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XTC/3 Operating Manual
Table 3-2 Output states
Output
Active
Inactive
Source Shut 1
In any deposit state
When leaving control states
Source Shut 2
1
Sensor Shut 1
In shutter delay or any deposit
state.
In RateWatcher Sample
Closes when leaving control states.
In RateWatcher Hold
1
Sensor Shut 2
Note 1: In XTC/3S, Sensor Shut 1 and Sensor Shut 2 outputs are used to perform the crystal
switch function if a multi-position sensor has been selected.
Stop
Enter Stop
Exit Stop
End of Process
When entering Idle if this is last
film in the process
When Start or Reset is done
Thick Setpoint
In Deposit or Time Power state,
and thickness setpoint is reached
When Start or Reset is done
When Idle is entered
Xtal Fail
When active crystal fails
When active crystal becomes valid.
Digital Set Crystal Fail Inhibit
Alarms
On Rate Deviation error
On Shutter Delay error
When Max power reached
On Crucible Switch error
As each error is cleared and no other
error is set.
When Start or Reset is done
When Idle ramp is entered
Source in use
When Source 2 is active
When Source 1 is active
Final Thick
Final thickness is reached
When Start or Reset done
End of Film (M only)
Initiate Idle state
When Start or Reset done
In Layer (M only)
When layer is started
Enter Idle or Stop
Ion Assist Dep
(M only)
Enter any deposit state and Ion
Assist Deposit is enabled
Enter Idle ramp
Enter Stop
Xtal Switch 1
(M only)
See crystal switching
See crystal switching
Xtal Switch 2
(M only)
See crystal switching
See crystal switching