Section 4: Maintenance
S540 Power Semiconductor Test System Administrative Guide
4-4
S540-924-01 Rev. D / January 2019
Types of electrical hazard tasks
Live circuit
type
Description
1
Equipment is fully de-energized.
2
Equipment is energized. Energized circuits are covered or insulated.
SEMI S2-0715a standard, NOTE 41: Type 2 work includes tasks where
the energized circuits are or can be measured by placing probes through
suitable openings in the covers or insulators.
3
Equipment is energized. Energized circuits are exposed and inadvertent
contact with uninsulated energized parts is possible. Potential exposures
are no greater than 30 V
RMS
, 42.4 V
peak
, 60 VDC, or 240 VA in dry
locations.
4
Equipment is energized. Energized circuits are exposed and inadvertent
contact with uninsulated energized parts is possible. Potential exposures
are greater than 30 V
RMS
, 42.4 V
peak
, 60 VDC, or 240 VA in dry locations.
Potential exposures to radio-frequency currents, whether induced or via
contact, exceed the limits in SEMI S2, Appendix 3, Table A3-1.
Repair and replacement
Keithley Instruments offers a fee-based service agreement with all S540 systems. Under this
agreement, a field service engineer will either repair or replace equipment. For more information
about this service agreement, contact Keithley Instruments at 1-800-935-5595.
For additional information about specific parts, operations, and maintenance of Keithley instruments,
refer to the documentation for the instrument for details before attempting to replace or repair any
equipment. You can download manuals for related instruments at
Instrument removal and installation
The following topics describe the process for removing or installing instruments in the system, and
any special precautions that must be taken.
Remove system power
Severe personal injury or death due to electrical shock or electrocution may result if power is
not removed before moving, removing, or installing equipment. Do not attempt to perform
these procedures unless you are qualified to do so and are wearing personal protective
equipment (PPE) suitable for voltages greater than 40 VAC.
Make sure the system and instruments that are being installed, moved, or removed are turned
off with all power source/cables unplugged.