Keithley 7172 Instruction Manual Download

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Summary of Contents for 7172

Page 1: ...cess underutilized and idle equipment along with credit for buybacks and trade ins Custom engineering so your equipment works exactly as you specify Critical and expedited services Leasing Rentals Dem...

Page 2: ...del 7172Low Current 8 12 Matrix Card Instruction Manual A G R E A T E R M E A S U R E O F C O N F I D E N C E Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg co...

Page 3: ...ES ARISING OUT OF THE USE OF ITS INSTRUMENTS AND SOFTWARE EVEN IF KEITHLEY INSTRUMENTS INC HAS BEEN ADVISED IN ADVANCE OF THE POSSIBILITY OF SUCH DAMAGES SUCH EXCLUDED DAMAGES SHALL INCLUDE BUT ARE NO...

Page 4: ...Matrix Card Instruction Manual 1991 Keithley Instruments Inc All rights reserved Cleveland Ohio U S A Document Number 7172 901 01 Rev C Artisan Technology Group Quality Instrumentation Guaranteed 888...

Page 5: ...suring Do not exceed 200V between any two pins or between any pin and chassis Inspect the connecting cables and test leads for possible wear cracks or breaks before each use For maximum safety do not...

Page 6: ...evels greater than 30V RMS 42 4V peak or 60VDC are present A good safety practice is to expect that hazardous voltage is present in any unknown circuit before measuring Operators of this product must...

Page 7: ...er transformer test leads and input jacks must be purchased from Keithley Instru ments Standard fuses with applicable national safety approvals may be used if the rating and type are the same Other co...

Page 8: ...POINT CONFIGURATION 2 pole Form A Signal Guard CONNECTOR TYPE 3 lug triax Signal Guard Chassis MAXIMUM SIGNAL LEVEL Pin to pin or pin to chassis 200V 1A carry 0 5A switched 10VA CONTACT LIFE Cold Swit...

Page 9: ...clud ing combined quasistatic and high frequency CV meas urements van der Pauw resistivity measurements and semiconductor parameter analysis SECTION 3 Applications Contains performance verification pr...

Page 10: ...ctors 2 3 2 5 2 Recommended Cables and Adapters 2 3 2 5 3 Triaxial to Banana Plug Adapter 2 3 2 5 4 General Instrument Connections 2 5 2 5 5 Keithley Instrument Connections 2 11 2 5 6 Typical Test Fix...

Page 11: ...urement Considerations 3 15 3 6 4 Typical Test Procedure 3 15 SECTION 4 Service Information 4 1 INTRODUCTION 4 1 4 2 HANDLING AND CLEANING PRECAUTIONS 4 1 4 3 OFFSET CURRENT SELF TEST 4 1 4 4 PERFORMA...

Page 12: ...1 INTRODUCTION 5 1 5 2 PARTS LISTS 5 1 5 3 ORDERING INFORMATION 5 1 5 4 FACTORY SERVICE 5 1 5 5 COMPONENT LAYOUT AND SCHEMATIC DIAGRAM 5 1 Artisan Technology Group Quality Instrumentation Guaranteed 8...

Page 13: ...sy Chain Cards 2 24 Figure 2 20 PowerLineGromdLoops 2 25 Figure 2 21 FkninatingGroundLoops 2 25 Figure 2 22 Shi iingExample 2 27 Figure 2 23 DualShieldTestFiiture 2 27 Figure 2 24 GuardedCircuit 2 28...

Page 14: ...tions for path Resistance Verification Figure 4 7 Shorting Measurement Paths Using Trim Tee Adapter Figure 48 Verificatin of On board Electrometer Figure 4 9 IDDataTiming Figure 4 10 Model 7172 Block...

Page 15: ...osspoint Summary Table 52 Crosspoint summary for Resistivity Measurements Table 3 3 Crosspoint Summary for JFET Test SECTION 4 Service Information Table 4 l Table 42 Table 43 Recommended Verification...

Page 16: ...d leak age resistance Model 7l72 cards can be internally connected together or to Model 7072 cards using supplied SMB to SMB 2 p w to expand the number of columns in the ma 1 3 WARRANTY INFORMATION Wa...

