J.A. Woollam M-2000, Hardware Manual, Page: 153 / 178

M-2000® Hardware Manual ©2023 J.A. Woollam Co. 153
11 Performance
Checks
Use the procedures in this chapter to verify that the instrument is operating
properly and determine potential problems, if any. The sections below outline
verifications/tests in order of increasing complexity. If the first test (Calibration
Wafer & Straight-Through Measurement) passes, it is unlikely that any further
testing is needed. Similarly, if the second test (System Check) passes, it is
unlikely that additional checks are needed.
11.1 Calibration Wafer &
Straight-Through
Measurement
The quickest way to verify ellipsometer operation is to measure the calibration
wafer and take a straight-through measurement of air. A thermal oxide (SiO2 on
Si) calibration wafer is included with every instrument.
To measure the calibration wafer:
1. Follow the Sample Alignment Procedure as described earlier in this
manual.
2. Acquire “Standard” Ellipsometry data at a few angles (i.e. 65˚, 70˚, and
75˚).
3. Use the built-in analysis model for Thermal Oxide on Silicon to analyze
the data (see CompleteEASE Data Analysis Manual for details).
4. Confirm that a good fit to the data is achieved.
To measure straight-through (air):
1. Select “Measure in Transmission Mode” in the Acquisition Parameters
Setup box. A high accuracy, 5 second measurement is recommended.