3 - 14
IP
N 07
4-
50
5-
P1
E
IC6 Operating Manual
Act(ivity)
Activity is a measure of the sensor circuit health or ability to conduct current.
The values range from a maximum of 800 (healthiest) to a minimum of 0 (least
healthy).
The Activity value is useful for predicting when a crystal needs to be replaced.
If a crystal is about to fail, its series resistance will increase, allowing less
current to flow through the crystal and hence the Activity value will decrease.
The closer the Activity value is to zero the more imminent a crystal failure.
Activity also can be used to gauge the health of the sensor head electrical
contacts. For example, if a new monitor crystal is placed into the sensor head
and has a crystal life of near 0%, but the Activity value for this crystal is lower
than 550, this indicates the sensor head or in-vacuum cable is in need of repair.
Frequency
This field is subdivided into two categories:
Fundamental
and
Anharmonic
.The Fundamental frequency will be shown for all working
sensors. If Auto-Z is in effect for the sensor, the Anharmonic frequency will also
be shown. Frequency value will be displayed.
3.3.3.4.1 TEST XIU
To test any XIU (Crystal Interface Unit), move the cursor onto the respective
Sensor number. Pressing F1 then initiates the XIU self test. The XIU self test
determines whether the XIU and measurement card pair is operating properly.
"XIU Test Passed" message will appear to indicate this. "XIU Test Failed"
message will appear when there is a defect in the XIU itself, the XIU interface
cable or the measurement card.
For the XIU self test to work properly, the XIU must have the six inch BNC cable
(IPN 755-257-G6) attached and must be disconnected from the sensor
feedthrough.
3.3.4 Sensor Screen
From the main MENU display, placing the cursor on Sensor and pressing MENU
brings up the Sensor display.
The Sensor Overview display, see
, shows the current configuration for
all eight sensors.
Summary of Contents for IC6
Page 1: ...O P E R A T I N G M A N U A L IC6 Thin Film Deposition Controller IPN 074 505 P1E Cover Page ...
Page 2: ......
Page 8: ......
Page 20: ...TOC 12 IPN 074 505 P1E IC6 Operating Manual This page is intentionally blank ...
Page 42: ...1 22 IPN 074 505 P1E IC6 Operating Manual This page is intentionally blank ...
Page 134: ...6 6 IPN 074 505 P1E IC6 Operating Manual This page is intentionally blank ...
Page 148: ...8 4 IPN 074 505 P1E IC6 Operating Manual This page is intentionally blank ...
Page 170: ...9 22 IPN 074 505 P1E IC6 Operating Manual This page is intentionally blank ...
Page 268: ...13 2 IPN 074 505 P1E IC6 Operating Manual This page is intentionally blank ...
Page 312: ...15 40 IPN 074 505 P1E IC6 Operating Manual This page is intentionally blank ...
Page 338: ...A 10 IPN 074 505 P1E IC6 Operating Manual This page is intentionally blank ...
Page 342: ...1 4 IPN 074 505 P1E IC6 Operating Manual This page is intentionally blank ...