Inficon VSC150 Operating Manual Download Page 1

O

P

E

R

A

T

I

N

G

 

M

A

N

U

A

L

incl. Declaration of Conformity

Vacuum Switch

VSC150

Part Number
399-005

Vacuum Switch

VSC150

Part Number
399-005

tina42e1

O

P

E

R

A

T

I

N

G

 

M

A

N

U

A

L

incl. Declaration of Conformity

tina42e1

Summary of Contents for VSC150

Page 1: ...T I N G M A N U A L incl Declaration of Conformity Vacuum Switch VSC150 Part Number 399 005 Vacuum Switch VSC150 Part Number 399 005 tina42e1 O P E R A T I N G M A N U A L incl Declaration of Conformity tina42e1 ...

Page 2: ...gn and the technical data is reserved The illustrations are not binding 2 2 tina42e1 2005 03 VSC150 ga tina42e1 2005 03 VSC150 ga General Note The right of alterations in the design and the technical data is reserved The illustrations are not binding ...

Page 3: ...isposal 21 EEC Declaration of Conformity 22 Declaration of Contamina 23 3 3 tina42e1 2005 03 VSC150 ga tina42e1 2005 03 VSC150 ga Contents Page 1 Description 4 1 1 General 4 1 1 1 Purpose 4 1 2 Technical Data 5 1 2 1 VSC150 Vacuum Switch 5 1 2 2 SV Switching Amplifier 6 1 3 Technical Description 6 1 3 1 Design 6 1 3 2 Vacuum Switch Mode of Operation 6 1 3 3 Switching Amplifier Mode of Operation 7 ...

Page 4: ...uce pressure depen dent signals and for the control of valves and pumps 4 4 tina42e1 2005 03 VSC150 ga tina42e1 2005 03 VSC150 ga 1 Description 1 1 General These Operating Instructions contain impor tant information on the functions installation operation and maintenance of the Vacuum Switch and the switching amplifier Important remarks concerning operational safety and protection are emphasized a...

Page 5: ...ssure switch adjustment Part Number 399 006 1 Including connection port 5 5 tina42e1 2005 03 VSC150 ga tina42e1 2005 03 VSC150 ga The Vacuum Switch VSC150 can also be used as a dif ferential pressure switch Note the Technical Data given in section 1 2 1 2 Technical Data 1 2 1 VSC150 Vacuum Switch Switching range 0 5 to 2000 mbar Overload limit 3000 mbar Response sensitivity 0 1 mbar Switching hyst...

Page 6: ...d energizes a heavy duty relay in the connected SV switching ampli fier 6 6 tina42e1 2005 03 VSC150 ga tina42e1 2005 03 VSC150 ga 1 2 2 SV Switching Amplifier Mains supply 110 to 130 VAC 220 to 240 VAC Mains frequency 50 60 Hz Power consumption 3 VA Output relay Switching voltage max 250 V Switching current max 5 A Switching capacity max 500 VA Response time 30 ms Release time 7 ms Control circuit...

Page 7: ...rgized when the pressure drops below the value preset on the Vacuum Switch i e if the contact between diaphragm and contact pin in the refe rence chamber opens by flexing of the diaphragm The built in slide switch Fig 5 must be set to the connected type of Vacuum Switch 9 R M 10 9 R M 8 7 6 5 4 3 2 1 Fig 1 Schematic diagram of the Vacuum Switches Key to Fig 1 1 Adjusting Screw 2 Sensing chamber M ...

Page 8: ...ping ring for ultra high vacuum disk DN 16 KF For floating installation 8 8 tina42e1 2005 03 VSC150 ga tina42e1 2005 03 VSC150 ga 1 4 Equipment 1 4 1 Scope of Delivery Part Number Vacuum Switch VSC150 399 005 or Switching amplifier SV 399 008 Operating Instructions tina42d1 tina42e1 1 4 2 Accessories Clamping ring DN 16 KF made of plastic Centering ring DN 16 KF made of PTFE with FPM O ring For pr...

Page 9: ...y This ensures that condensate can escape Flange and gaskets must be free of dust and grease If the Vacuum Switch is to be floated electrically it has to be separated from the vacuum system by an insulating piece Equipment see Section 1 4 2 50 1 105 85 21 18 2 DN 16 KF 19 119 Fig 2 Dimensional drawing without differential pressure adapter Key to Fig 2 1 Name plate 2 Label giving the switching thre...

Page 10: ...0 ga tina42e1 2005 03 VSC150 ga 2 2 Electrical connection Warning The terminals of the Vacuum Switch must not be connected under any circumstances to the mains voltage DANGER TO LIFE The housing potential may not exceed the levels of protective low voltages referred to ground 21 5 80 4 2 15 109 121 55 5 Pg 9 Pg 9 21 50 5 163 Fig 3 SV Switching amplifier dimensional drawing 21 5 80 4 2 15 109 121 5...

Page 11: ...ch is connected as follows Unscrew fastening screw completely 4 3 lift off connecting box and gasket 4 2 from the Vacuum Switch Detach insert 4 4 applying a screwdriver at 4 5 Note Socket contact 3 4 4 and protective ground conductor are not connected See Fig 5 for connection cables Connect socket contact 1 4 4 to terminal A on the swit ching amplifier see fig 5 Connect socket contact 2 4 4 to ter...

