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Title & Document Type:

5501A Laser Transducer System OP/SRV

Manual Part Number:

05501-90021

Serial Prefixes:

1948A

Revision Date:

January 1980

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This manual may contain references to HP or Hewlett-Packard. Please note that
Hewlett-Packard's former test and measurement, semiconductor products and
chemical analysis businesses are now part of Agilent Technologies.

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or greater.

About this Manual

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OCR’d with Adobe Acrobat. OCR errors may exist and as such the user of this
document should take care and use common sense when referencing this
documentation.

Copyright Notice

This documentation is © Copyright 1980 Hewlett Packard and © Copyright 2006,
Jack Hudler, [email protected].

Permission to use and redistribute this documentation for non-commercial and
internal corporate purposes is hereby granted, free of charge.
Any redistribution of this documentation or its derivates must include this
copyright notice.

You

may not

sell this documentation or its derivations without written consent.

You may modify this documentation as necessary, but you may not sell
derivative works based on it.
You may include this documentation with the equipment/hardware on which it is
used for the purposes of selling the equipment/hardware. If you advertise that a
copy of this documentation is included in the sale, you must state that is for
“Free”.

Meaning if you want to gratuitously toss in a copy of the manual on an eBay sale,
it’s ok with me as long as you state it’s for free. No you can’t sell a digital archive
of manuals and say it includes a free copy of this documentation. You must give
it away with equipment.
I think you get the spirit of the copyright; it takes a lot of hours to scan and
replicate a manual. I just want this used in the spirit in which is it given.
Agilent if you have questions or wish to include this in your archive, please email
me.

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Summary of Contents for 5501A

Page 1: ...tation for non commercial and internal corporate purposes is hereby granted free of charge Any redistribution of this documentation or its derivates must include this copyright notice You may not sell this documentation or its derivations without written consent You may modify this documentation as necessary but you may not sell derivative works based on it You may include this documentation with ...

Page 2: ...Laser Trans licer Syste i i ...

Page 3: ...vice will be performed at Buyer s facility only upon HP s prior agreement and Buyer shall pay HPJsround trip travel expenses In all other cases products must be returned to a service facility designated by HP For products returned to HP for warranty service Buyer shall prepay shipping charges to HP and HP shall pay shipping charges to return the product to Buyer However Buyer shall pay all shippin...

Page 4: ...M SERIAL PREFIXES This manual applies t o 5501A Laser Transducer Systems with serial prefix 1948A For serial prefixes above 1948A a change sheet is included with the manual For serial prefixes below 1948A refer to Appendix E Backdating Copyright HEWLETT PACKARD COMPANY 1976 5301 STEVENS CREEK BLVD SANTA CLARA CALIF 95050 Printed JAN1980 ...

Page 5: ... 6 2 7 General Considerations for Mounting Optics 2 6 2 8 5501A Laser Transducer 2 6 2 9 Splitting and Bending Optics Figure 2 9 2 10 2 10 Measurement Optics 2 11 2 19 Typical Mounting of Optics 2 21 2 20 10780A Receiver 2 24 2 21 Accuracy Considerations 2 24 2 22 Velocity of Light Compensation 2 25 2 23 Deadpath Error Compensation 2 25 2 24 Material Temperature Compensation 2 27 2 28 Cosine Error...

Page 6: ...t 010 Automatic Compensator and 10563A Material Temperature Sensor 3 31 3 25 10783A Numeric Display 3 31 3 26 5501A Power Supply Options 3 32 PROGRAMMING AND OPERATION 4 1 4 1 Introduction 4 1 4 2 Programming Objectives and Methods 4 2 4 3 General System Operating Description 4 3 4 4 Sample Outline for a Three Axis Counter Based System 4 3 4 5 General Coupler Interface Description 4 4 4 8 Calculat...

Page 7: ...ounter Based System Checkout 5 30 Comparator Based Systems 5 31 English Metric Pulse Output Systems Checkout 5 31 10781A Pulse Converter ElectronicsCheckout 5 33 Preventive Maintenance 5 34 Cleaning of Optical Components 5 34 TROUBLESHOOTING 6 1 Introduction 6 1 6 2 Troubleshooting Assumptions 6 2 6 3 General Troubleshooting lnformation 6 2 6 4 Laser Head Troubleshooting 6 3 6 5 Receiver Troublesh...

Page 8: ...ctronics System Specification 3 4 Typical Counter Based Computer Interface System Specifications 3 6 Typical Comparator Based Computer Interface System Specifications 3 8 Typical Specifications for English Metric Pulse Output System 3 12 Power Supplies Available for 5501A Laser Transducer System 3 32 10740A Coupler Bus Lines 4 5 10745A HP IB Interface lnstruqtions 4 8 70746A Binary I O Interface I...

Page 9: ...1 Figure Title Page LlST OF FIGURES Page HP 5501A Laser Transducer System 1 2 Manuals Supplied with Laser Transducer System 1 7 Typical Laser Transducer System Block Diagram 1 9 Basic Measurement System 2 3 Basic Interferometer Measurements 2 3 Allowable Component Motions 2 4 Multiaxis Measurement System 2 5 The Six Degrees of Freedom 2 6 5501A Laser Transducer Mounting 2 7 Beam Polarization 2 8 5...

Page 10: ...ment Axis to Minimize Abbe Error 2 41 2 44 X Y Stage Measurement with 10706A Plane Mirror lnterferometer 2 42 2 45 X Y Stage Geometric Errors 2 42 2 46 Installation of Optics for Minimum Deadpath 2 43 2 47 Protective Covers for Optics and Laser Beam 2 45 2 48 Collapsible Spiral Cover for Movable Retroreflector 2 46 2 49 Optimum Alignment 2 47 2 50 Effect of Optics Measurement 2 48 2 51 Effects of ...

Page 11: ...apping on Power Supplies 5 6 Installation of Hooded Connectors and Circuit Cards 5 10 Typical Calculator Interface Electronics Interconnecting Diagram 5 11 Counter Based System Interconnecting Diagram 5 14 Comparator Based System Interconnecting Diagram 5 16 Typical English Metric Pulse Output Electronics lnterconnecting Diagram 5 19 Control Connector Signal Timing Diagram 5 24 10781A Pulse Conver...

Page 12: ...Cable Wiring Diagram E 18 10746A Binary Interface Hood Connector Wiring E 19 10760A Counter Hood Connector Wiring E 20 10762A Comparator lnterface Hood Connector Wiring E 22 10764A Fast Pulse Converter Hood Connector Wiring E 23 10764B Fast Pulse Converter Hood Connector Wiring E 24 10783A Numeric Display Power Cable Wiring E 26 Power Supply Line Cord E 26 Control and Output Cable Wiring E 27 1078...

Page 13: ...ectronic Measuring Apparatus LASER RADIATION I DO NOT STARE INTO BEAM e d I MAXIMUM OUTPUT 1 m r 1l i PULSE SPEC continuous wave LASER MEDIUM helium neon CLASS 11 LASER PROOUCT BEAM CAN BE SHUT OFF BY CLOSING BLACK APERTURE ALIGNMENT APERTURE FOR REDUCED BEAM CAUTIONw Laser radlatlon when open and Interlock failed or defeated DO NOT STARE INTO BEAM ...

Page 14: ... ACCIDENTAL A C C E S S TO VOLTAGES F O R SAF lY T H E R E ARE NO HIGH VOLTAGES ON T H E INTERCONNECTING C A B L E a CAUTION Any adjustment maintenance and repair of an opened instrument under voltage should be avoided as muchas possibleand when in evitable should be carriedout only by a skilledpersonwho is aware of the hazard involved Capacitors inside the instruments may still be charged even if...

Page 15: ...ed for each unit that make up your individual system The manual is organized to allow each reader to determine exactly what information is re quired and proceed directly to that point For example if the system is already installed and operating and you wish to modify the existing control program Section IV PROGRAMMING contains the required information However if you have just received a system and...

Page 16: ...5 OUTPUT 2 MEASUREMENT OPTICS I Figure 7 7 HP 5507A Laser Transducer System ...

Page 17: ...ation information Also discussed are the allowable measurement configurations for the optical components including interferometers beam benders and beam splitters Accuracy considerations Deals with factors affecting the ultimate measuring accu racy of the Laser Transducer System Centers on the effect of the environment under which the measurement is made along with techniques for compensating for ...

Page 18: ...ement is similar for all type sys tems and therefore each example can be studied to increase your overall system knowledge The information is presented a s follows a A general discussion of the aims and methods of programming the Laser Transducer System b A table of individual commands for each unit of the system that is programmable c Commented programs and examples of measurements and data movem...

Page 19: ...r system fails in order to return it to proper oper ation in the shortest possible time The troubleshooting information is presented in the fol lowing manner a A general discussion of how to troubleshoot and repair the Laser Transducer System b Troubleshooting tips for rapid fault isolation This will tell you how to quickly locate a problem after your system has been operating A detailed troublesh...

Page 20: ... the system the information contained in these manuals is a prerequisiteto learning how to program your system correctly In this manual Section IV PROGRAMMING provides the additional information necessary to program the Laser Transducer System However the programming information in this manual presupposes that you are familiar with the programming information contained in the calculator and HP IB ...

Page 21: ...783A ENGLlStilMETRlC WLSE OUTPUT OPERATING AND SERVICE MANUAL I I 10756ACOMPENSATION 101048 FAST PULSE CONVERTER OPERATING AND SERVICEMANUAL I I 10756A COMPENSATION INTERFACE OPERATING AND SERVICE MANUAL I I INTERFACEOPERATING AND SERVICE MANUAL I COMPENSATOR OPERATING AND SERVICE MANUAL 10760A GENERAL PURPOSE COUNTER INTERFACE OPERATINGAND SERVICE MANUAL I 10756A MANUAL COMPENSATOR OPERATING OR A...

Page 22: ...ons inch peak to peak excursion on all MAXIMUM ALLOWABLE LASER BEAM three orthogonal axes ATTENUATION 13 dB 95 MAXIMUM ALLOWABLE LASER BEAM LATERALOFFSET 5 mm 33 2 inch An interferometer or retroreflector may be offset by a maximum of k2 5 mm S 1 inch since the reflected beam is displaced by twice the retroreflector displacement 4 I withsiand the following extreme conditions Vibration 10 to 55 Hz ...

Page 23: ...quarter wavelength of motion up or down by Af dependingon direction of motion Figure 7 3 Typical Laser Transducer System Block Diagram 1 11 TYPlUL APPLlCATlONS AND MEASUREMENTS DOWN Any machine with an accurate positioning requirement is a candidate for the Laser Trans ducer Those with multiple axes such as numerically controlled machine tools and coordinate measuring machines benefit especially f...

Page 24: ...NG A 5501A LASER TRANSDUCER SYSTEM Use the following information on configuring a 5501A Laser Transducer System to determine and record exactly what equipment is present in your system You can then use that record to determine the specific information in this manual that is directly applicable to your system For an overview of the various possible configurations see Figure 7 7 a LASER All systems ...

Page 25: ...Interferometers Retroreflectors Receivers Splitting and BendingOptics Adjustable Mounts CONSIDERATIONS One per measurement system How many axes of measurement What types of Interferometerswill be used Each Axis requires one Interferometer one Receiver and one Retroreflector If the 10706A Plane Mirror lnterferometer is used no Retroreflector is needed If it is required that the 10702A Linear Inter ...

Page 26: ...ompatibility CONSIDERATIONS How many axes of measurement One 10740A Coupler can be used for up to four axes Each axis requires one 10760A counter Select number of 10760A s equal to number of axes Each system requires only one 10745A Binary Interface and one 10755A compensa tion interface The 10755A is an interface only The compensator must be selected as automatic or manual as shown later EQUIPMEN...

Page 27: ...mparators Utilized to interface either 10756A Manual Com pensator or 5510A Opt 010 Automatic Compen sator One required per measurement system Manual Velocity or Light Compensation Used in conjunction with 10755A Compensation lnterface to provide thumbwheel input of velocity of light compensation data to the lnterface Electronics Automatic Velocity of Light Compensation Used in conjunction with 107...

Page 28: ...s Each axis requires one 10760A counter and one 10763A English Metric output The 10755A is an Interface only The Compensator must be selected as either automatic or manual Each of the output options receives the reference signal from the 5501A LaserTransducer and the measurement signal from the 10780A Receiver for each measurement axis EQUIPMENT 1 10740A Coupler 10760A Counter Selectone to four pe...

Page 29: ...ps Amps Amps Amps Amps Amps Amps Amps Amps Amps Amps Amps CURRENT REQUIREMENTS MODULES T O BE POWERED 5501A Laser Transducer 10780A Receiver 5510A Opt 010 Automatic Compensator 107648 Fast Pulse Converter TOTAL FOR 15 VOLTS 5501A Laser Transducer 5510A Opt 010 Automatic Compensator TOTAL FOR 15 VOLTS 10760A Counter 10746A Binary Interface 10755A Compensation Interface 10756A Manual Compensator 107...

