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74
Troubleshooting
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Pressure-related symptoms (overview)
The following symptoms are all related to high vacuum pressure. Each symptom is
discussed in more detail in the following pages.
The mass flow controller is calibrated for methane, and the high vacuum gauge
controller is calibrated for helium, so these measurements are not accurate in
absolute terms, They are intended as a guide to typical observed readings. They
were taken with the following set of conditions:
Source temperature
250°C
Quad temperature
106°C
Interface temperature
320°C
Helium carrier gas flow
1ml/min.
MFC (%)
Pressure (Torr)
Methane
Isobutane
Ammonia
10
5.6
×
10
-5
6.5
×
10
-5
4.7
×
10
-5
15
7.7
×
10
-5
9.2
×
10
-5
6.7
×
10
-5
20
9.8
×
10
-5
1.2
×
10
-4
8.5
×
10
-5
25
1.2
×
10
-4
1.4
×
10
-4
1.0
×
10
-4
30
1.4
×
10
-4
1.8
×
10
-4
1.2
×
10
-4
35
1.6
×
10
-4
2.0
×
10
-4
1.4
×
10
-4
40
1.8
×
10
-4
2.3
×
10
-4
1.6
×
10
-4
45
2.0
×
10
-4
2.6
×
10
-4
1.9
×
10
-4
50
2.2
×
10
-4
3.0
×
10
-4
2.1
×
10
-4
60
2.7
×
10
-4
3.5
×
10
-4
2.5
×
10
-4
Summary of Contents for 5973 MSD
Page 1: ...H Hardware Manual HP 5973 MSD PCI NCI ...
Page 6: ...6 ...
Page 7: ...1 General Information Specifications 9 Reagent gases and regulators 10 ...
Page 13: ... Hardware Reference 13 ...
Page 25: ... Chemical Ionization Theory 3RVLWLYH WKHRU 25 ...
Page 31: ... Chemical Ionization Theory 1HJDWLYH WKHRU 31 ...
Page 34: ...34 ...
Page 92: ...92 ...
Page 114: ...114 ...
Page 120: ...120 ...
Page 122: ...H Manual Part Number G1999 90001 Copyright 1998 Hewlett Packard Printed in USA 2 98 ...