５
MEASUREMENT OPERATION
5-202
TMPM5200-2
5.1
M Parameters (Advanced)
I
Advanced Control measu
th
xcept in the
G
selec
can be used only for other SPM instruments.
■
Scan
0.3 SP
n this section, the Advanced Control window that appears when you select the General
rement mode is explained as an example. There are functions
at so
ppear in gray or do not appears e
me Advanced Control tab windows a
eneral Advanced Control measurement mode. These functions cannot be utilized in the
ted measurement mode, or they
Size
C
Specify the scanning area in this selection box. Two methods are provided:
lick on the
button in the selection box and
select a scanning area from
the pull-down menu showing some scanning areas.
ning area value is not always the same as the one entered because
the value is rounded.
For example, when you have entered 3.000 um, the scanning area is 3.0
µ
m. If you
have not entered a unit, the previously displayed unit is applied.
The value displayed in the Scan–Size selection box will differ a little from the value
that you entered, because of torsion correction and voltage resolving power.
Offset
The WinSPM software defines the center
n of the to l scan area of the scanner as
the image-offset coordinates (0, 0). Here the image-offset coordinates in X and Y
directions appear.
When you change the setting coordinates, you can move the scan-center position to the
specified image-offset coordinates. This operation is the same as the function in the Scan
Enter a value in the selection box using the keyboard. Then, the nearest
scanning area value is selected.
The selected scan
The maximum scanning area depends on the scanner calibration value selected in
the SPM Calibration
･･･
window.
You can also enter the following units:
nm: 10
–9
m
um: 10
–6
m
positio
ta
Area setting.
