![Keithley 4200A-SCS Reference Manual Download Page 1340](http://html2.mh-extra.com/html/keithley/4200a-scs/4200a-scs_reference-manual_39696431340.webp)
Model 4200A-SCS Parameter Analyzer Reference Manual
Appendix K: Using a Signatone CM500 Prober
4200A-901-01 Rev. C / February 2017
K-11
6. In the
File
menu bar, select the
Save setup As
command to save the file to a hard disk. You can
load this setup later to restore this setup if needed.
Figure 815: CM500 Prober save setup
The Prober is now ready to accept a remote command from the 4200A-SCS.
Set up programmed sites with a subsite
1. Click the
Edit Subsite
icon on the toolbar.
Figure 816: CM500 Prober Edit Subsite icon
2. Select
Wafer
as the subsite device.
Figure 817: CM500 Prober Edit Subsite window
3. Move the wafer stage to the HOME position.
All data recorded for the subsite is relative to the corner of the home die. You can record the position
of the subsite either by keying in the coordinates of the subsite using the keyboard, or by moving the
wafer to the actual position and clicking
Enter
.
4. To step through all the programmed sites and subsites, click the
Run Program Site
icon on the
toolbar.
5. Make sure the Subsite (template) is
Enabled
if subsites are to be used.
6. Click the
To First Site
button to move wafer stage to first site of probing lists.