Page 17: ...ction manual If an additional instruction manual is required order the manual package Keithley part number 7172 901 00 The l 2 manual package includes an instruction manual and any pertinent addenda 1...

Page 18: ...zed in Table 2 l 1 lO COAXIAL JUMPER ACCESS Coaxial jumpers can be installed to expand rows A H of the matrix using two or more Model 7172 Cards An ac cess door on the mainframe allows access to these...

Page 19: ...To avoid this problem operate the mainframe and matrix card only in a clean environ ment If contamination is suspected clean the card as dis cussed in Section 4 Also the performance verification proce...

Page 20: ...seated secure it to the mainframeby finger tightening the spring loaded 4 To remove a card first turn off the power and dis connect the line cord from the mainframe Discon cTews WARNING The mounting...

Page 21: ...ong as they are of sufficient quality low offset current high leakage resis tance Using substandard cables and adapters may de grade the integrity of the measurements made using the matrix card Seepar...

Page 22: ...male triax tee adapter 3slot male tiax to Z lug female triax adapter BNC to right angle SMB cable Female BNC to female banana adapter Table 2 2 Parts for Special Triaxial Cable Keithley Part or Model...

Page 23: ...pathway is not specified WARNING Hazardous voltage from other guard sources may be present on LO or the DUT if other crosspoints are closed 4 w DMM co ections are shown in Figure 2 5 C In this case a...

Page 24: ...dous voltage from guard so rces may be pres t on LO 7172 Note Use this configuration only for non critical measurements B DMM Common LO Figure Z 5 GeneralInstrument Connections A B 2 6 Artisan Technol...

Page 25: ...Columns DUT L l 7172 C DMM 4Wre ROWS r i Columns DUT D Electrometer Unguarded Volts Figure 2 5 General Instrument Connections C D cont 2 7 Artisan Technology Group Quality Instrumentation Guaranteed 8...

Page 26: ...b 7172 3 r L A F Electmmetsr Fast Current 7172 7 J J i L A G Electrometer Resistance Guarded 7172 Figure 2 5 General Instrument Connections E G cont 2 8 Artisan Technology Group Quality Instrumentatio...

Page 27: ...e 7 J L A 7172 7 2 Jr L A I current source unguarded 7172 J Current Source Guarded 7172 Figure 2 S General Instrument Connections H I cont 2 9 Artisan Technology Group Quality Instrumentation Guarante...

Page 28: ...J SourcelMeasure Unit Notes DtJT shielding guarding not shown See Figures 2 21 and 2 24 Figure 2 5 General Instrument Connections K cont Z 10 Artisan Technology Group Quality Instrumentation Guarantee...

Page 29: ...g a Model 6172 adapter 3 Connect the trim end of a t w banana cable to row B of the Model 7172 4 Connect the banana plug end of the t x banana ca ble to the COM terminal of the Model 617 The short ing...

Page 30: ...SE OUTPUT and SENSE COMMON connectors can be routed through two additional rows using similar cables Model 590 CV Analyzer Connections NOTE For low level voltage measurements connect the inner shield...

Page 31: ...7 II Output Note See Figure 24 for special triax to banana cable 7172 Matrix Card Figure 2 8 Model 230 Voltage Source Connections 2 13 Artisan Technology Group Quality Instrumentation Guaranteed 888 8...

Page 32: ...e Model 6167 adapter to the Model 220 OUTPUT jack 2 Connect a Model 7078TRX 3 or 10 triax cable be tween the guarded adapter and the desired row of the Model 7172 3 Connect the Model 220 GUARD output...

Page 33: ...8 TF I Note See Figure Z 4 for special trim to banana cable 7172 Matrix Card Figure Z 10 Model 220 Current Source Connections 2 15 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SO...

Page 34: ...x I I II 707 TRXTriax I r A Remote Sensing II Y I I 71 n Matrix Card 6 Local Sensing igure Z 11 Model 236 237 238 Source Measure Unit Connections 2 16 Artisan Technology Group Quality Instrumentation...

Page 35: ...se to the device as possible If coaxial probes are to be used con nect GUARD to the probe shield if the probe shield is in s ted from the fixture shield WARNING Usually the chassis ground terminal of...

