Inficon IMM-200, Operating Manual

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INFICON Introduction and Specifications | 4
074-733-P1A IMM-200 Operating Manual 9 / 67
4 Introduction and Specifications
Designed for use in vapor deposition processes, IMM-200 is a deposition monitor
used to determine the in situ deposition rate and thickness of a thin film. Rate and
thickness are inferred from the frequency change induced by mass added to an
exposed oscillating quartz crystal. This quartz crystal is housed in a sensor body
positioned between, or to the side of, the source of vaporized material and the target
substrate.
User interaction is accomplished via remote communication and consists of the
selection or entry of parameters to define the material and instrument characteristics.
A complete QCM system consists of an electronics unit, also called IMM-200, a power
supply, a sensor head containing a quartz crystal and software to communicate to
IMM-200. This IMM-200 Operating Manual provides user information for installing,
programming and operating IMM-200. When reading the Operating Manual, please
pay particular attention to the Notes, Cautions, and Warnings found throughout the
text. The Notes, Cautions, and Warnings are defined in Definition of Notes, Cautions,
Warnings, and Dangers [ } 12]. You are invited to comment on the usefulness and
accuracy of this manual by visiting our website at www.inficon.com.
4.1 Specifications
Measurement
Sensor inputs One
Measurement frequency range 6.0 MHz (new crystal) to 4.5 MHz
Reference frequency stability ±2 ppm 0–60°C
Frequency resolution 0.0035 Hz per 100 ms
Rate and thickness resolution 0.0042 Å (new crystal); 0.0076 Å (crystal
@ 4.5 MHz) over 100 ms sample for an
AT cut crystal, material density = 1.0, Z-
Ratio = 1.0
Measurement interval 100 ms
Measurement technique ModeLock