Page 30: ...nvironment the 10756A will allow corrections of Data to standard operating conditions The Automatic Compensator is required if the environment is to change during the measure ment Option 010 is the cable to the 10755A Compensation Interface At least one 10563A Material Temp Sensor must be ordered with the 5510A and 2 or 3 are optional EQUIPMENT 1 10756A Manual Compensator 1 5510A Automatic Compens...

Page 31: ...hese units The information is orga nized as follows An overall discussion of what constitutes a basic measurement system This includes only the optical portion of the Laser Transducer System For information on the sys tem electronics refer to Section Ill Measurement components Detailed descriptions of the individual measurementcom ponents of the Laser Transducer System including dimensions mountin...

Page 32: ...f the system along with the proper considerations of pos sible sources of errors prior to installation of the equipment will greatly minimize problems both during installation and during operation There are a wide variety of possible configurations for the laser and optics but all multiaxis configurations have four basic parts in common a A two frequency laser source 5501A Laser Transducer b A set...

Page 33: ...If the interferometer and retroreflector are fixed in position with respect to each other there is no knowledge of the absolute distance between the components Figure 2 2 SIC nterrerometr c Measurements In the measurement of relative position it does not matter which component moves a s long a s one is fixed with respect to the other If the interferometer is fixed and the retroreflector is the mov...

Page 34: ...0 1 inch Additional lateral movement will normally cause the laser beam to be displaced beyond the point where sufficient light is returned to the receiver Figure 2 3 Allowable Component Motions c Angular motion of the laser head about the Z and Y axes has two effects 1 Introduces a measurement error cosine error which is discussed in the section on Accuracy Considerations 2 Can displace the laser...

Page 35: ... Y measurement signals are compared individually to the reference signal by the electronicsto provide displacement data for measurementor control applications Additional beam splitters can be introduced along with corresponding interferometers retro refectors and receivers to provide up to six measurement axes 2 5 MEASUREMENT COMPONENTS The measurement components comprise that portion of the Laser...

Page 36: ...ween axes 21 potential error sources in all which combine together to define the final position achieved Figure 2 5 The Six Degrees of Freedom Y AXIS OF VERTICAL STRAIGHTNESS X AXIS OF LINEAR DISPLACEMENT J 2 7 General Considerationsfor Mounting Optics When deciding where and how to mount the system s optics keep the following points in mind a Vacuum adhesive with low volatility sealant is used to...

Page 37: ... eadde 01 siJeis leuZl s 11nu paiueMun ue pue saseanap JaA aDaJ ayi u 1eu8 s paqsap ayi suo i sod wnw ido Jnoj ayi jo auo w o j 8 110 U paleyap s axnos Jasel ayi jl a3uew oj ad JaDnpsueJi ayi Su i3ajje inoyi M 110 s xe weaq ayi inoqe siuawaJsu 0 6 u paieiol aq sAe le ue3 lase1 a y l leiuoz Joy auo pue l e i a aq auo ley1 Aluo p a s a a ale suo iez elod ayl j Jaiiew iou saop 11 L z a nS j sa3ejJns ...

Page 38: ...re than 2 5 mm 0 100 inch will reduce the amount of light reaching the receiver and make the system more sensitive to other sources of attenuation TO RECEIVER C A I LEGEND 111111111111VERTICAL POLARIZATION HORIZONTAL POLAR1ZATlON THIS DISTANCE 13 8 mm OPTICAL PATH TO RECEIVER FROMLASER Figure 2 7 Beam Polarization ...

Page 39: ...y it is good practice to use kinematic mounting principles For example a 10 arcsecond drift error in the pointing stability of the laser head causes a beam displacement of over 0 01 inch at the receiver if the cube corner is at a distance of 100 feet 135 mm 7 1 1 mm 53 028 I 25 4 1 0 T i 111 8 rnm 4 132 1 rnm 6 5 2 58 4 mm 2 3 16 5 mm 105 2 rnm NOTE LEAVE ONE INCH CLEARANCE ON SIDES AND TOP OF UNI...

Page 40: ... direction allowing the remaining two thirds to continue The Model 10701A 50 Beam Splitter deflects half of the laser beam at a right angle and passes the remaining half Combinations of these two accessories allow some flexibility in directing the desired fraction of beam intensity to each axis of a multiaxis configuration For example using first a 33 and then a 50 Beam Splitter one can direct one...

Page 41: ... is measured A diagram of this is shown in Figure 2 37 Note that if this is a multiaxis installation each axis must be mechanically independent of the other In other words if the Y axis moves the X axis must be unaffected so that the X axis retroreflector remains lined up with the X axis laser beam If the linear interferometer must move the 10702A Option 001 must be used For a detailed explanation...

Page 42: ...osine error and maximize signd since the incoming beam is now not parallel to the motion of travel the 10702A Linear lnterferometer must remain stationary See below If the 10702A Linear lnterferometer is moved during the measurement instead of the 10703A Retroreflector the beam in the measurement path will remain parallel but will be displaced This displacement S will occur at the receiver causing...

Page 43: ...nterferometer operates the same a s the standard interferometer functionally but it is advantageous when space for optics and beam paths is at a premium The retroreflector is again a cube corner but it is considerably smaller than the standard cube corner and the interferometer is smaller than the standard interferometer One significant difference is that the receiver in this case is mounted at ri...

Page 44: ...art This makes it very easy to eliminate Abbe offset on a two axis system If the measuring point is defined to be where the two axis beams cross the measurement is essentially independent of yaw of the moving stage Such a design is shown in Figure 2 44 Contrasting this system to a two axis system using standard interferometers we see that if standard interferometers are used the X axis retroreflec...

Page 45: ...ed by the second reflection See Figure 2 23 for plane mirror specifications QUARTER WAVE PLANE REFLECTOR 10706A PLANE MIRROR INTERFEROMETER Figure 2 76 Plane Mirror lnterferometer Laser Beam Path 2 16 1 10722A PLANE MIRROR CONVERTER Figure 2 76a The Plane Mirror Converter with an additional 10703A Retroreflector can be used to convert an HP10702Linear lnterferometer to a10706A PlaneMirror Interfer...

Page 46: ... the yaw adjustment the need for custom fixturing is minimized on most installations A unique feature of these mounts allows the component being adjusted to be rotated about its optical centerline providing simple time saving installations The 10710A Adjustable Mount will accept the 10700A and 10701A Beam Splitters the 10705A Single Beam Interferometer and the 10707A Beam Bender The 10711A Adjusta...

Page 47: ...PECIFICATIONS O F INDIVIDUAL UNITS The specifications for the individual units are contained in the following figures Splitting and Bending Optics 10700A 10701A and 10707A Specifications see Fig ure 2 78 107024 Linear lnterferometer Specifications see Figure 2 79 10703A Retroreflector Specifications see Figure 2 20 10705A Single Beam Interferometer see Figure 2 27 10704A Retroreflector Specificati...

Page 48: ...NSIONS See dimensional drawing BEAM SPACING EARANCE FOR 4 Figure 2 7 9 70702A Linear Interferometer Specitications WEIGHT 45 grams 1 6 ounces 28 4 Am 1 12 DIA Figure 2 20 70703A Retroreflector Specifications 1 31 BOLT CIRCLE ...

Page 49: ...rn W 3 2 UNC 4 PLC SI THRU 19 6 mm CLEARANCE FOR 4 OR 2 5 mm 77TYP Figure 2 27 70705A Single Beam Interferometer Specifications 19 5 mm 0 77 nBOLT CIRCLE WEIGHT 23 grams 0 8 ounces DIMENSIONS See dimensional drawing A Figure 2 22 70704A Retroreflector Specificstions 2 5 mrn lo ...

Page 50: ...nds on distance between inter ferometer and plane mirror Typical values are 25 arc minutes for 254 mm 10 inches 15 arc minutes for 510 mm 20 inches 5 arc minutes for 1270 mm 50 inches Reflectivity 80 minimum recommended M 40 SCREWS 2 CLEARANCE FOR 64 OR 2 5 mm NOTE Plane mirror flatness will determine system accuracy for X Y stage For example if X axis mirror is out of flat by 20 microinches 0 5 m...

Page 51: ...SIONS See dimensional drawing 1 120 D A 1 020 i 4P l m 2 Figure 2 23a Plane Mirror Converter Specifications DIMENSIONS See dimensional drawings 2 5 m m SCREW OPPOSITE SIDE Figure 2 24 70770A and 70777A Adjustable Mounts Specifications ...

Page 52: ...0A Adjustable Mount b Figure 2 26 shows how to mount the linear or the plane mirror interferometer in the horizontal plane using the 10711A Adjustable Mount Figure 2 27 shows how to mount the linear or the plane mirror interferometer in the vertical plane using the 10711A Adjustable Mount 4 40 FLAT HEAD SCREW HP 2200 0121 LOCK WASHER HP 2190 0004 HORIZONTAL PLANE MOUNTING u A m n w n m e Figure 2 ...

Page 53: ... FLAT HEAD SCREW HP 2200 0121 LOCK WASHER HP 2190 0004 10710A ADJUSTABLE MOUNT NOTE Yaw Beam Adjust Limited VERTICAL PLME MOUNTING HAROWARE I Figure 2 25 Horizontal and Vertical Plane Mounting Using the 70770A Adjustable Mount Cont d ...

Page 54: ...e 2 26 Horizontal Plane Mounting Using the 70777A Adjustable Mount NOTE Yaw Beam Adjust Limited ADJUSTABLE MOUNT 90 MOUNTING HARDWARE 4 4 0 CAP SCREW HP 3030 0253 Figure 2 27 Vertical Plane Mounting Using the 70777A Adjustable Mount ...

Page 55: ...ctor of the receiver CAUTION Use Nylon screw only HP 2360 0369 The receiver housing must be electrically isolatedfrom mountingfixture BEAM DIAMETER 7 6 mm BEAM 30 L SPACING I I 12 7 mm PHOTODETECTOR 50 INSULATING I 9 9mm 0 39 TO AVOID GROUND LOOP Figure 2 28 70780A Receiver Dimensions 2 21 ACCURACY CONSIDERATIONS To optimize the combined operation of the Laser Transducer System and the machine or ...

Page 56: ...rpose of VOL compensation is to determine the air wavelength vacuum wavelength ratio obviously VOL compensation is not required for vacuum measurements and the previous relation reduces to distance in vacuum wavelengths of motion X vacuum wavelength 2 23 Deadpath Error Compensation The previously defined relatior ais valid only if the air wavelength does not change during a measurement If the air ...

Page 57: ...hes or millimetres L in inches or millimetres The deadpath L need not be measuredwith high precision The error in measuring L simply shows up a s an uncompensated deadpath AL For example if the deadpath of a particular machine axis were 10 5 inches but was assumed to be 10 inches then this would result in 0 5 inches the error in measuring L of uncompensated deadpath The resulting 0 shift that occu...

Page 58: ... related to the Laser Transducer System and occurs regardless of the position sensing transducer used on the machine It is however of such prime importance that it must be understood by the user if he wishes to obtain optimum machine performance Figure 2 30 shows the relative effect of different errors 600 I I I I I I I I MATERIAL TEMPERATURE ERROR OF l o C STEEL 500 400 300 200 AIR TEMPERATURE ER...

Page 59: ...ure of the part 2 The size of the part at that temperature 3 The thermal coefficient of expansion of the part refer to Appendix D The true 20 C size of the part can then be determined using the following relation Let Lo the size of the part at 20 C 68OF LT the size of the part at Temperature T a Coefficient of Expansion then This means that an additional compensation must be made for thermal expan...

Page 60: ... One can only predict that agiven machinewill be most accurate when operated in a constant temperature environment If the machine environ ment is suspected to be poor it is best to run drift tests on the machineto determineenviron ment affects on the machine tolerance 2 27 WHERE TO S E N S E MATERIAL TEMPERATURE Even when a machine is operated at thermal equilibrium in a constant environment diffe...

Page 61: ...In other words the interferometer measures the component of motion in the direction of the laser beam Since P P P P cos 8 where 6 angle of misalignment between laser beam and machine axis of motion The error in parts per million would be error 1 cos 8 X 106 It is obvious from Figure 2 37 that the measured P P is shorter than the actual distance traveled P P Note that cosine error always causes the...

Page 62: ...trate several examples of how the laser beam can be routed for multiaxis measurement configurations In Figure 2 32 a three axis measurement configuration is shown with all components aligned in one plane Note that any of the components beam benders beam splitters or interfero meters could be rotated in increments of 90 to provide a three dimensional configuration Since the interferometers can also...