Page 36: ...v rr r q Switching Matrix As shown in Figure Z 14 the k As shown in Figure Z 14 the Model 7172 is organized as an 8 x 12 eight row by 12 column matrix The rows are an 8 x 12 eight row by 12 column mat...

Page 37: ...SECTION2 Operation Figure 2 14 Model 7172 Matrix Organization 2 19 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com...

Page 38: ...ecause of critical signal paths rows A H are not jum pered through the backplane Instead you must install the supplied coaxial jumpers between appropriate con nectors on Model 7172 cards for more crit...

Page 39: ...ire installation of coaxial jumpers shown shaded Warning Guard potential is on coaxial jumper shields cigure 2 16 Jumper Connector Locations 2 21 Artisan Technology Group Quality Instrumentation Guara...

Page 40: ...SECTZON 2 Operatibn ipre 2 l 7 ntree Cards in Daisy Chain Configuration 2 22 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com...

Page 41: ...ly columns must be jumped extemauy in this configuration Triax tee adapters Model 707 TRX T or Model 237 TRX T can be used to provide daisy chain capability between the triax input connectors Figure Z...

Page 42: ...sufficient length even weak magnetic fields like those of the earth can create sufficient signals to affect low level measurements Two ways to reduce these effects are 1 reduce the lengths of the tes...

Page 43: ...avoid unwanted signals caused by ground loops Ground loops usually occur when sensitive instrumentation is connected to other instrumentation with more than one signal return path such as power line g...

Page 44: ...virhmlly any switching matrix system Otherwise inter ference from such noise sources as line frequency and RF fields can seriously corrupt a measurement In order for shielding to be effective the shi...

Page 45: ...cted to LO 1 Columns r 1 Triax rinner Shield Connected to LO Triax 7172 Card Cigure 2 22 Shielding Example r l L _ _ _ _ _ I Outer Shield Chassis Ground 2 27 Artisan Technology Group Quality Instrumen...

Page 46: ...er amplifier rather than the signal itself In a similar manner guarding also reduces the effective cable capadtance resulting in much faster measure ments on high impedance circuits Because any distri...

Page 47: ...specifications other types of cards do not affect the specifications be came they use different pathways in the mainframe backplane The extent depends on how many cards are used as well as the amount...

Page 48: ...doping profile band bending and mobile ion concentration 3 2 1 Stand Alone System Configuration The stand alone system shown in Figure 3 I can be used to make CV measurements without the aid of a com...

Page 49: ...BNC HP GL PIOtter 1 2 3 4 5 6 7 8 9 10 1 12 I I 0 7051 BNC Input 7172 Matrix Card I Cables I Model 590 CV Analyzer 707 Switching Matrix Note Connect plotter to only one instrument at a time 3 2 Artis...

Page 50: ...12 I 7172 Matrix Card CV Analyzer HP GL 707 Switching Matrix PIOtter IEEE 488 Bus Note Remove jumpers to other 7172 cards if installed to optimize Model 595 measurement accuracy Figure 3 2 Computerize...

Page 51: ...e expected CV sweep 3 Close the cmsspoints necessary to connect the Model 595 to the device under test as summarized in Table 3 1 For example to test device l close Al and 82 4 Place the probes down o...

Page 52: ...s 0 E 10 I I I I I I I I I 0 4E 10 005 00 005 00 KEITHLEY 595 Figure 3 3 Typical Quasistatic CV Curve Generated by Model 595 3 5 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOUR...

Page 53: ...20 8 5 j 1 12 Fi 0 1 05 0 97 0 90 0 82 0 75 igure 34 Keithley 590 00 00 10 500 IOOKHZ x1 Filter Parallel Typical High frequency CV Cum Generated by Model 590 3 6 Artisan Technology Group Quality Inst...

Page 54: ...common source charactelistic testing of a typical JFET 3 3 1 System Configuration Figure 3 5 shows the configuration for a typical multi purpose semiconductor test matrix Instruments in the system pe...

Page 55: ...particular JET Model 196 DMM Measure DC voltages in the range of IOOnV to 300V The Model 196 could also be used to measure resistance in certain applications Device Under Test A three terminal fixtur...

