Inficon Transpector XPR 3+, Operating Manual, Page: 122 / 130

12 - 2
Transpector XPR 3+ Operating Manual
12.6 Sensitivity
12.7 Minimum Detectable Partial Pressure
12.8 Maximum Operating Pressure
12.9 Maximum Sensor Operating Temperature
Amps/Torr [mbar] (Pa)
Transpector XPR 3+ Transpector XPR 3+ Low Pressure EM
FC 4x10
-7
[3x10
-7
]
(3x10
-5
)
4x10
-7
[3x10
-7
]
(3x10
-5
)
Torr [mbar] (Pa)
Transpector XPR 3+ Transpector XPR 3+ Low Pressure EM
FC 1x10
-9
[1.3x10
-9
]
(1.3x10
-7
)
1x10
-9
[1.3x10
-9
]
(1.3x10
-7
)
EM 6x10
-12
[8x10
-12
]
(8x10
-10
)
6x10
-12
[8x10
-12
]
(8x10
-10
)
Torr [mbar] (Pa)
Transpector XPR 3+ Transpector XPR 3+ Low Pressure EM
FC only 20 mTorr
[2.6x10
-2
]
(2.6)
20 mTorr
[2.6x10
-2
]
(2.6)
FC/EM 20 mTorr
[2.6x10
-2
]
(2.6)
1x10
-4
Torr
[1.3x10
-4
]
(1.3x10
-2
)
Degrees C
Transpector XPR 3+ Transpector XPR 3+ Low Pressure EM
FC/EM 150°C 150°C