S530
Diagnostic Manual
Appendix A: Non-Kelvin (2W) S530 system diagnostics
Figure 32: Test connections, rows C and D
Non-Kelvin leakage test
The purpose of the leakage test is to check different paths of the matrix. The test consists of pin and
SMU connections. The pin test determines the relays and paths that connect to the device under test
(DUT) pins, while the SMU test determines the relays and paths that connect to the SMUs.
Leakage pin test
The pin test uses SMU1 and SMU2 using Series 2600A instruments. Each pair of adjacent pins will
be tested with pairs of rows. Each pair of rows consists of row
n
and row
n
+1 (where
n
= 1, 3, 5*). The
last pin is connected and tested with the first pin and continues in that order to make sure that all pins
are tested. After connecting each set of pins and rows, execute the test by forcing 60V from the first
SMU and forcing 0V from the second. Measure the current several times for a period of 2 seconds
using the second SMU. If the measured current is higher than 1µA, Fail will display in the ACS GUI
test log and in the diagnostic report in the following default directory:
C:\ACS\Projects\Diagnostic\Reports
NOTE
The pair of rows will be tested in reverse order once to test the paths opposite direction. For example,
the row A and B test path will change to row B and A.
Leakage pin test flow
1. Every pair of adjacent pins will be tested. The last pin will be tested with the first pin to cover the
complete set of DUT pins. For example, pin 4 to pin 1, pin 1 to pin 2, pin 2 to pin 3, pin 3 to pin 4.
2. If the system contains a high-voltage Model 2410 SMU, only the row A and B pair will be used
during the test of the high-voltage SMU.
3. The pair of rows will be tested in reverse order once to test the paths opposite direction. For
example, the row A and B test path will change to row B and A.
S530-906-01 Rev. A / March 2011
2-11
