Inficon ULTRATEST UL3000 Fab, Translation Of The Original Operating Instructions, Page: 31 / 140

INFICON Description | 4
UL3000-Fab-Operating-instructions-iina73en1-08-(1910) 31 / 140
UL3000 Fab, UL3000 Fab PLUS
Minimum detectable leak rate sniffer
mode
< 5 x 10
-8
mbar l/s
Gas flow through sniffer line SL200 25 sccm
Gas flow through sniffer line SL3000 160 sccm
Measurement range 12 decades
Sound pressure level in Standby < 61 dB (A) *)
Run-up time < 3 min
Ion source 2 long-life iridium cathodes, Yttrium oxide
coated
*) The A-weighted emission sound pressure level at the operator's premises is less
than 61 dB (A) at all times for all foreseeable uses of the device. The noise emission
measurement declaration was drawn up in accordance with the harmonized standard
DIN EN ISO 3744:2011.
Ambient conditions
UL3000 Fab, UL3000 Fab PLUS
Max. altitude above sea level 2000 m
Maximum relative humidity 80% at 30°C, linear decreasing to 50% at
40°C
Storage temperature 0°C to +50°C
Operating temperature +10°C to +40°C
Pollution degree 2
4.5 Factory settings
Leak rate setpoint 1 1 x10
-9
mbar l/s
Leak rate setpoint 2 1 x10
-8
mbar l/s
Leak rate setpoint 3 1 x10
-7
mbar l/s
Leak rate setpoint 4 1 x10
-6
mbar l/s
Automatic purge On
Volume 2
ZERO mode I•ZERO 2.0
Calibration request Off
TMP ventilation On (can only be changed by service)
Interfaces leak rate unit vacuum operation mbar l/s
Interfaces leak rate unit sniffer operation mbar l/s
Interface pressure unit mbar