Page 56: ...el 196measures the voltage developed across the samples The matrix card of course switches the signal paths as necessary In order to minimize sample loading which will reduce accuracy the Model 196 DM...

Page 57: ...asurements Crosspoint Closed Current Voltage Sample l 1Sample 2 1Sample 3 Between Between Al B4 E3 F2 A5 B9 E7 F6 A9 812 El1 F10 l 2 A4 Bl E3 F2 A8 85 E7 F6 A12 B9 El1 FIO 2 l A4 B3 E2 Fl A8 87 E6 F5...

Page 58: ...SECTION 3 Applications 0 E I G Ygure 3 9 R tidy Measurement Conventions 3 11 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com...

Page 59: ...ETs are connected in a4 wire sensing configuration This con nection scheme aUows the Model 237 to use remote sens ing to accurately apply Vds to the FETs The Model 236 uses local sensing and is used t...

Page 60: ...SECTION 3 Applications Figure 3 20 MuIti Unit Test System Using Models 236 and 237 Source Measure Units 3 13 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com...

Page 61: ...y of tests on semi conductors and plot data on a built in CRT Test Fixture DUT Pins A c Y 1 12 13e 24 25 36 T T 1 I 12 13 24 25 36 Columns SMUl A SMU 2 B HP 41458 SMU 3 C Semiconductor SMU 4 Parameter...

Page 62: ...appears on guard terml Ids 3 6 3 SPA Measurement Considerations A complete discussion of SPA measurements is well be yond the scope of this manual However there are a few points that should be kept i...

Page 63: ...ons HP 4145 Semiconductor Parameter All Z3 7172 Math Card Triax BNC _I Adapters TO Test Fixture igure 3 12 SPA Connections 3 16 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURC...

Page 64: ...oose the FET Vm ID applica tion 5 Press the PAGE NEXT key and program the SOUTC parameters as required 6 Press the PAGE NEXT key and program the re quired graphing parameters 7 Press the PAGE NEXT key...

Page 65: ...ET For the graphs Vos was swept from OV to 1OV in 0 W increments and Vcs was stepped from 0 to 10 25V ID Variable 1 W VDS Ch2 Linear weep 3 50 ldb Variable 2 VG Ch2 start OP Step Constant vs Chl VDS l...

Page 66: ...Brews J R MOS Phvsics and Technolovv Wiley New York 1982 Sze S M Phvsics of Semiconductor Devices 2nd edition Wiley New York 1985 Van der Pauw L J A Method of Measuring Specific Resistivity and Hall...

Page 67: ...with the repair 2 Do not store or operate the card in an environment where dust could settle on the circuit board Use dry nitrogen gas to dean dust off the board if necessary 3 When making repairs on...

Page 68: ...nt follow this procedure 1 With the mainframe power tuned off plug the Model 7172 into a slot Disconnect all cables from the 2 3 row and column triax connectors Also disconnect all jumpers to other ca...

Page 69: ...SECTION 4 Service Information igure 4 2 DMM Connections to SMB ofthe Model 7172 4 3 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com...

Page 70: ...current should be made at an ambient tem perature between 0 C and 35 C and at a relative humid ity of less than 70 Path isolation and offset current veri fication must be performed at an ambient temp...

Page 71: ...the slot covers 3 After the prescribed warm up period select the amps function and the 2pA range on the Model 617 Zero correct the instrument and then select autoranging 4 Connect the Model 617 to row...

Page 72: ...6172 2 t female to 3 lug male tiaxial adapter The other row is to be connected to the voltage source HI terminal using a specially prepared 3slot trim to banana plug cable the construction of which is...

Page 73: ...Triax Cable Set _ Fiaure 4 5 I Warning Hazardous voltage from the electrometer source may be present on terminals 7172 Matrix Card Figure 44 Connections for Path Isolation Verification 4 7 Artisan Te...

Page 74: ...ltage source and enable zero check Disable suppress and select the amps function on the electrometer 11 Open crosspoints A1 and B2 and close crosspoints A3 and B4 12 Repeat steps 7 through 11 for A3 a...

