Inficon IC6, Operating Manual

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IC6 Operating Manual
If two Layers to be co-deposited have Cross Talk percentages greater than 100%,
the Process will STOP and the error message Cross Talk > 100% will be displayed.
For the above example the calculated Cross Talk percentages are both below
100% and the two co-deposited Layers can be STARTed. If a sensor were to fail
during deposition, the IC6 will calculate new Cross Talk percentages for the "new"
sensor configuration. For example, if Sensor 4 fails, the new Cross Talk percentage
is modified for Material A as per the following:
[8]
For Material A the new Cross Talk value will be 22.4% which is acceptable,
however, Material B's new Cross Talk percentage will now be 111.1%. If this occurs
the Process will STOP and the error message Cross Talk > 100% will be displayed.
This error condition must be rectified before the Process can continue.
12.6.1 Procedure Set-Up
The Cross Talk Calibration feature will automatically calculate the Cal Thickness
values that appear on the Material Sensor page. These values in turn are used in
co-deposition to determine rates adjusted for the interference of one source with
the other. Calibration is done for each Material to be used in a Co-deposition. Note
that EVERY sensor used on BOTH Materials of a co-deposition MUST be
calibrated for EACH Material calibrated. Each material to be co-deposited is
calibrated separately. If a material is used in more than one co-deposition
application, for example, materials A and B co-deposited then materials A and C
co-deposited, Material A needs to be calibrated only once. This is especially
important if using Dual Sensor Heads.
12.6.1.1 Cross Talk Calibration Procedural Notes
1
The Calibration thickness values do not include any adjustment for Sensor
Tooling (set in the Material Sensor page) This is because the cross sensitivity
adjustments are done prior to the sensor tooling being factored into the sensor
rate calculation. The Aggregate Rate, used to control the deposition source,
DOES include the Sensor Tooling factors.
2
During Cross Talk Calibration CALIBRATE, if a Crystal Fail occurs the
calibration is aborted and the power ramp is entered. The user can still enter
the calibration thickness values of the partially completed calibration if desired,
or replace the failed crystal and recalibrate.
3
If the MAX POWER option for the Material is set to STOP PROC(ESS),
SUSPEND MAT(ERIAL) or POST-DEP(OSIT) and MAX POWER is reached,
the calibration will be aborted and the Source Power zeroed. No option of
CAL Thick Sens 5 CALThick Sens 6 +
2
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CALThick Sens 1 CALThick Sens 2 CALThick Sens 3 + +
3
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