Page 63: ...ith the 10704A Retroreflector the interferometer must be the fixed component with only the retroreflector allowed to move For a detailed explanation see Figure 2 77 If a right angle beam bend is made through the 10702A or 10705A Interferometers the above does not apply In Figure 2 34 an X Y stage measurement configuration utilizing the 10706A Plane Mirror lnterferometer is illustrated The X Y stag...

Page 64: ...tions refer to the paragraph on General Considerations for Mounting Optics VACUUM CHAMBER 10760A PLANE MIRROR X Y STAGE 10780A X AXlS BEAM SPLITTER 10706A PLANE MIRROR RECEIVER INTERFEROMETER X AXlS WINDOW Figure 2 35 X Y Stage Installed in a Vacuum Chamber The configurations depicted above show typical multiaxis measurement applications and assume near equal length measurement paths When dealing ...

Page 65: ... the amount of light detected by the receiver photodiode This specifically includes misalignment of the optics causing the position of the beam at the receiver to wander a s the object being measured runs down its travel Fluctuations of the refractive index of air in the path of the interfering beams which can be caused by local temperature differences cause the laser beam to lose some of its cohe...

Page 66: ...and two 10703A s The transmission factor for this device would therefore be 1 00 X 0 80 X 0 80 X 0 85 0 54 As an example consider a typical installation with three axes see Figure 2 32 Assume linear interferometers on each axis good optical alignment and comparable path lengths Assume that the three axes have the following components Axis A 10700A 33 10707A 10702A 10703A 2 Axis B 10700A 67 10701A ...

Page 67: ...re 2 37 includes the 10702A Linear Interfero meter and the 10703A Retroreflector These measurement components were chosen because they are the least expensive and meet all measurement requirements Figure 2 37 Three Axis Machine Tool Installation v L 10703A RETROREFLECTOP 10702A LINEAR INTERFEROMETER fixed 10702A LINEAR INTERFEROMETER fixed MEASURE 2 5501A LASER MEASURE 1 10707ABEAM BENDER 10700A33...

Page 68: ...eiver Remote Linear lnterferometer 10700A 33 Beam 10707A Beam Retroreflector 10707A Beam 10705A Single Beam 10701A 50 Beam Splitter 5501A Laser Head Figure 2 38 Three Axis Measuring Machine installation igure 2 39 shows the laser head installed on the top of the measuring machine on a single iounting plate thisapproach simplifies and speeds the alignment procedure The portion of i e laser beam ref...

Page 69: ...rferometer There the measurement beam is deflected 90 to the moving Y axis retroreflector shown in Figure 2 47 attached to the Y axis machine slide The other laser beam reflected from above enters a beam bender next to the interferometer where it is de flected to the X axis measurement optics sow J m inonor Ern rnc a Figure 2 40 Y stallation ...

Page 70: ...w to install the Laser Transducer on a specific machine a number of factors must be considered in addition to the method of dividing the laser beam into the ap propriate number of measurement axis Some of the more important points to consider are a Selecting the measurement paths to minimize Abbe error b Installingthe interferometer and retroreflector to minimize deadpath errors c Avoiding extreme...

Page 71: ...gure illustrates the dis placement error E which is generated at the tool tip due to angular motion 6 of the carriage Figure 2 42B shows the same carriage motion as Figure 2 42A but with the measurement axis coincident with the tool path In this case the measurement system measures the actual displacement and there is no Abbe offset error This is a general description of Abbe error and illustrates...

Page 72: ...essi bility the closer the measurement path of the Laser Transducer System is placed to the work ing surface the smaller the measurement error is due to geometric inaccuracies of the machine With machines that exhibit small geometric errors it may be adequate to mount the interfero meter on the side of the machine slide and below the work surface without significantly af fecting the measuring or c...

Page 73: ...ality of the positioning system is determined by the mirrors and not the X Y slides Figure 2 45 illust rates the actual measurement which takes place if there are any geometric errors in the X Y stage 4 H d C 1 x Y STAGE 1 X AXIS MEASUREMENT A I 4 a MIRROR I MIRROR Y AXIS PLANE MIRROR lNTERFEROMETER tbRECEIVER Figure 2 45 X Y Stage Gecrrrretrr Errors ...

Page 74: ...idered as acomponent of deadpath The following informa tion is concerned mainly with the installation aspects of this error source A more detailed dis cussion of deadpath error is contained in Accuracy Considerations In general when installing the interferometer and retroreflectors in a positioning system make every effort to ensure that these components are almost in contact physically when the m...

Page 75: ...ce problems which occur in controlled environments depend largely on the specific application For systems such as integrated circuit photomask cameras in small closely controlled rooms it may be sufficient to provide constant air flow over the measurement paths In other cases such a s measuring machines protecting the laser beams with covers prevents air turbulence effects from interfering with th...

Page 76: ...ul for this type of protection Since either the interferometer or the retroreflector is moved during the measurement pro tecting the laser beam and the moving components requires some type of telescoping cover or a cover of the type that is self sealing There are a wide variety of commercially available 7 protective covers which are suitable for this purpose Figure 2 47 illustrates techniques for ...

Page 77: ...to be in close proximity to the interferometer at the closest point of travel even though the telescoping cover is not entirely collapsible MOVING RETROREFLECTOR COLLAPSABLE SPIRAL COVER INTERFEROMETER ELECTRONICS FIXED CONDUIT FOR LASER BEAM LASER BEAM Figure 2 48 CollapsibleSpiral Cover for Movable Retroreflector ...

Page 78: ...al Figure 2 49 shows a measurement axis where the laser beam is parallel to the mechanical motion of travel of the retroreflector and is optimized for maximum measurement signal LASER BEAM 6 REFERENCE BEAM Figure 2 49 Optimum Alignment INTERFEROMETER RETROREFLECTOR For maximum signal the interferometer and retroreflector are aligned laterally to each other such that the reference beam from the int...

Page 79: ...ical motion of travel of the retroreflector there are two effects First a cosine error is included in the measure ment of a magnitude directly related to the angle of misalignment For a complete descrip tion of cosine error refer to Accuracy Considerations Second the angular misalignment also causes adisplacement of the measurementbeam with respect to the referencebeam at recom bination This resul...

Page 80: ...stalledon the machine 2 42 Alignment Principles Prior to beginning any alignment procedure a basic understanding of what you are trying to accomplish will make the procedure easier to perform The following information is intended as a concise summary of the various factors that affect the optical alignment of the Laser Transducer System As you are performing the alignment procedure keep the follow...

Page 81: ... possible to the interferometer position A of Fig ure 2 52 adjust any component laser head interferometer or retroreflector to get the small spots to overlap at the receiver a receiver alignment target makes this ad justment easier b Move retroreflector to position B and adjust the laser beam by angularly moving the laser beam until the small spots again overlap at the receiver NOTE As indicated b...

Page 82: ...uration which includes a linear interferometer and a single beam interferometer In general when the optical components are installed on the machine their optical centerlines will be nominally in the correct relationship and only minor adjustments should be required When starting the adjustment procedure one axis at a time is adjusted The first axis to be adjusted is the axis where any angular adju...

Page 83: ...6 Adjust the laser head angularly to center the return beam on the receiver alignment target 7 Return the retroreflector to the closest point to the interferometer 8 Repeat steps 4 through 7 until the return beam is centered on the receiver alignment target at both ends of travel An offset of 500 micrometres over a 0 5 metre travel is equal to a cosine error of 0 5 parts per million or 0 5 microns...

Page 84: ...its furthest point of travel Angularly adjust the single beam interferometer to center the return beam from the retroreflector on the receiver alignment target When adjusting the single beam inter ferometer angularly it may also be necessary to make slight lateral adjustments to ensure that the reference beam from the single beam interferometer is also centered on the receiver alignment target Ret...

Page 85: ...ers one hole of the alignment target and exits the other to impinge on the receiver alignment target centered on the hole over the photodetector 3 Place a reflector between the interferometer and retroreflector so that the measure ment beam from the interferometer strikes its reflective surface The reflector s sides must be perpendicular to its front face within stringent tolerances I5 arcseconds ...

Page 86: ...ich will be fluctuating by fine adjusting the laser beam in both angular axes This will align the laser beam to within f15 arcseconds to the reflector surface If the reflector surface is aligned to the direction of travel within f15 arcseconds the laser beam will be aligned to the direction of travel within k30 arc seconds or approximately 0 04 parts per million That is 0 04 micrometre per metre o...

Page 87: ...ne adjusting the laser beam in both angular axes This will align the laser beam to within f15 arcseconds to the reflector surface If the reflector surface is aligned to the direction of travel within k15 arcseconds the laser beam will be aligned to the direction of travel within k30 arcseconds or approximately 0 04 parts per million That is 0 04 micrometre per metre of travel 0 04 microinchesper i...

Page 88: ...d securely 3 Select the small aperture of the front turret of the laser head and install the alignment aid on the output of the plane mirror interferometer in the correct orientation Re move the opaque material from between the plane mirror interferometer and the mirror 4 The laser beam will now exit the interferometer and be reflected by the mirror upon itself back into the interferometer Angular...

Page 89: ...meter securely making sure the alignment is not disturbed Remove the plane mirror interferometer alignment target and alignment aid The reference beam and the measurement beam must be centered on the receiver align ment target 10 Remove the receiver alignment aids and rotate the turret on the laser head to the large aperture Verify that the LED indicator on the receiver is illuminated and the volt...

Page 90: ...meter 16 With a fast responding voltmeter preferably a meter type attached to the receiver test point fine adjust the plane mirror interferometer angularly until a signal is received on the receiver Thevoltmeter will suddenly jump to some value greater than 0 25 volts This is a critical adjustment and may initially require great care to achieve the desired result Peak the voltmeter reading which w...

Page 91: ...a universal English Metric pulse output for most numerical controllers A very basic quarter wave pulse output is also available Other electronic modules provide for manual or automatic velocity of light compensationand for the special needs of some closed loop systems The information is organized a s follows a Theory of operation of a simplified Laser Transducer System b A functional description o...

Page 92: ...relative displacement of two reflectors by splitting the beam into f and f directing them to the two reflectors and returning the resultant signals to a common point where they are made to interfere with each other These combined beams are directed to a photodetector in the receiver Relative motion between the reflectors causes a Doppler shift in the difference frequency which is detected by the r...

Page 93: ...lowing electronic equipment One 9800 Series Calculator with HP IB Interface One 5501A Laser Transducer Two 10780A Receivers One 10740A Coupler Two 10760A Counters One 10745A HP IB Interface One 10755A Compensation Interface One 10756A Manual Compensator Two power supplies 15V and 5V For additional capabilities the following can be selected a Up to two additional measurement axes 10760A Counter and...

Page 94: ...ent on each axis The displaysare interfacedto the 9800series calculator viathe HP IBand receiveanddisplayinforma tion only on calculator command Refer to the individual unit theory of operation for addi tional information Table 3 Typical HP IS lnterface Electronics System Specifications Number of Measu figuration restrictions Measurement Resdution Mwimum Allowable Velocity The measurement reso lut...

Page 95: ... axes 10760A Counter and 10780A Receiver b Automatic compensation replace10756A manual compensator with the 5510A Opt 010 Automatic Compensator and 10563A Material Temperature Sensor c Numeric displays 10783Acan be used only if the system controller is HP IB compatible a m Controller 10748A Binary I n or 10746A H I B Intrrfsa 1 10766A Manual I P A 6SlOA OPT 01 I Automatic I If system is HP IB comp...

Page 96: ...plished independently or simultaneously on the X and Y axis The 10755A Compensation Interface is used with either the 10756A Manual Compensator or the 5510A Opt 010 Automatic Compensator In typical installations the choice of manual or auto matic compensation is determined by the stability of the ambient environment ...

Page 97: ... A 10756A Manual Compensator Two power supplies f15V and 5V Additional capability can be selected by adding the following electronic equipment a Provide additional measurement axis 10762A Comparator and 107648 Fast Pulse Con verter Note that each axis uses only one halfof the 107648Fast PulseConverter There fore two additional axes would require only one additional fast pulse converter b Automatic...

Page 98: ... 114 95 71 57 36 nm sec inches sec 6 0 6 0 6 0 5 5 4 4 3 7 2 7 2 2 1 4 10702A Linear Interferometer 10705A Single Beam lnterferometer Resolution 4 h 8 A l2 A116 A 20 A 24 A 32 A 40 A 60 Maximum Velocity 304 304 304 285 228 190 142 114 71 nm sec inchedsec 12 0 12 0 12 0 11 2 9 0 7 4 5 5 4 4 2 8 output Compatible with 107624Comparator Up Down pulses 7fL differential line driver output Pulsewidth 67 ...

Page 99: ...n the four tolerance bits 215 counts This signal is available both externally at the card edge connector and to the system controller via the 10746A Binary Interface I External Null Output TTL level change active low Response 1 1 micr microsecondstypical System Null Availab a null condition Zero Speed Output Occurs when no counts have entered the Up Down Counter within 17 msec variablefrom 1to 100...

Page 100: ...ltiplier Two 10763A English Metric Pulse Output Cards A 10755A Compensation Interface A 10756A Manual Compensator Two power supplies k15V and 5V Equipment can be selected to provide the following additional capabilities a Up to two additional measurement axis 10760A Counter and 10763A English Metric Pulse Output b Automatic compensation replace 10756A Manual Compensator with 5510A Opt 010 Automati...

Page 101: ...isplacement information The 10763A English Metric Pulse Output cards use this data to generate up down or A Quad B signals representingtotal change in position When there is more than one axis the 10761A Multiplier is shared by each of the pulse output cards Control of the backplane is transferred from one pulse output card to the next in a regular sequence that is set during initial configuration...

Page 102: ...The 10781A Pulse Converter is the simplest method of getting useful information from the Laser Transducer to external equipment A typical system contains the following electronic equipment a A 5501A Laser Transducer b Two 10780A Receivers c Two 10781A Pulse Converters d Two power supplies 15V and 5V ...

Page 103: ...rator h 10764B Fast Pulse Converter i 10761A Multiplier j 10781A Pulse Converter k 10763A English Metric Pulse Output 1 10755A Compensation Interface m 10756A Manual Compensator n 5510A Opt 010 Automatic Compensator o 10783A Numeric Display p 5501A Power Supplies 3 11 5501A Laser Transducer The 5501A Laser Transducer laser head is the source of the laser light for the system The laser head package...

Page 104: ...the two frequency ac measurement system is its large dynamic range For example in the laser transducer system the nominal output power is 120 micro watts but the power returned to the laser receiver can be a s low a s four microwatts and the laser will continue to operate the system The 5501A Laser Transducer System takes advant age of this wide dynamic range by moving the receiver from inside the...

Page 105: ...beam The resulting power on the photodiode chip is an amplitude modulated sine wave its frequency is the Doppler shifted split frequency and its amplitude is proportional to the product of the incident powers of the two orthogonal com ponents The photodiode generates an ac current which is converted to an ac voltage at a frequency of 100 kHz to 5 MHz High GainI Amplltier Photodiode Differential 5v...

Page 106: ...e dif ferent modules Electrical interconectionof the modules is provided by the 86 pin connectors on the coupler s printed circuit backplane The other system modulesare pluggedintothe back planeconnectors Thecouplerhasnointernalpowersupplies butsuppliespowertothe modules from external power supplies connected to a barrier strip on its rear panel Three dc voltages are required 5V 15V and 15V The 15...

Page 107: ... an X axis counter card in the system From the point of view of the X axis counter the in struction 2X means that it should enable its data output buffers its decimal point position code drivers and its error flag drivers to the 10740A backplane and set the Binary Data Valid line true To a 10745A HP IB lnterface card it means load this information into your data re gister decimal point code regist...

Page 108: ...hange numeric digits followed by ASCII carriage re turn CR and line feed LF codes A decimal point also in ASCII can occur anywhere in the string of digits The HP IB card s second mode of operation a s a talker is related to the service request capa bility and the serial poll mode When an error in the laser transducer system is noted by any card the card involved stores the occurrence in a buffer W...

Page 109: ... proceeds on its own until the conversion is complete at which time it clears the conversion flip flop The binary to BCD converter takes the 28 bit binary word in the input data register and each time it receives a clock pulse outputs a four bit BCD character This conversion takes place least significant bit first to most significant bit last The 28 bit binary word translates a nine character BCD ...

Page 110: ...Lines Backplane Toleranoe Bits Lines Null BackplaneData InputlOutput Decimal I J I Figure 3 12 70746A Binary lnterface Block Diagram The transfer of an instruction or data word is controlled by a command line which indicates to the I O card that the bit pattern on the input lines is valid information and a flag line which indicates to the controller that the data bits have been accepted When data ...

Page 111: ...re data words are accepted and placed in successively lower bit locations with the last word in the least signifi cant eight bits The control logic switches immediately back to the command mode after the fourth word If data is to be sent to the controller the sequence is the same except that the control logic sequences the data register to put data onto the interface lines most significant word fi...

Page 112: ...en the receiver and the counter card In addition to these signal processing blocks the counter card also has several control and error functions The error circuits constantly monitor the status of the counter and the con ditions of the reference and measurement signals at the input to the pulse converter If the reference signal is interrupted for more than 6 microseconds a reference error bit is s...

Page 113: ...sample instruction can be given In addition to taking the present contents of the up down counter and loading it into the comparator s output buffer these commands release the forced null that was applied to the null decoder when the destination register was loaded The digital difference in sign and magnitude form then appears at the output of the comparator and is sent to the external D A convert...

Page 114: ... obtained by applying these signals to Schmitt trigger circuits The resolution selection circuits allows resolution extension of the system by factorsof 1through 15 The pulse generation circuits comparethe inputsignals derivedfrom the incoming reference and measurementsignals with respect to frequency and outputs a pulse for each 1 2 cycle dif ference between the reference and measurement signals ...

Page 115: ...mulator The resultingaddition is fed back to the inputs of the accumulator which is a 29 bit register The 29th bit is an overflow bit used to indicate that the result of multiplication has a magnitude greater than 2 8 bits The multiplier register is a shift register that can be loaded from the accumulator or from a con stants ROM read only memory which contains all the conversion constants for the...

Page 116: ...h contain reversible counters Ref 12 6 MHz OIclllator Signal Replication Ref A RefA Error Detect Circuitt Figure 3 77 10787A Pulse Converter Block Diagram Resolution of 10781A Pulse Converter output is one quarter wavelength approximately 6 23 x 10 6 inches If desired pulse pairs may be generated to create an apparent resolution of 1 8 wavelength A pair of jumper wires allows selection of either u...

Page 117: ...hese extreme frequency excursions occur when the system optical devices are moved at too rapid a rate For additional information and schematics refer to the 10781A Pulse Converter Operating and Service Manual 3 21 10763A English Metric Pulse Output The 10763A English Metric Pulse Output card is the system controller for the coupler back plane It issues instructions to the counter multiplier and co...

Page 118: ... its assigned counter card When the pulse output card counts down to zero it stops the counter which now containsthe deadpath measured in quarter wave fringe counts It is necessary to preset the pulse output card to a displacementcount equivalent to the fringe count in the counter This is easily done by causing the counter to output to the multiplier and the multiplier to convert the fringe count ...

Page 119: ...auseonly the four least significantdigits change the compensator presents only these digits to the compensation interfacecard in binary coded decimal format on 16 parallel lines The compensationinterface converts the data to a form usable by the laser transducer system and outputs it to the coupler backplane when commanded to do so In typical installation workshops laboratories machine shops etc t...

Page 120: ...actor allows the operator to correct for thermal expansion of the part being measuredor worked All dimensions are normally referenced to their values at 20 0 C 68 0 F at higher temperatures they measure longer or shorter than this depending on whether the part has a positiveor nega tive coefficient of thermal expansion The 5510A Opt 010 Automatic Compensator has a special thermal probe for sensing...

Page 121: ...tional information and schematics refer to the HP 5510A Operating and Service Manual 3 25 10783A Numeric Display The 10783A Numeric Display provides the laser transducer system with digital display of single or multiple axis displacement data It is driven from the Hewlett Packard lnterface Bus in either the Listen Always mode or the Addressable mode Fourteen 7 segment LED indicators with left hand...

Page 122: ...are62000seriespower supplies with an LED indicator added a s required by FED RECIST July31 1975 Vol IV 0 148 part 2 The 5501A power supply options all contain overcurrent overtemperature overvoltage reverse voltage and remote sensing protection Table 3 6 lists the power supplies available For additional information and schematics refer to the applicable Operating and Service Manual ...

Page 123: ...ssion of the objectives and methods of programmingthe Laser Trans ducer System This includes a general system operating discussion from the viewpoint of the system programming requirements b A table of individual commands for each unit of the system that is programmable In struction formats for both ASCII characters and the decimal equivalent of the binary command are included ...

Page 124: ...ation a LANGUAGE OF THE SYSTEM CONTROLLER For example when the HP 9825A Cal culator is used a s the system controller the operating and control manuals supplied with the calculator contain complete descriptions and examples of the commands and syntax used with the 9825A Note that since the Laser Transducer System also requires the 98213A 1 O ROM and the 98034A HP IB Interface you must also famil i...

Page 125: ... bits of module command information Each module in the coupler recognizes its unique address and responds to commands associated with that address Additionally some modules automatically respond to commands sent to other modules For example when a counter card is instructed to output measurement data to the coupler backplanebus the HP IB interfacecard automatically inputs that data and holds it un...

Page 126: ...8 mode and a special line for indicating a special function labeled system nulled which is used with the comparator based systems The instruction lines consist of 4 command lines 4 card address lines 2 lines used a s instruction valid INSV 2 lines used a s data valid DAV and 2 lines used a s operation complete OPC one line for system reset and one line for the synchronous sample command The power ...

Page 127: ... ERROR BIT D P BIT 1 D p BIT 3 A MODE BIT SPARE 5V RETURN 5V RETURN 5 VOLTS 5 VOLTS 5 VOLTS 5VRETURN 5V RETURN SPARE DATA BIT 1 DATA BIT 3 DATA BIT 5 DATA BIT 7 DATA BIT 9 DATABIT11 DATA BIT 13 DATABIT15 DATA BIT 17 DATA BIT 19 DATA BIT 21 DATA BIT 23 DATABIT25 DATA BIT 27 MAKE N O CONNECTION PINS 2 4 6 8 10 12 14 16 18 20 22 24 26 28 30 32 34 36 Key 38 40 42 44 46 48 50 52 54 56 58 60 62 64 66 68...

Page 128: ...se the desired operations NOTE In all programming instructions 0 is zero and 0 is the letter 0 lnstructions can be combined in one calculator program step An example of this is the in struction sequence 102x30 From the tables it can be seen that the 1 0 instruction generates a backplane sample command the 2 X instruction causes the X axis counter card to output its sampled data and causes the HP I...

Page 129: ...f a function by the binary interface module c It must have a set of data lines to allow passage of binary data to and from the binary interface module The data lines between the binary interface module and the computer can be separated into input and output lines or can use common input output lines In either case only one oper ation can take place at a time Data words can consist of either 8 or 1...

Page 130: ...he error bit buffer on the 10746A Binary Interface To generate this instruction from the computer output the binary equivalent of the decimal number shown for dP in Table 4 3 decimal 255 or binary 11111111 for a negative true interfacecard The 10746A Binary lnterface uses positive true logic The decimal instructions in Tables 4 2 through 411 show the decimal negative true logic value in black and ...

Page 131: ...oad Data into 10746A 1 O buffer I ADDRESSED INSTRUCTIONS I 251 4 NONADDRESSED INSTRUCTIONS Do Nothing System Reset Sample 0P means CMD 0 and any card address except P For 16 bit mode three sequential 0 P commands are required for 8 bit mode five sequential 0 P commands are required Same a s 0 P instruction Do Nothing HP IB Instruction I I Output VOL compensation information to BP data bus and star...

Page 132: ... not clear HP I0 error bits Go to extended resolution mode preset counter clear error bits Count UP O M IReset multiplier and set up A 4 multiplication mode NONADDRESSED INSTRUCTIONS 2v IAccept VOL number and do conversjon constant correction System Reset Sample 2ABC XYZP Accept Displacement number and perform conversion Preset counter to 160 clear error bits and set normal resolution Load content...

Page 133: ...th a reset or an underflow in count register 1 5X I NOP 6X NOP 7X Disable UP A and DWN B inputs and count up at 10MHz Terminateswith reset or an overflow in count reisterl Refer to Table 4 77 a s instruction is address dependent NONADDRESSEDINSTRUCIIONS 1 1 System Reset ISame a s BX instruction I I I Sam le I Same a s 1X instruction I I X used a s an example of the address in this table To make in...

Page 134: ...75514 loutput most recent data See Table 4 77 as instruction is address dependent 6 X 4M 6M To 10760A I 2 M I 10761A l o u t u t roduct to cou ler bus I N A 1 10760A 10761A 10761A 7 X 1 X 2X Response Set normal resolution Decimal Instruction N A Set extended resolution Select millimeter conversion factor Select inch conversion factor 10760A 10760A 10760A 3Y N A N A N A Sample Count up Load count i...