Page 75: ...Model 196 DMM 7078 m T triax tee adapters 3 237 BAN 3 triax to banana cables 4 Comections Figure 4 6 shows the co ections for the path resistance tests The Model 196 is to be connected to the row and...

Page 76: ...ose crosspoint Al and allow the reading to settle 9 Verify that the resistance reading is 1 5Q 10 Open the mosspoint and disconnect the triax adapt er from colwnn 1 Connect the adapter to column 2 11...

Page 77: ...andMode1263Calibra tor Souce Allow them to warm up for at least one hour before beginning the verification test Select the volts function and the 3OOmV range on the Model 196 With the Model 263 in sta...

Page 78: ...SECTION 4 Service Information igure 48 Verification of On Board Electrometer 4 12 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com...

Page 79: ...unded tip soldering irons 4 6 TROUBLESHOOTING 4 6 1 Recommended Equipment Table 4 2 summ arizes the recommended equipment for general troubleshooting 4 6 2 Using the Extender Card In order to gain acc...

Page 80: ...OBE pulse End of relay data sequence 9 CLK Relay data 128 bits Present when updating relays 10 OE CLK pulses High on power up until first STROBE Present during relay data or ID data sets low Power on...

Page 81: ...able which tells the mainframe which relays to close for a specific crosspoint This configuration table is necessary because some cards such as the Model 7172 require the closing of more than one rela...

Page 82: ...t must be low to energize the associated relay while the output is high when the relay is de energized For example if the Ql output of IJ117 is low relay K199 will be energized 4 7 4 Power on Safeguar...

Page 83: ...SECTION 4 Service Information Figure 4 12 Simplified Schematic of On Board Electrometer 4 17 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com...

Page 84: ...sis ground but this is still used as a ground for the I to V converter In other words consider the single ended 6 volt supply as a differential 3V supply with A analog ground as the ground CAUTION Do...

Page 85: ...mation 1 Matrix card model number 7172 2 Card serial number 3 Part description 4 Circuit designation if applicable 5 Keithley part number 5 4 FACTORY SERVICE If the matrix card is to be rehuned to Kei...

Page 86: ...I C MOUNT RELAY REED RELAY REED RES 27OK 5 1 4W COMPOSITION OR FILM RES lOK 5 1 4W COMPOSlTION OR FILM RES lK 5 1 4W COMPOSlTION OR FILM RES l O7K l l SW METAL FILM RES 1 5M 5 1 4W COMEOSITION OR FIL...

Page 87: ...M u119 IC 12 STAGE BINARY COUNTER 74HCT4040 u120 IC 8BIT PARALLEL TO SERIAL 74HCT165 U121 IC QUAD 2 INPUT NAND 74HCTOO u122 IC OCTAL BUFFER LINE DRNBR 74HC244 VRlOl DIODE ZENER 6 8V IN53424 CASE 17 Wl...

Page 88: ...SHIELD BOTTOM 8 SHIELD TOP 1 SOCKET I C 28 PIN FOR U118 16 TPl 16 CONN TESI FOINT 32 44X1 4 PHILLIPS PAN HD SEMS SCREW SHIELD MOUNTING 2 6 32X3 8 LG PHIL FLAT I ID SCR HANDLE MOUNTING 3 6 32x5 16 PHI...

Page 89: ...M 3 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com...

Page 90: ...Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com...

Page 91: ...Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com...

Page 92: ...Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com...

Page 93: ...Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com...

Page 94: ...Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com...

Page 95: ...Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com...

Page 96: ...alibration only Certi cate of calibration required Data required attach any additional sheets as necessary Show a block diagram of your measurement system including all instruments connected whether p...

Page 97: ...84 93 07 40 Fax 089 84 93 07 34 GREAT BRITAIN Keithley Instruments Ltd The Minster 58 Portman Road Reading Berkshire RG30 1EA 0118 9 57 56 66 Fax 0118 9 59 64 69 INDIA Keithley Instruments GmbH Flat 2...

Page 98: ...uipment Have surplus equipment taking up shelf space We ll give it a new home Learn more Visit us at artisantg com for more info on price quotes drivers technical specifications manuals and documentat...

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