluids corrosive to materials exposed to gas. Corrosion
may cause fluid to leak into the atmosphere. Check the gas type to be used in
advance.
(3)
This device is not designed as an explosion proof structure.
DO NOT
use this
device in a place where explosion-proof structures are required. Doing so may
cause fire or explosion.
Incorrect handling may lead to medium or slight injury or may
cause damage to, or loss of, facilities or equipment
(1)
Observe the precautions listed in the WARNING (above).
(2)
Strictly observe the electrical specifications. Not doing so may cause fire,
damage to sensors or malfunction.
(3)
This device is not designed to be waterproof.
DO NOT
locate this device
outdoors or in a place where it may be splashed with water. Doing so may cause
fire, trouble, or malfunction of the device.
(4)
DO NOT
modify this device. It may cause fire or other problems.
(5)
While a power supply is applied to the device, +15VDC and -15VDC must be
applied simultaneously. If only +15VDC or -15VDC is applied, electronic
circuits will become unstable and it may cause a malfunction.
(6)
This device is not designed to handle hot swap. Please avoid attaching and
removing the power supply connector and interface connector with the power
switched on. Attachment and/or removal with the power on may result in
failure of the device.
(7)
This device is a precious device, please handle it carefully. Dropping down or
handling it carelessly will cause damage. Please use assist instrument while
moving or setting the device.
(8)
Regular maintenance is recommended for steady use of this device
(Recommended proofreading frequency is once a year).
1. Introduction
This manual explains basic operation of the MC-3000L-TC series (Hereafter, it is
called "MFC"). Please read through this manual and other separate volumes (Digital
Interface Manual, Special Function Manual, Command Chart) carefully to
familiarize yourself with the features of this device.
2. Summary
The MFC is high performance mass flow controller for gas using thermal flow
sensor and high response solenoid actuator valve.
3. Features
The MFC is the following features.
(1)
LINTEC’s proprietary ambient temperature compensation type flow sensor is carried.
·
Low sensor temperature, long-time steady monitor, and few problems such
as degradation of gas to be monitored.
·
The effect of ambient temperature is less because the sensor temperature is
kept at the ambient temperature.
·
Steady temperature distribution of sensor and high-speed response.
(2)
Digital computing system with microprocessor and high-resolution A/D, D/A
converter is carried.
· High functionality.
·
By setting of device number (address), multiple devices can be controlled
through a single interface.
· Many additional are provided as standard, e.g., totalizer function, zero adjust,
ramping function.
(3) Universal digital Interface (RS-485).
(4)
Small dead space structure using a diaphragm valve.
(5)
Superior corrosion resistant sealing materials make maintenance easy. Metal
seals (Au).
(6)
Particle-free structure.
(7)
By using a metal case and various types of filters, steady operation can achieve
even in an environment of high-frequency noise and stationary magnetic field.
(8)
Based on RoHS.
4. Specification / Dimensions
(1) Specification
Name
Mass Flow Controller
Model
MC-3102L-TC
MC-3202L-TC
Standard flow rate in nitrogen
10 SCCM to 5 SLM
~25 SLM
Operating temperature
(High temperature part)
-L
80 to 100 ºC·0 to 80%RH (Condensation should be avoided)
-H
100 to 120 ºC·0 to 80%RH (Condensation should be avoided)
Operating temperature
(Control part)
5 to 50 ºC·0 to 80%RH
(Condensation should be avoided)
Baking temperature
Below 150 ºC
Valve operation mode
Normally closed valve
Internal surface treatment
-TC: No treatment -SC: Precision polishing
Minimum controllable flow rate
2%F.S.
Analog flow rate output signal
Proportional to flow rate 0 to 5VDC
Analog flow rate setting signal
Accuracy
±1.0%F.S.
Repeatability
±0.2%F.S.
Response time
1 second (Typical)
3 seconds (Typical)
Operating differential pressure
50 to 300kPa
150 to 300kPa
Maximum operating pressure
300kPa(G)
Withstanding pressure
1MPa(G)
Storage temperature & Humidity
5 to 50 ºC·0 to 80%RH (Condensation should be
avoided)
Leak integrity
Less than 1×10
-11
Pa · m
3
/sec (He)
Mounting direction
Free
Wetted materials
Stainless steel 316L, PTFE, Au
Seal Materials
Au
Actuator
Solenoid actuator
Fittings
6.35VCR (124) 6.35SWL (127)
Power supply
+15VDC±3%: 100mA -15VD±3%C: 200mA
Digital interface
RS-485 (2-wire)
Option
B:
Applied to liquefied gas
Weight
Approx. 1.2kg
(Controlling part 0.2kg, High-temperature part 1kg)
·Connect the MFC to the frame ground.
(2) Dimensions
5. Ordering information
M C - 3 1 0 2 L – T C - 4 J R 2 B L 0 A 0 – d d – e e - f f
[1]
[2]
[3]
[4]
[5]
[6]
[7]
[1] Series model MC: Mass Flow Controller Series
MC-3102L: Small flow rate
MC-3202L: Large flow rate
[2] Inner surface treatment
-TC: No treatment
-SC: Precision polishing
[3] Fitting
4JR1: 6.35UJR106, 4JR2:6.35UJR124
4VR1:6.35VCR106, 4VR2:6.35VCR124, 4SWL :6.35SWL
[4] Optional
B: Applied to liquefied gas,
J:
Valve is closed at below 2% setting
L: Temperature range 80 to 100℃
H: Humidity range 100 to 120℃
※Default setting is labeled “AA0A0”. Please consult for more information.
[5] Gas type
[6] Full scale flow rate
[7] Flow rate unit
SCCM (0 ºC standard), SLM (0 ºC standard)
6. Connection
(1) Analog interface connector
Mounted connector : D-Sub 9 pin(male)
Pair connector : D-Sub 9 pin(female) (Fixed size of screw : M3)
Pin No.
Single name
Function
1
Valve on-off input (Note1)
+15VDC: OPEN,
-15VDC: CLOSE
2
Flow rate output signal 0 to 5VDC
Flow rate output voltage plus side 0 to 5VDC
3
Power supply input +15VDC±3%
Power supply (plus) 100mA
4
Power supply COMMON (Note2)
COMMON ±15VDC
5
Power supply input -15VDC±3%
Power supply (minus) 200mA
6
Flow rate setting signal 0 to 5VDC
(Note1)
Flow rate setting voltage plus side 0 to 5VDC
7
Flow rate output COMMON (Note2)
Flow rate output voltage COMMON
8
Flow rate setting COMMON (Note2)
Flow rate setting voltage COMMON
9
N.C.
N.C.
Note1) Input impedance of flow rate setting signal is 100kΩ. Valve override impedance is 100kΩ.
Note2) Pin No.4,7,8 are connected internally.
Wirings should be done as shown below in order to remove the effect of potential difference
among the COMMON.
Do not connect.
Flow rate setting signal COMMON[8],Flow rate output signal COMMON[7],
and Power supply COMMON[4] in
the power supply unit.