Page 135: ...ction Address Command 0 1 2 I 3 4 5 6 7 Table 4 12 10745A HP IB lnterface Typical Program using HP 9825A Calculator PROGRAM COMMENT I 0 clr 7 rem 7 1 wrt 709 006X A 239 16 238 17 237 18 235 28 234 21 233 22 232 23 2 wrt 709 2V30 3 red 709 C 4 0 E B 223 32 222 33 221 34 219 36 218 37 217 38 216 39 5 loop E 1 E if E 10 gto 3 6 wrt 789 10W30 C 207 48 206 49 205 203 52 202 53 201 54 200 55 Send Device...

Page 136: ...d out if 10745A is requesting service 160 is the subtract preset for normal resolution 22 wrt 709 0P 23 ret 24 check B 112 B 25 if B 8 gsb ovf Send Y to Y display Format 1 is used 7 select code of 98034A 18 address of 10783A Y Display See Figure 4 7K Go to top of display loop Get status byte from 10745A If bit 6 set then 10745A has requested status Go check what kind of error Send to 10745A 0P cle...

Page 137: ...1 wrt 7 9 006X Initialize System 10745A Listen Calc Talk A Figure 4 7 Counter BasedSystem Data Flow Ref From Laser Head 10756A Manual Compensator ...

Page 138: ...10745A HP IB Interface Address 0 Error HP IB Address 7 1 10783 1 Display 1 X Axis hr 16 Aaaress 17 Address 09 SelectCode Y Axis j Display Meas X Ref From Laser Head Meas Y 10756A Manual Compensator ...

Page 139: ...Converter n 2v 10745A HP IB Interface r I I HP IB Address 7 I HP IB X Axis C I HP IB HP IB Address 17 Addms 09 Select Code Y Axis 1 HP ID naaress 18 Meas X Ref From Laser Head 10760A Counter Ref A 0 kMeas Y 1 ce 10756A Manual Compensator 9825A Calculator I 10783A Display I ...

Page 140: ...Ref From Laser Head ri I jA Camaensatar Interfa 10756A Manual Compensator d 2 wrt 709 2V 30 convert from b nary to BCD and prepare to output 71 3 red 709 C output buffer contents to calculator and store In var able C T2 TI convert to BCD T2 ready to output D Figure 4 7 Counter Based System Data Flow Continued Converter 1 10783A 1 Display ...

Page 141: ...0756A Manual Compensator Prior to 1 0 lnstructlon both X and Y moved den tical distance 6 wrt 709 102x30 X axis in X I 0 mode glves 10 times the counts n t o the counter f Sample all counters simultaneously E Figure 4 1 Counter Based System Data Flow Continued ...

Page 142: ...P IB Address 7 X Axis HT ID H U U I I J J 17 Y Axis H 18 Ref From Laser Head BCD Reg 6 wrt 709 10 2x30 Y 10756A Manual Compensator Buffer g Transfer X buffer data to HP IB Interface X has moved 1 count and Y locountsbetween execution of 1 0 and 2X Figure 4 7 Counter BasedSystem Data Flow Continued ...

Page 143: ...nsatorInterface BCD Reg Converter I I I 10756A Manual Compensator 6 wrt 709 102x30 Convert to BCD and prepare to output 7 red 709 x output to caIcuIator and store in variable X Continues to change but does not change buffer information Axis Axis Head Figure 4 7 Counter Based System Data Flow Continued ...

Page 144: ... Y 1 1 10783A I Display I Error I L 999X1Y1Z1Ti 11 fmt 1 f12 6 L f o r m a t fixed point display 12 places 6 digits to the right of the decimal I 12 wrt 717 1 X Output X to HP LB fmt 1 f12 63 X Display Listens I k Cakulator Talks Has been convertard to in hes H _I 10756A Manual Compensator Figure 4 1 Counter Based System Data Flow Continued ...

Page 145: ...IX Axis iP IB HP IB Address 17 Mdress 09 Select Code Y Axis t Ref From Laser Head Meas Y 10755A Compensator Interface 10756A Manual Compensator I u f T T r T1 13 wrt 709 2 3 0 K L T r a n s f e r Y Buffer to HPlB Interface Buffer I Figure 4 1 Counter Based System Data Flow Continued ...

Page 146: ...culator 1160CRLF T 2 L 10745A HP IB Interface Pam I I I HP IB Address 7 006200 4 HP I HP IB I Axis HP la aaress 17 Address 09 Select Code Y Axis II e Meas X Ref From Laser Head 10760A Counter Ref A 0 Meas Y I I 3 10756A Manual Compensator B 9 x 1Y1Z1T1 10783A I Display 107834 Display ...

Page 147: ...Buffer Display HP II ss 18 ID06200 Ref From Laser Head 10756A Manual Compensator Figure 4 7 Counter Based System Data Flow Continued ...

Page 148: ... Il Clear HP IB error bits without resetting entire system This way no displacement information is lost L Figure 4 7 Counter Based System Data Flow Continued Buffer Select Code I 107AFib HP IR Intarfarm rface I 10756A Manual Compensator T1 j In this example error is over flow only c Ref From Laser Head ...

Page 149: ... F 22 gsb in 23 B r3 24 wtb 2 146 3 98 2V sample compensation reading 3 3P prepare to output See Figures 4 26 and C in inputs the number and places it in variable B Refer to step 32 C Compensation Number cnv converts X to fringes Refer to step 38 X destination in fringes I cnv converts Y to fringes Refer to step 38 Y Destination in fringes Add X tolerance in fringes to X desination bits 28 31 I Ou...

Page 150: ...ad in bits 15 0 Complements if negative See Figure 4 2E I D contains bits 31 28 decimal point information 37 65536 Bffi tnt 2 D B ret 38 cnv A 1 58248e 4 C I A ret 39 out wtb 2 4 40 int A 65536 B if B 32767 B 65536 8 41 wtb 2 B 42 A 65536 int A 65536 B if B 32767 B 65536 B 43 wtb 2 B 44 ret 45 erw int B 256 2 B 15 B B 46 if B 8 prt vol error B 8 B 0 D 1 B Bits 27 16 B 2116 bits 15 0 2 D applies de...

Page 151: ...t 26 D l as possible recoverable error Clear Bit 26 If Bit 25 D 4 as irrecoverable error Clear bit 25 If Bit 24 D 0 as irrecoverable error Print meas error go to prterr if irrecoverable error Refer to step 61 Overflow only Read in bits15 0to complete previous 3P command 2491 80 clears error bits on 10746A so 28 bits of data can be transferred with 3P command 3 3P prepare to transfer Read in bits 3...

Page 152: ... a Interface a a 0 rap e 98032A Select Code 10762A Comparator k 4 128 Bit Difference X UpIDom Pulses Zor Meas X e Ref Meas Y X I I 10762A Comparator 28 Bit Difference a wtb 2 a a a s8 3 System Reset HP IB COMMANDS SHOWN IN PARENTHESIS A BCD Reo I 9825A Calculator i510A OPT 010 Automatic Compensator Figure 4 2 Comparator Based System Data Flow ...

Page 153: ...Difference X UpIDown Pulses 7 Meas X 4 c 1 Ref I I Meas Y 10762A Comparator l0Ol0 Y UplDown Pulse c 28 Bit Difference awtb2 0 0 O 98 3 fTransfer cornpensatlon data lo 10716A and fake new readlng HP IB commands shown In parenthesls B Counter I I m L BCD Reg Converter Buffer calculator 5510A OPT 010 Compensator I Figure 4 2 Comparator Based System Data Flow Cont d ...

Page 154: ... 28 Bit Difference Meas X Ref k A T Meas Y X1 10762A Comparator Y UpIDown Pulse 128 Bit Difference 10755A Cnmnnncntinn Interface BCD Reg A Converter I I 1 1 9825A Calculator El wtb 2 0 O 0 98 3 L S e t 10746A card to data transfer out mode HP IB commands shown In parenthes s C 5510A OPT 011 Automatic Compensator Figure 4 2 Comparator BasedSystem Data Flow Cont d ...

Page 155: ...lator Select Code 2 10746A Binary Interface 28 Bit Difference 28 Bit Difference 32 In rdb 2 8 fB 0 65536 B B I Read bits 31 16 1 word the compensatton number tnto varlable B D HP IB commands shown in parenthesis If negative complement the number Compensator I Figure 4 2 Comparator Based System Data Flow Cont d ...

Page 156: ...the number HP IB commands shown In parenthesis E Figure 4 2 Comparator Based System Data Flow Cont d BITS 15 0 i C 98032A Select Code 2 I 10762A Cornoarator Counter 28 Bit Difference U DownPulses Error Responds to X or Y Ref Address Resolut on C Meas Y X1 Extender Pulse 28 Bit Difference I TOL I ...

Page 157: ...ary Interface Select Code 2 28 Bit Diffemnce 107648Fast Pulse Convertor 28 Bit Difference 1 P 39 out wtb 2 4 1 S e t 10746A for data input from caiculator HP IB commands shown In parentheas F TOL Buffer BCD Reg 5510A OPT 010 Automatic Compensator I Figure 4 2 Comparator Based System Data Flow Cont d ...

Page 158: ...16 TI BITS 15 0 T2 4 I 98032A Select Code 2 Figure 4 2 Comparator BasedSystem Data Flow Cont d 1 A _ 4 128 Bit Difference X Up Down Pulses 107648 Fast Pulse Convertor t Meas X Ref 4 Meas Y i X I F 1 Y Up Down Pulse I 1 28 Bit Difference 10756A Compensation Intewface x1 y 1 z 1 T1 41 wtb 2 B outputs bits 51 16 to 10746A buffer Tl 43 wtb 2 6 output bits 15 0 to 10746A buffer T2 HP IB commands shown ...

Page 159: ...a Select Code 2 28 Bit Difference 28 Bit Difference 10755A Commnsat on Interface 16 wtb 2 131 Transfer tolerance and dest natlon to X comparator HP 18 commands shown In parenthes s H OVF BCD Reg 9825A Calculator 5510A OPT 01 Automatic Compensator I Figure 4 2 Comparator Based System Data Flow Cont d ...

Page 160: ...Interface Select Code 2 28 Bit Difference 28 Bit Difference 1 19 wtb 2 14 ransfer tolerance and destination to Y comparator HP IB commands shown in parenthesis I L Figure 4 2 Comparator Based System Data Flow Cont d OVF Counter BCD Reg Converter Calculator I 15510A OPT 010 Automatic I Cornpenrator ...

Page 161: ... Select Code 2 28 Bit Difference 2 IF ENABLED 28 Bit Difference 3 IF ENABLED 2 wtb 2 1 130 3 Sample X and Y simultaneously HP IB commands shown In parenthesis J Counter 6 Destination TOL Buffer 1 9825 Calculator 5510A OPT 010 Automatic Compensator 1 Figure 4 2 Comparator Based System Data Flow Cont d ...

Page 162: ... UpiDown Pulses 1 rtor Meas X Ref Meas Y 10762A Comparator 28 Bit Difference k 1IF ENABLED 1 C arface 4 I 1 T1 _ I Sample X and Y s rnultaneously 20 wtb 2 1 130 3 Transfer X data and deomal polnf lnformat on to 10746A buffer errors also fpresent HP IB commands shown In parenthesis K OVF Counter Destination Buffer i L D o n D Buffer Calculator I 5510A OPT 011 Automatic Compensator Figure 4 2 Compar...

Page 163: ... Bit Diffemnce Z 1 IF ENABLED 28 Bit Difference W 0 IF ENABLED 20 wtb 2 1 130 3 I Set up the 10746A card to output to caI uIator HP IB commands shown In parenthes s L L OVF Counte I 9825A Calculator 1 5510A OPT 010 Automatic Compensator 1 Figure 4 2 comparator Based System Data Flow Cont d ...

Page 164: ... or Y Address Resolution I Ref Meas Y 10762A Comparator Counter Destination 28 Bit Difference 1 IF ENABLED I NULL I TOL Buffer Compen nterface I 35lOA OPT 010 1 i Automatic Compensator 24 wtb 2 146 3 Transfer Y data and decimal point information to 10746A card HP IB commands shown in parenthesis M Figure 4 2 Comparator Based System Data Flow Cont d ...

Page 165: ...fer I Resolut on Error Extender m I Responds to X or Y Resolut on fi Extender I I Select Code 2 28 Bit Difference 1 IF ENABLE 24 wtb 2 146 3 set up 10746A card to output to the controller Ffgure 4 7 Comparator BasedSymetn Dara flow ffmr d ...

Page 166: ... 4 13 Conversion to Inches or Millimetres In the case of displacement data X Y Z etc it is normally necessary to convert the raw data to compensated millimetres or compensated inches First the number must have the correct preset number subtracted and in the caseof abinary number the decimal information applied a s explained in the previous paragraphs The resulting number must then be multipled by ...

