0142530-000 AB
KLA-Tencor Confidential
3-97
3/13/09
KLA-Tencor P-16+ / P-6 User’s Guide
Scan Recipes - Feature Find
Matching Scores
3
The Matching Scores function in the way as the scores for sequence recipe
pattern recognition. As each Feature Find scan line completes, a pattern
recognition score is given that shows how well the model matches the scan
data. If the score is above the High score, the model is found in the scan data,
the Feature Find scans stop, and the found location become the Feature Find
offsets for the measurement scan. If the entire Feature Find scan is completed
without a score larger than the High score, then algorithm looks for the largest
score that is above the Low score. This score and the corresponding location
become the Feature Find offsets for the measurement scan. If the Feature Find
scan completes with all scores below the Low score, then the Feature Find
scan fails. So the High and Low scores function in the same manner as the
Minimum Score to Stop Groping and the Lowest Match Score from sequence
pattern recognition operations, respectively
Figure 3.76
Dual Damascene Example for Model Feature using Depth Based
Matching
