M-2000® Hardware Manual
©2023 J.A. Woollam Co.
97
Figure 5-15. Example data after measurement with Recipe – Analysis tab.
5.3
Data Types
Most applications will require only the Standard Data Type. However, some
applications benefit from or require Generalized Ellipsometry, Mueller Matrix, or
Reflection Intensity. Data Acquisition for each Data Type is briefly discussed
here.
Figure 5-16. Data Types.
To view Acquisition Parameters, select “Create/Edit Recipe” (shown in Figure
5-7), then “Edit/Create” next to Acq. Parms in the
Recipe
panel to open the
Acquisition Parameters Setup window.
Standard
The Standard Data Type is used for most applications. This data type acquires
Ellipsometric Psi and Delta data, as well as reflectance and depolarization data.
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