Page 167: ...resets be referenced from the gage or 0 position rThis expression is provided so Ad can be computed d must be measured manually Must be related to 20 C 68OF Ad and At are vacuum wavelengths d Ad should be approximated by k C Total 1 I Deadpath Compensated Distance Distance Relatedto 20 C 68OF NOTE 1 k is the conversion constant see 4 13 2 C is compensation number when gage originally determined 3 ...

Page 168: ...terfacecard Figure 4 4 shows how to send data or instructions to the 10746A and Figure 4 5 shows how to obtain data from the 10746A Since the flag and control signals from the 10746A are very fast care must be taken to inter face simply to the 12566B pcircuit interface card As the 125668 Input latches are not edge triggered it is necessary to have the input latches follow the data After a flag is ...

Page 169: ...tination address of the object under control Since this destination address reflects a displacement in inches or millimetres and the 5501A Laser Transducer System measures in units of some fraction of the wavelength of laser light a conversion has to be made prior to transmitting the destination address This wavelength of the laser light is dependent on the environmental conditions under which the...

Page 170: ...UGGINGTIPS The first and most important thing to remember about programming the HP 9825A Calcuator to act a s a system controller is that the documentation for the 9825A Calculator contains ex tensiveexamplesandtechniquesof howto properlyprogramanddebugthecalculatorroutines In addition to that when specifically programming for the Laser Transducer System keep the following points in mind a When in...

Page 171: ...e Some cards are positive true e g the 10746A Binary Interface Other cards are negative true The quickest way to check if there are no other malfunctions in the system is to send different commands both ways Refer to Table 4 11 for examples of specific commands j Remember that with the binary interface it is possible to have an overflow error and still have valid data In order to strip off the err...

Page 172: ...rmine which condition exists When bits C C C C 1 1 1 1then the Counter and Comparator are within the 4 bit tolerance If C C C C 1111 then these bits will be a code indicat ing the following measurement errors If C 0 a VOL error exists If C2 0 an overflow error exists If C 0 a reference error exists If CZ4 0 a measurement error exists If D3 D Dl Do 1 1 1 1 then these bits will indicate a decimal po...

Page 173: ...pted by the System Controller it will send a control bit back to the 10746A Binary lnterface requesting the second word which will then output the second word etc 3 operations for 16 bit words 5 operations for bit words 1 microsecond per operation 2 Input Sequence When it is desired to load the Destination and Tolerance onto the 10762A Comparator the following sequence is implemented a Load Data C...

Page 174: ...Lamp 7 RETUNE FAILURE Lights to indicate the Laser Tube is not properly tuned or that retune cycle did not LED Lamp retune the laser 8 RETUNE Lights to indicate that retuning is required or that retune cycle is in progress Light LED Lamp should go out approximately 9 seconds after the RETUNE pushbutton is depressed If light remains on a tuning fault is indicated 9 RETUNE Manually activates Retune ...

Page 175: ...COMP AIR ONLY Compensation number in parts per million due to air measure ments only c 2 HUMIDITY Percentage of relative humidity d 3 AIR PRESSURE Barometric pressure in either inches or mm of mercury a s deter mined by the in Hg mm Hg switch e 4 AIR TEMP Air temperature in degrees Fahrenheit or Centigrade a s determined by the O F O C switch NOTE The calculator will display a reference temperatur...

Page 176: ...e of the compensation number will be determined by the setting of the AUTO MANUAL switch SCAN position not used with Laser Transducer System 4 AUTO MANUAL switch Always set to AUTO when used with Laser Transducer System to supply compensation numbers to the 10755A Compensation Interface 5 MATERIAL COMPENSATION thumbwheel switch Used to enter material temperature coefficients in pprn degree of Fahr...

Page 177: ...rement data In this case the data could repre sent Z Axis measurements Figure 4 9 70783A Numeric Display Front Panel Indicators 4 20 Initial Power Application WARNING BEFORE PERFORMING THE FOLLOWING STEPS BE SURE THAT ALL SYSTEM ITEMS THAT ARE CONNECTED TO AN AC POWER SOURCE HAVE A COMMON EARTH CROUND CONNECTION IT IS POSSIBLE TO HAVE A DIFFERENCE IN ELECTRICAL POTEN TIAL BETWEEN THE VARIOUS SYSTE...

Page 178: ...to avoid shock hazards and to eliminate ground loop problems b The preliminary procedures Checksthe power supplies transducer head receivers and system controller prior to installing any equipment These procedures must be per formed for all systems The physical installation and alignment of the transducer head receivers and optics Refer to Section I 1for the background information necessary to ens...

Page 179: ...acteristics I Recommended Model I I DC Voltmeter 1 k15V i0 025V and 5V i0 01V 1 HP 3435A 1 Logic Probe Ability to Indicate TTL and HP 10525T 10525E ECL Logic Levels I Oscilloscope I Ability to Display Signals I HP 180A 1801A 1820A between DC and 20 MHz 5 2 SYSTEM GROUND CONSIDERATIONS IF proper system grounding techniques are not observed two adverse situations can occur a A system can be intercon...

Page 180: ...le wiring the system Ensure however that all units are grounded The best approach is to have one com mon earth ground connection in the system with all system components connected at the single ground Also avoid connecting both ends of a signal cable shield to a ground point This would allow currents to flow through the shield and possibly cause interference with the signal lines within the cable ...

Page 181: ...o apply and remove system power The mains plug shall only be inserted in a socket outlet provided with a protective earth contact Beforeplugging in makesurethe sourcevoltage matches the input rating of the power supplies Prior to mounting any equipment perform the following steps a Unpack and inspect all of the equipment each of the unit manuals contain unpacking and inspection procedures b Check ...

Page 182: ...n 15 ft 4 57 m 15 ft 1 52 rn 5 ft 4 57 rn 15 ft 3 66 rn 12 ft 2 ea 0 46 rn 1 5 ft 1ea 0 3 rn 1ft 1ea 0 9 rn 3 ft 2 ea 4 57 r n 15 ft 4 ea 1 53 rn 5 ft 3 ea 0 46 rn 1 5 ft 4 57 rn 15 ft 4 57 m 15 ft 0 3 rn 1ft 4 57 rn 15ft 1 0 9 rn 3 ft 1 83 rn 6 ft 3 66 rn 12ft Interconnects To f15V 62215E Power Supply 10760A or 107648 or 10781A or 10714A 10760A or 107648 or 10781A or 10714A 1 1 5V 230V 2100 Cor 1...

Page 183: ...WlTH 10740A COUPLER 3 3 R 3 2 05501 60009 POWER CABLE WlTH 5 CONNECTOR FROM 5501A P GROUND SHIELD AT POWER SUPPLY NOT AT 10740A g f S C 10740 60004 5 INCLUDED WlTH 4 10740A I INCLUDES 5 rn TWISTED PAIR FOR L REMOTE SENSE 5V POWER SUPPLY 0 Y E 8 NOTE 5V AND 15V RET SHOULD BE CONNECTED 5 LINE CORD PER APPROPRIATE COUNTRY ...

Page 184: ...see Figure 4 6 WARNING BEFORE PERFORMING THE FOLLOWING STEPS BE SURE THAT ALL SYSTEM ITEMS THAT ARE CONNECTED TO A N AC POWER SOURCE HAVE A C O M M O N EARTH GROUND CONNECTION IT IS POSSIBLE TO HAVE A DIFFERENCE I N ELECTRICAL POTENTIAL BETWEEN THE VARIOUS SYSTEM COMPONENTS IF A C O M M O N GROUND IS NOT ENSURED THIS CONDITION CAN CAUSE INJURY TO OPERATING PERSONNEL AND OR CAUSE DAMAGE TO THE SYST...

Page 185: ...Section 1 1 is devoted to considerations of proper measurement path layout sources of error mounting beam protection and alignment techniques Only after you have carefully read Section II and have laid out a measurement path should you attempt to install the equipment a Install the laser head receiver and optics in their preplanned positions using the mounting instructions contained in Section II ...

Page 186: ...es for the installation of the electronic interface are subdivided into the following categories a Calculator Interface Electronics installation b Computer Interface Electronics installation I Counter based system installation 2 Comparator based system installation c English Metric Pulse Output Electronics installation d 10781A Pulse Converter Electronics installation Each of these procedures is c...

Page 187: ...10A Opt 010 and the 10755A Compensation Interface d If the 10783A Numeric Displays are used connect the 5V power cables between the numeric display rear panels and the 5V power source on the back of the 10740A Coupler e Connect the f15V power supply if used and 5V power supply to suitable sources of ac power Apply system power Verify the voltage at the coupler rear panel is 15V dc k0 25 15V dc M 2...

Page 188: ...em and daisy chain the REF connectors a s shown in Figure 5 6 i Apply system power and verify that the reference and measurement LED indicators located near the bottom front edge of each counter light the reference LED indicator is the one closest to the front edge Remove system power j Connect the system controller to the 10745A HP IB Interface card using the inter connect cable P N 59310 60002 R...

Page 189: ...NOTE SEE FIGURE 5 4 FOR DETAILS OF POWERSUPPLY WIRING AND GROUND CONNECTIONS Figure 5 6 Typical HP IB Controller Interface Electronics Interconnecting Diagram ...

Page 190: ...lation Perform the installation of a counter based system a s follows a If the 10740A Coupler is to be rack mounted or installed in a cabinet refer to the 10740A Coupler Operating and Service manual for dimensions and installation instructions b Connect the 5V power supply cable between the power supply and the 10740A Coupler rear panel terminal strip c If the optional 5510A Opt 010 Automatic Comp...

Page 191: ... rear panel of the 10740A Coupler verify that the voltage is I5 0 25V dc 15 0 25V dc and 5 0 10 0 05V dc see Figure 5 4 5 9 Comparator Based System Installation Perform the installation of the comparator based system a s follows a If the 10740A Coupler is to be rack mounted or installed in a cabinet refer to the 10740A Coupler Operating and Service manual for dimensions and installation instructio...

Page 192: ... REF A 5510A IS USED 10740A COUPLER 10780A 10760A 10780 60003 COUNTER RECEIVER RCV 10780A RECEIVER POWER I5 CONNECTION 15V RET YEL TERMINAL 10760A STRIP 10780 60003 RCV p TO ADDITIONAL 5510AOPT010 r 1 AUTOMATIC L A A COUNTERS IF USED COMPENSATOR 10755A r l 59995 61 082 COMPENSATION INTERFACE LDE PLAY COMPUTER OR CONTROLLER 5V RFT MATES DIRECTLY WITH I 10755A BOARDEDGE 1 CONNECTOR USER SUPPLtED 551...

Page 193: ...al 107648 Fast Pulse Converter cards in the system and the associated pairs of RF cables to the 10762A Comparator cards k If the standard 10756A Manual Compensator is used mount it on the edge connector of the 10755A Compensation Interface I Apply system power and verify that the reference and measurement LED indicators located near the bottom front edge of each counter card lights the reference L...

Page 194: ...Figure 5 8 Comparator Based System interconnecting Diagram ...

Page 195: ... 5 0 5 5 6 0 6 5 7 0 7 5 1 8 9 I0 11 12 13 14 15 Table 5 2b Resolution of a Single Beam or Linear interferometer with the 107646 Table 5 2c Resolution of a Plane Mirror lnterferometer with the 70764B Table 5 2d Maximum Velocity for Non Differential Mode Single Beam and Linear lnterferometer inches second Plane mirror interferometer specifications are one half of these values ...

Page 196: ...vidual Operating and Service manuals 5 10 ENGLISH METRIC PULSE OUTPUT ELECTRONICS INSTALLATION The 5501A English Metric Pulse Output Electronics provides micrometre or microinch value pulses The output signal cable lengths are standard at 4 57 m 15 ft and are terminated in bare wires All interconnecting cables between the English Metric Pulse Output Electronics and the 5501A Laser Transducer are s...

Page 197: ...Already set at factory but may have moved in shipment f W S 7 Already set at factory buy may have moved in shipment Set up by user See paragraph 5 10 2 or 10763A English Metric manual ior details This jumper is installed a s the resolution is English Remove for Metric units This jumper is installed a s the resolution is normal Remove for XIO This jumper is inserted since X axis is the master card ...

Page 198: ...irst 10760A Counter card see Figure 5 9 for a typical system setup g Connect the hooded connectors in sequence to each of the additional 10760ACounters in the system h Apply system power and verify that the reference and measurement LED indicators located near the bottom front edge of each 10760A Counter light the reference LED indicator is the one closest to the front edge Also verify that the O ...

Page 199: ...GURE 5 4 FOR DETAILS OF POWER SUPPLY WIRING AND GROUND CONNECTIONS TO COUNTER ON CONTROLLER TO CONTROLLER TO COUNTER TO CONTROLLER Figure 5 9 Typical English Metric Pulse Output Electronics Interconnecting Diagram ...

