S530 Parametric Test System Test Subroutine Library User's Manual
Section 3: Test subroutine library reference
S530-907-01 Rev. A / September 2015
3-57
res4
This subroutine measures the resistance of a four-terminal resistor.
Usage
double res4(int
his
, int
him
, int
los
, int
lom
, int
sub
, double
itest
)
his
Input
The HI source pin of the device
him
Input
The HI measure pin of the device
los
Input
The LO source pin of the device (ground)
lom
Input
The LO measure pin of the device
sub
Input
The substrate pin of the device
itest
Input
The forced current, in amperes
Returns
Output
The calculated resistance:
0.0 = Measured voltage is < 0.002 V
2.0E+21 = Measured voltage is within 98 % or the 40 V voltage
limit
Details
This subroutine calculates the resistance of a four-terminal resistor (usually a van der Pauw structure)
by forcing current and measuring the voltage. All device pins must be unique.
If a positive substrate pin is specified, the substrate is grounded. If a positive substrate pin is not
specified, the substrate is left floating.
A delay is incorporated into the
res4
subroutine; this delay is the calculated time required for stable
forcing of
itest
with a 40 V voltage limit.
Source-measure units (SMUs)
SMU1: Forces
itest
, 40 V voltage limit
SMU2: Set to VMTR, measures voltage
Example
result = res4(his, him, los, lom, sub, itest)
Schematic
