Birck Nanotechnology Center Alpha-‐Step IQ Surface Profiler
LOCATION: Cleanroom, L-Bay EFFECTIVE: 02/23/15 CONTACT: [email protected]
PAGE: 1 of 4
This instruction covers setup and use of the KLA-‐Tencor Alpha-‐Step IQ (ASIQ) profilometer.
Table of Contents
1.
Safety Cautions Pg. 1
2.
Equipment
Pg. 1
3.
Definitions
Pg. 2
4.
Operating Guide Pg. 3
5.
Troubleshooting Pg. 4
1.
SAFETY CAUTIONS
The ASIQ is a relatively risk-‐free tool for operator, with no obvious personal safety hazards. That said, the
operator can still damage the instrument in several ways.
DO NOT place, remove, or move samples while the
stylus tip is down.
This may damage the stylus tip.
Also, adjust the stage position (x,y) using the control knobs
and not your hands.
2.
EQUIPMENT
Stage Control
Sample Platform
User Interface Computer, USB (Under Table)
Camera Zoom Control
Figure 1: ASIQ Components