Page 200: ...EXTERNAL AUX RESET SHIELD REOUlRED I I I I j I I I I I I 8 I I I 1 1 1 8 I 1 I 8 m I I I I I I I I I I t I I I 1 I I I m I I I 1 I I 8 1 I I I I I I I I I I I 1 i I I P ITWISTED PAIR I I I DO NOT GROUND I I P ITWISTED PAIR1 I I I 1 I 1 TYPICAL LINT CONNECTED TO 10 63A TYPICAL COUNTER MSB LSB E F HFSEI D OPT0 ISOLATOR HP50H2 4361 CLEAR COUNTER OR SIMILAR c CLEAR G COUNT DOWN PULSE N 4 BUT NOT REOUI...

Page 201: ...ered negative pulse card and system reset For initializing external counter or controller at same time a s laser transducer system Mon tor only do not apply signals Reproduced coupler bus RESET Stops entire 10763A controlled system when this line is set low Starts entire 10763A controlledsystem if pin S goes high and then S returns high and R returns low Either this signal or power switched on wil...

Page 202: ...ted and converted to binary numbers before it can be set in the 10763A binary DEADPATH switches Use the following procedure to adjust and convert the measured deadpath to the switch settings 83 6 Calculate N from this formula N x K R CLOCK RATIO where N number to be converted to binary X deadpath K 1 605 08 X 105 for X in inches 10 pin or 6 23023 pin K 6 319 202 X lo6for X in metres CLOCK RATIO 16...

Page 203: ...step 4 as N 4 a If N 1 048 576 set S53 10 to 1 and subtract 1 048 576 from N to 10 carry to step 5 a s N b If N 1 048 576 set 553 10 to 0 and carry N4 to step 5 a s N5 5 a If N r 524 288 set S53 9 to 1 and subtract 524 288 from N to carry D to step 6 a s N or b If N 524 288 set 553 9 to 0 and carry N to step 6 a s N 6 a If N z 262 144 set S53 8 to 1 and subtract 262 144 from N to carry to step 7 a...

Page 204: ...m N to carry to step 13 a s N or b If N 4 096 set 554 2 to 0 and carry N to step 13 a s N 13 a If N L 2 048 set S54 1 to 1 and subtract 2 048 from N to carry to step 14 as N or b If N 2 048 set S54 1 to 0 and carry N to step 14 a s N 14 a If N 2 1 024 set S54 0 to 1 and subtract 1 024 from N If N 1 024 512 add binary 1 to least significant bit and carry the result UP An example of converting the d...

Page 205: ...quarter wavelength value One pulse converter is required for each measurement axis Perform the installation procedures a s follows a Verify that the jumpers in the 10781A Pulse Converter match your system configuration Refer to the 10781A Pulse Converter Operating and Service manual 3 If the 10781A Pulse Converters are to be rack mounted or installed in a cabinet refer to the 10781A Pulse Converte...

Page 206: ...PULSE OUTPUT CUSTOMER VlRED Figure 5 77 70787A Pulse Converter Electronics Interconnecting ...

Page 207: ...e present b If the 10745A HP IB Interface Card is used verify that the Talk and Listen lights on the middle front edge of the card are alternately lit when the card is addressed to talk and listen by the system controller c If the 10746A Binary Interface Card is used verify that the Data light on the upper front edge of the card lights when an instruction is sent from the system controller to tran...

Page 208: ...is not correct change the position of the NORMAL REVERSE jumper on the 10762A Comparator card or change destination via software Refer to the 1076214 unit manual for additional information if required b Command the system to move the measurement optics a specific distance and verify that the DAC response is appropriate c Interrupt the laser beam in each axis and verify the system comes up with an ...

Page 209: ...UAD B PULSES OF SELECTED RESOLUTIONS 1 Figure 5 72 English Metric Pulse Output System State Diagram a Give a start command from the system controller and verify that a ready response is returned from the English Metric Output Pulse System s e e Figures 5 70 and 5 72 b Verify that the two LED indicators on the lower front edge of each 10760A Counter card are lit These LED S indicate that the refere...

Page 210: ...to the 10763A unit manual for additional information h Interrupt the laser beam in each axis and verify the system comes up with an error indication Reset between each beam interruption i Connect the twisted pair output cables 10763 60002 to the system controller or monitor ing system Refer to the 10763A English Metric Pulse Output unit manualfor additional information j Displace the measurement o...

Page 211: ... from the optic windows A good camera lens brush with a rubber bulb blower is recommended Dampen a few optical lens cleaning tissues with optical grade ethyl alcohol shake off excess alcohol and wipe across window once Use fresh tissue dampened with alcohol for each wipe Allow alcohol to dry naturally NOTE DO use only camera or better grade lens tissue DO NOT use any of the various impregnated eye...

Page 212: ... and operating If for any reason you cannot quickly locate the problem the detailed troubleshooting procedures will prove helpful b Detailed troubleshooting procedures You should use these procedures when you are installing your system and cannot obtain the results called out in the installation and checkout procedures The detailed troubleshooting procedures can also be used if you are having diff...

Page 213: ...oards g That the system optics are clean Refer to the paragraph on preventive maintenance in Section V h That all power supplies have been checked for correct output voltages i The final and perhaps most important point to remember about troubleshooting procedures is that they cannot cover all possible malfunctionsor combination of mal functions However at the very minimum they will get you to the...

Page 214: ...all other optical devices from the system Most systems contain more than one axis and con sequently more than one receiver If trouble is suspected with one receiver exchange it with another receiver to verify the suspected malfunction If the receiver or the optical devices are rotated around the laser beam axis the receiver indicator may remain on even if the beam between the interferometer and re...

Page 215: ...e LED indicator to signify that the board is in the data mode of oper ation Be sure to observe that power is available If the problem appears to be within the 10746A module check that the controller applies a command signal to the 10746A prior to replacing the module 6 11 10755A COMPENSATION INTERFACE The 10755A in response to coupler backplane bus instructions transfers velocity of light compensa...

Page 216: ... that is controlled by a on the 10763A card These instructions cause 10760A Counter cards and the 10755A Compensation Interface to output data to a10761A BinaryMulti plier card Subsequent instructions cause the multiplier card to output modified measurement data to the 10763A card This data is outputted by the 10763A card a s up down or A quad B signals to external equipment Troubles can be isolat...

Page 217: ...method determines if the supply itself is malfunctioning or if a short in the cabling or elsewhere is causing the supply to current limit If the power supply is found to be defective refer to the separate oper ating and service documentation supplied with the power supply These manuals also contain procedures for adjustment of the output voltages 6 19 DETAILEDTROUBLESHOOTINC PROCEDURES Each of the...

Page 218: ...output level to near zero volts Also check for an open circuit in the power supply wiring If the POWER O N light is lit check the status of the four rear panel indicators associated with the fl5 volt supplies two UNBAL indicators and two FUSE indicators If power is available to the laser head but the head does not emit red light refer to the separate manual for the laser head for further troublesh...

Page 219: ...P IB lnterface from Section IV Programming into the system controller If the problem disappears check user s software If problem remains continue MUUI AXIS 1 If same problem exists on all axes check the following possible error sources a Check temperature in coupler environment b Check voltage on each circuit card in the coupler COUPLER TEMPERATURE SYMPTOMS ACTION O0 to 55OC None electronics None ...

Page 220: ...ction nostic if possible or listen 3 User software Check for proper command sequence example program Section IV 4 10745 Mal Replaceor trouble function shoot 10745 5 Interface Replace or Trouble Cable Mal shoot cable function d 10783A Numeric Disp SYMPTOM POSSIBLE PROBLEM ACTION Displacement in 1 10783A HP IB Set switches on formation not address in back of 10783A being displayed correct to correct...

Page 221: ...xes substitute known good components to isolate the problem system component The following may also apply a Check voltage on each coupler card SUBSEQUENT ACTION If LED is extin guished trouble shoot 10760A Troubleshoot receiver or cabling If LED is extin guished trouble shoot 10760A Troubleshoot laser head or cabling ACTION Verify pres ence of ref erence and measurement signals with oscilloscope T...

Page 222: ...urement 4 10780A Mal function cable intermittent or 10760A mal function Use laser power meter filtered for 6328 Angstroms e g UnitedDetector CHECK Reduce beam size by rotating to small aperature on laser head Place align ment target on receiver lens Move optics along entire measurement path and verify both re turn beams overlap on the target along the entire length of movement Monitor 10780A test ...

Page 223: ...ils to re probe verify lution ceive extended 10760A receives resolution corn extended reso e g laser mand or reso lution command readings are 6 or lution circuitry U47 9 on 10760 10 times greater is malfunctioning should be a TTL or less than known high if in ex measured distance 2 10760A resolu tended resolution tion jumpers are incorrectly set 2 If command not received check proper command decod...

Page 224: ...than one part in 100 000 and is evident on 2 Cosine error 2 Align optics a single measure in optical Section 11 ment axis alignment 3 107806 Saturation 3 Adjust 10780A Refer to 10780A Manual ERROR DETECTION 4 If an error indication does not occur when the laser beam is interrupted in a measurementaxis a Check LEDindicator on associated 10780A receiver If it extinguisheswhen beamisinterrupted proce...

Page 225: ...duce the voltage output level to near zero volts Also check for an open circuit in the power supply wiring If the POWER ON light is lit check the status of the four rear panel indicators associated with the 215 volt supplies two UNBAL indicators and two FUSE indicators If power is available to the laser head but the head does not emit red light refer to the separate manual for the laser head for f...

Page 226: ... TTL Level Ability to display signals between dc and 20 MHz SYMPTOMS None electronics should operate as described Counters may jump or count erratically LOCATION 5V Front edge test point CHECKOUT PROCEDURE MULTI AXIS PROBLEM 1 If the same problem exists on all axes check the following possible error sources a Check user software refer to Section IV Programming for example program b Check instructi...

Page 227: ...d ACTION LOCATION RESULT SUBSEQUENT ACTION Verify presence 10760A front Signal If LED is extin of reference edge present guished trouble and measure shoot 10760A ment signals with oscillo Measurement Signal Troubleshoot scope Signals Signal Pins absent receiver or are square 18 20 cabling waves Reference Signal If LED extinguished pins 22 24 present troubleshoot 10760A Signal Troubleshoot laser ab...

Page 228: ...and verify both return beams over lap on the target along the entire length of movement Monitor 10780A test point on back of receiver voltage should lie in range 0 5 1 OV dc If volt age l lV receiver could be saturated If voltage 02V gain may be too low Use power meter if available and polar izer and check rela tive power of hori zontal and vertical polarization Look at output signal from 10780 an...

Page 229: ...on command U47 9 laser readings resolution cir on 10760should be a are 6 or 10 cuitry is mal TTL high if in extended times greater functioning Can resolution or less than also be software known measured error 2 If command not distance received check proper command decoder output on 10760with logic probe 3 Replace interface card 4 If command received verify 10760A is cor rectly jumpered for desired...

Page 230: ...d 10760A card SYMPTOM Error in dis played reading error is less than one part in 100 000 and is evident on all measurement axes Laser system reads a shorter distance than the known dis placement of the optics An error results in the displayed reading that is less than one part in 100 000 and is evident on a single meas urement axis CAUSE 1 Compensation cir cuitry mal function 2 Software error Misa...

Page 231: ...wer line short This can cause the power supply to current limit and re duce the voltage output level to near zero volts Also check for an open circuit in the power supply wiring If the POWER ON light is lit check the status of the four rear panelindicators associated with the k15 volt supplies two UNBAL indicators and two FUSE indicators If power is available to the laser head but the head does no...

Page 232: ...hould operate a s described Out of range Counters may jump or Ventilate count erratically enclosure b Check voltage on each coupler card LOCATION VOLTAGE 5V Front edge test point At least 5V 2 01V on each card C Check user software Refer to Section IV for example Comparator Program d Check instruction sequence timing Refer to 10746 manual e 10746A Binary lnterface Card I I SYMPTOM Data LED does no...

Page 233: ...rement 2 pins 14 16 Reference pins 22 24 ACTION Measurement or ref erence present troubleshoot 107648 Measurement absent Troubleshoot res pective receiver and cabling Reference absent troubleshoot laser head and cabling CHECK 1 Compatibility of DAC with output signal from 10762A 2 Software for proper con version of data word con taining tolerance and destination 3 Destination address is being load...

Page 234: ...0762A U68 U61 U62 U63 U64 U65 U66 U67 1 1 01 1 1 1 1 1 1 1 1 1 1 1 1 1 1 00 1 1 01 1 1 1 1 01 00 9 I I Tolerance Destination Register Register Output Output Seeschematic for pin numbers Bit 32 0 PROBLEM EXISTS BUT NOT ON ALL AXES 2 If the system is multi axis but the problem is not present on all axes substitute known good components to isolate the problem system component The following may also a...

