0142530-000 AB
KLA-Tencor Confidential
3-73
3/13/09
KLA-Tencor P-16+ / P-6 User’s Guide
Scan Recipes - Creating and Editing a Scan Recipe
The user can set a percentage factor such that, if the bin containing the most data
points (reference bin) has a neighboring bin that contains the user set percentage of
the number of data points in the reference bin, it is also considered as part of the same
mode and used in the leveling procedure.
Figure 3.56
Histograms of Scans A and B
Nu
mber of
da
ta
poi
nt
s in
e
ach bin.
2
10
6
8
4
12
14
16
18
20
Z Min
Lowest Plane
Z Mid
Most Populous Plane
Z Max
Highest Plane
1
2
3
4
5
6
7
8
9
10
11
12
13
Bin Number
Numbe
r of
dat
a
po
in
ts
in each
bi
n.
2
10
6
8
4
12
14
16
18
20
Z Min
Lowest Plane
Z Mid
Most Populous Plane
Z Max
Highest Plane
1
2
3
4
5
6
7
8
9
10
11
12
13
Bin Number
Scan A
Scan B
Figure 3.57
Multiple Bins (Mode) Used to Define a Plane
Z Max
Highest Plane
Z Mid
Most Populous
Z Min
Lowest Plane
Scan B