Page 12: ...set to the connec ted type of pressure switch For electrical installation the switching amplifier SV 110 is delivered set for 220 240 VAC For mains voltages of 110 130 VAC change terminal bridge connectors as shown in Fig 5 When connecting to the mains the VDE 0100 re gulations must be observed The connection of the external consumer which is to be switched is shown in Fig 5 2 1 VSC150 220 240 VAC...

Page 13: ...cuum gauge or pressure gauge is required for switch point setting 2 3 1 VSC150 Vacuum Switch With adjustable switching pressure in the range from 0 5 to 2000 mbar The adjusting valve 1 4 resp 6 4 is freely accessible and the user may set the switching pressure to any value within the whole range Note To avoid switching errors pressure settings below 20 mbar should only be made under clean conditio...

Page 14: ...t 5 to 6 hours at approx 120 C while pump down continues uninterrupted 14 14 tina42e1 2005 03 VSC150 ga tina42e1 2005 03 VSC150 ga 2 3 1 1 Setting Switching Pressures Higher than 20 mbar Condition Correct basic adjustment of the Vacuum Switch Basic adjustment of the switch in the factory provided that at equal pressure in sensing and reference chamber the contact is just closed The diaphragm 1 3 t...

Page 15: ...Connection of sensing chamber M 1 10 Connection of reference chamber R 15 15 tina42e1 2005 03 VSC150 ga tina42e1 2005 03 VSC150 ga Then admit dry protective gas to the Vacuum Switch up to a pressure of 20 mbar check basic adjustment of the Vacuum Switch as described in 2 3 1 1 Close adjusting valve turning clockwise with the dyna mometric key Note The amount of torque for the adjustment valve is M...

Page 16: ...erclockwise the contact opens When turned clockwise the contact closes 16 16 tina42e1 2005 03 VSC150 ga tina42e1 2005 03 VSC150 ga Caution Only the sensing chamber can be ope ned for cleaning The reference cham ber can not be opened and must there fore be protected from contaminaton 2 4 2 Switching Logic With correct basic adjustment of the switch see section 2 3 1 1 the following switching logic ...

Page 17: ...uum System it must be Prevented that in Case of Failure Gas Flows into the Vacuum Chamber Assembly as shown in the diagram Fig 7 Also in this case as in 2 5 1 the contact setting of the Vacuum Switch should correspond to the basic adjust ment Control the electrically operated valve normally closed via the break contact terminals 12 and 13 see Fig 5 of the SV switching amplifier In case of power fa...

Page 18: ... Venting of a Vacuum Chamber to a Slight Overpressure Assembly as in Fig 9 Loop the control circuit of the venting valve via the break contact of the switching amplifier relay terminals 12 and 13 see Fig 5 The switching pressure can be raised by 20 mbar max above atmospheric pressure by turning the adjusting screw 6 2 clockwise 2 5 5 Differential Pressure Monitoring Positive and Negative Going In ...

Page 19: ... petroleum ether benzin or alcohol and dry Replace gasket if necessary 19 19 tina42e1 2005 03 VSC150 ga tina42e1 2005 03 VSC150 ga contact terminals 12 and 13 of the two SV switching amplifiers As soon as during pump down or venting the differential pressure between annealing pot and vacuum furnace in either direction exceeds 10 mbar the respective pump valve or venting valve is closed The valves ...

Page 20: ...ra tion of contamination are returned to the sender at his own expense 20 20 tina42e1 2005 03 VSC150 ga tina42e1 2005 03 VSC150 ga Note Reassemble the setting machanism in the order com pression spring ball and adjusting screw When screwing in the adjusting screw grease the O ring slightly with Lithelen Reassemble Vacuum Switch Set adjusting screw 6 2 as described in section 2 3 3 2 Cleaning the r...

Page 21: ...components must be separated according to their materials and recycled 21 21 tina42e1 2005 03 VSC150 ga tina42e1 2005 03 VSC150 ga 4 Disposal Warning Contaminated parts Contaminated parts can be detrimental to health and environment Before beginning to work find out whether any parts are contaminated Adhere to the relevant regulations and take the necessary precautions when handling contami nated ...

Page 22: ...rketing Manager Balzers 18 March 2005 Dr Georg Sele Technical Support Manager Quality Representative 22 tina42e1 2005 03 VSC150 ga EEC Declaration of Conformity We INFICON hereby declare that the equipment men tioned below complies with the provisions of the Direc tive relating to electrical equipment designed for use wit hin certain voltage limits 73 23 EEC and the Directive relating to electroma...

Page 23: ...rd no q yes q 2 explosive no q yes q 2 radioactive no q yes q 2 other harmful substances no q 1 yes q Declaration of Contamination Declaration of Contamination The service repair and or disposal of vacuum equipment and components will only be carried out if a correctly completed declaration has been submitted Non completion will result in delay This declaration may only be completed in block lette...

Page 24: ...t notice Visit our website for contact information and other sales offices worldwide www inficon com INFICON Ltd LI 9496 Balzers Principality of Liechtenstein Tel 423 388 3111 Fax 423 388 3700 E mail reachus inficon com UNITED STATES FRANCE GERMANY LIECHTENSTEIN UNITED KINGDOM CHINA JAPAN KOREA SINGAPORE TAIWAN Due to INFICON s continuing program of product improvements specifications are subject ...

Reviews: