Inficon IC6, Operating Manual

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IC6 Operating Manual
CRUC(IBLE). . . . . . . . . . . . . . . . . . . 1 to 64
The Crucible parameter is used in conjunction with the Number of Crucibles
selected in Source Set-Up. The value entered sets the state of the Crucible
relays. Values range from 1 to the number of Crucibles chosen, up to a
maximum of 64. This parameter is set to 1 if the Crucible function is not chosen
in configuring the Sources. The default value is 1.
CODEP(OSITION) . . . . . . . . . . . . . . Yes (1), No (0)
Values in brackets are for use with the remote communication commands. This
feature allows two Layers to be run concurrently with the pertinent sources
controlled independently. The Layers to be co-deposited must be sequential in
the Process. This parameter cannot be changed while running a Process. To
specify co-deposition, use the TOGL key to enter Yes in the co-deposition
parameter for the first layer. The default value is No.
When the first Layer reaches Final Thickness prior to the second Layer, the
second layer will terminate. When the second layer reaches Final Thickness
prior to the first Layer, the first Layer will continue in DEPOSIT until reaching its
own Final Thickness.
RATIO C(O)NTR(O)L . . . . . . . . . . . . 0.0 to 999.9%
This parameter is used with the co-deposition feature. It establishes a
Master/Slave relationship between the two sources being co-deposited. The
first layer is always the Master, with the second layer’s rate being controlled at
the specified ratio of the master’s setpoint rate. Default value is 0%.
The following two items are relevant only for co-deposited layers and indicate
sensor status.
CAL(IBRATION) STAT(US)
Identifies whether CAL thickness values are UNCALibrated, were entered
manually on the Sensor page of the Material screen by the user or were
AUTOmatically calculated using the automatic calibration feature on the Cross
Talk page of the Maintenance screen.
CROSS TALK
Displays computed cross talk values based on cal thickness values for each
sensor used in each material in a codeposition process. Cross talk values for
both materials must be less than 100% to be able to START the process.
6.5 Special Layer Parameter Features
6.5.1 Skip Deposit
If the Final Thickness is set to 0.000 kÅ, the IC6 will skip the DEPOSIT State. State
processing will go directly to the post-Deposit parameter state from the last
pre-Deposit state.