Page 235: ... length of movement 2 Misadjustment of Monitor 10780A test Refer to 10780A 10780A Receiver point on back of manual for adjust Gain receiver voltage ment procedure should lie in range 0 5 1 OV dc If voltage I lV receiver could be saturated If volt age 02V gain may be too low 3 Low power in Use power meter if Rotate interfero frequency used available and meas meter 90 degrees for measurement ure rel...

Page 236: ...ctions 10764B Mal 10764B in extended reso function verify proper lution Jumpersand switch settings switches may be on card Repair set incorrectly if problem remains Correct position 1 Improper system 1 See Section Y data is output but grounding for grounding in wrong format i e considerations least significant data being sent in 2 Incorrect I O 2 Check I O first word transmitted cabling cabling DA...

Page 237: ...sample Laser System reads Optical misalignment Refer to Section II a shorter distance resulting in cosine for alignment than the known dis error procedure placement of the optics 4 If an error does not occur when the laser beam is interrupted in a measurement axis a Check LEDindicator on associated10780AReceiver If itextinguisheswhenbeamis interrupted proceed to step b If it remains on when beam i...

Page 238: ...to near zero volts Also check for an open circuit in the power supply wiring If the POWER ON light is lit check the status of the four rear panel indicators associated with the fl5 volt supplies two UNBAL indicators and two FUSE indicators If power is available to the laser head but the head does not emit red light refer to the separate manual for the laser head for further troubleshooting informa...

Page 239: ... HP P N 3101 1261 REQUIRED CHARACTERISTICS Range 15V to 15V 01V dc TTL Level Ability to display sig nals between dc and 20 MHz Totalizing Capability e g HP 5301 5328 Used for test purposes to activate output cir cuitry Capable of sending Start pulses The switch sends a Start pulse to activate the electronics and initialize the system The switch should be wired so that pins S V are shortedwhen the ...

Page 240: ...4 1 cycle 20 seconds Section IV Each 1076314 must using TTL Logic initialize its own Probe This line axis before it should be cycling passes control to high and low another 10763A 4 If OPC is cycling properly prob lem is probably a defective 10763A 5 If OPC is not cycling properly problem can be a defective 10760A Overflow error 10760A counters trying Switch normal is flagged after to count in wro...

Page 241: ...ment signals with oscil loscope These signals are square waves 10760A Front edge Measurement signal pins 18 20 Reference signal pins 22 24 Signal present Signal absent Signal present If LED is extin guished trouble shoot 10760A Troubleshoot receiver or cabling If LED is extin guished trouble shoot 10760A If multi axis system 10760A counter cards can be interchanged to isolate problem Remember to c...

Page 242: ...et on receiver lens Move optics along entire measurement path and verify both return beams overlap on the target along the entire length of movement Monitor 10780A test point on back of receiver voltage should lie in range 0 5 1 OV dc If volt age I 1V receiver could be saturated If voltage 0 2V gain may be too low Use power meter if available and polar izer and check rela tive power of hori zontal...

Page 243: ...f counts are in correct see Test b c d System mal I 10760A Counter 1 Using logic probe functions in ex fails to receive verify 10760A re tended resolution extended reso ceived extended lution command resolution com or resolution mand U47 9 on circuitry is 10760 should be a malfunctioning TTL high if in extended resolution e g Laser 2 Resolution jum 2 If command not readings are pers on 10760A rece...

Page 244: ...g logic probe and verify correct Comp number is being input 4 See Section I 1 for optical alignment pro cedure 1 10763A mal See Test a function 2 10760A mal Troubleshoot or re function place 10760A 3 Cosine error Align optics See in optical align Section 11 ment If laser reads shorter than known dis placement 4 10780A Satura Adjust 10780A tion Refer to 10780A Manual ERROR DETECTION I 4 If an error...

Page 245: ...ntrol Settings for Coupler Operation Verification SET FRONT PANEL CONTROLS AS FOLLOWS GATE OPEN WAVEFORM n COUNTER INPUT LINE CONNECT TO PIN 4 O N FRONT EDGE TEST FIXTURE GROUND FROM INPUT BNC CONNECT TO PIN 18 O N FRONT EDGE TEST FIXTURE SAMPLE RATE HOLD 7 Table 6 4b 5328 Universal Counter Settings SET FRONT PANEL CONTROLS AS FOLLOWS FUNCTION START A FREQ RESOLUTION N 1MHz 1 SAMPLE RATE HOLD Use ...

Page 246: ... Initiallumper and Switch Settings Multi Axis Switch settings are similar for more than two axes MULTIPLE AXISTEST INSTRUCTIONS With 10763 cards jumpered correctly the system can be initialized for testing by sending a start pulse to the front edge of each 10763 card by physically moving the test fixture to each card and applying the pulse Each successive start pulse should result in the preset nu...

Page 247: ...ulse Output Check I all switches down DEADPATH SWITCH S E T UP Only Switch Set 0 1 2 3 4 5 6 I A QUAD 0 OUTPUTCOUNT CHECK Jumper10763for A Quad 6 output pulses The number of countsdetected by the frequency counter can then be multiplied by four to obtain the total number of representativeA Quad 6 output counts ENGLISH UNITS 1 6MHz output 800kHz output 175 f10 260 f10 5280 f15 10460 f 10 10372 f15 ...

Page 248: ...nd U2 8 to ground using E Z mini test hook or equivalent toenable tri state output buffers Compare signal levels with those given on chart Table 6 4f If signal levels do not correspond check BCD input lines Table 6 4g Table 6 4f Compensation Interface Output OUTPUT LINES THUMBWHEEL SWITCH SETTING 000 0 876 5 212 1 U8 pins 7 5 3 9 1 1 1 3 0 1 1 0 1 1 1 0 0 1 0 0 0 1 1 1 0 1 Table 6 4g Compensation ...

Page 249: ...epresentation of the number that is read on the frequency counter within a 1 tolerance Table 6 4i 10767 Output Buffer Check U51 plns 7 6 2 3 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 U42 plns 7 6 2 3 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 U52 pins 7 6 2 3 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 1 constantly changing 10763 Sw tches and Jumpers 1 6MHz Inch 800KHz 1 6MHz metric 800KHz Inch 1 6MHz U43 plns 7 6 2 3 0 0 0 1 0...

Page 250: ...TICS PROCEDURE 1 If the laser head does not emit red light check that the rear panel POWER ON light is lit If it is not check for a power line short This can cause the power supply to current limit and re duce the voltage output level to near zero volts Also check for an open circuit in the power supply wiring If the POWER ON light is lit check the status of the four rear panelindicators associate...

Page 251: ... capital letters vs lower case letters that are explained in the calculator documentation Data flow within the system is illustrated in Section IV A 3 Programming with the HP 9830A Programming the Laser Transducer System using an HP 9830A is similar to programming with the HP 9825A in the sense that the instructions for the coupler cards are the same However since a different level language is use...

Page 252: ...ample X and Y 2 X Transfer X to 10745 30 convert to BCD Output to Variable X Subtract 16 counts extended resolution convert to inches 6 23E 6 and correct for VOL and material temp C 165 if not status request Set A 0 if X Axis error Status request See HP IB Calculator manual for programming details Subroutine 400 processes the status request Output X to display calculator to output display to liste...

Page 253: ...10 840 RETURN 900 IF A 0THEN 920 910 X X 2t28 10 6 23023Ea 928 IF A l THEN 940 930 Y Y 2t28 6 23023E 06 C 940 RETURN 950 END End serial poll Overflow only clear error on HP IB as overflow can clear itself STATUS BYTE Vol Over Over Meas Ref SRQ I 1 Flow Range Error Error 6 5 4 3 2 1 BIT Strip off Bits 5 6 and 7 Handle Overflow Overflow Strip off Bit 4 Subroutine 900 D l Strip off Bit 3 Vol Error D ...

Page 254: ... 80 Y 0 X is X Axis destination in millimetres Y is Y Axis destination in millimetres 90 DlSP Y DESTINATION IN MM 95 INPUT Y I 100OUTPUT 2 5 157 252 I157 2V sends 2V sample compensator reading 252 3P prepare to output IN is a subroutine which inputs the number and places it in variable B C Compensation Number Convert X to fringes IX Destination in fringes I160A Y 170GOSUB 3000 Convert Y to fringes...

Page 255: ...he number from the 10746A Card Store Y location in R4 If X and Y are within tolerance get another destination m if not resample Read in bits 31 24 and complement bits if bits 31 28 are all 1 s go to error checking routine Read in bits 23 16 and complement Read in bits 15 8 and complement Read in bits 7 0 and complement D contains bits 31 28 decimal point information B1 bits 27 24 Apply proper weig...

Page 256: ...T X AXIS ERROR 5020 IF F l THEN 5040 5030 PRINT Y AXIS ERROR 5040 DlSP GO TO GAGE 5050 STOP 5060 G O T 0 10 5070 END Read in bits 31 24 Read in bits 23 16 Read in bits 15 8 Read in bits 7 0 D contains bits 31 28 decimai point information B1 Bits 27 24 Apply proper weighting 2 D applies decimal point Correct for overflow really underflow Return as this is recoverable error Conversion to fringes 400...

Page 257: ... through 5 11 show interconnecting information Figures C 1 through C 18 show photos of the cables identify the connector markings and give the pin numbers and corresponding wire color codes For cable fabrication instructions for systems prior to series prefix 1948A refer to Appendix E BACKDATING ...

Page 258: ...4 PIN CONNECTOR HP PIN 1251 3447 ...

Page 259: ...3452 Rear View 2 Male 1 Male WHT REF BLK REF 4 Female bT RNlGRA 4 PIN CONNECTOR HP P N 1251 3450 Rear View LARGE K F V 7 PIN D YHT REF GND PIN B WHTIGRA PIN C BLK REF LENGTH 20 METRES 65 FT I Figure C 2 05501 60008 Reference Cable ...

Page 260: ... 1251 3452 2 Male Rear View 1 Ma cr 5 3 Female 4 Female x LENGTH 20 METRES 65 FT Figure C 3 70780 60003 Power and Measurement Cable COLOR BLK WHT WHTIGRNIGRY WHTIGRY INNER SHIELD OUTER SHIELD CONN A AND B 1 2 4 3 SHELL SHELL ...

Page 261: ...LENGTH 2 29 METRES 7 5 FT Figure C 4 10708 60001 Primary Power Cable ...

Page 262: ... 13 WHT ORN 17 14 WHT YEL 24 15 WHT GRN 48 16 WHT ELU 43 23 AA WHT VIO 8 24 BE SHIELD 3 10 28 35 36 CONN A COLOR CONN B PIN NO PIN NO A WHT BLK BRN 14 B WHT BLK RED 13 C WHT ELK ORN 12 D WHT ELK YEL 32 E WHT ELK GRN 16 F WHT BLK ELU 29 H WHT BLK VIO 30 J WHT BLK GRA 31 K WHT ERN RED 34 L WHT ERN ORN 33 M WHT ERN YEL 15 LENGTH 4 57 METRES 15 FT Figure C 5 70772 60007 Signal and Power Cable ...

Page 263: ...A BB COLOR BLK ERN RED ORN YEL GRN BLU VIO WHT BLK WHT BRN WHT RED WHT ORN WHT YEL WHT GRN WHT BLU WHT VIO NC NC NC NC WHT BLK RED WHT GRA GRA COLOR WHT BRN RED WHT BRN ORN WHT BRN YEL WHT BRN GRN WHT RED ORN WHT RED YEL WHT RED GRN WHT RED BLU WHT ORN YEL WHT ORN GRN WHT ORN BLU WHT ORN VIO WHT YEL GRN WHT Y EL BLU WHT Y EL VIO WHT YEL GRA NC NC NC NC NC NC NC NC 24 WHT INTER 23 1 BARE WIRE ...

Page 264: ...LENGTH 1 52 METRES 5 FT I Figure C 7 10740 60004Power Cable e C 8 Q j Ls 2 L k ...

Page 265: ...Figure C 8 70740 60005Power Cable ...

Page 266: ...CONNECTOR A I SIGNAL Dl01 Dl02 Dl03 Dl04 Dl05 Dl06 Dl07 Dl08 EOI DAV NRFD NDAC IFC SRQ ATN CBL SHLD REN SIG GND LENGTH 3 66 METRES 12 FT Figure C 9 59370 60002 Interface Cable ...

Page 267: ...e 1 Male 3 Female 4 Female WHTIGRA WHTIGRNIGRA 4 PIN CONNECTOR HP P N 1251 3451 4 PIN CONNECTOR HP PIN 1251 3452 CONNECTOR D WIRING CABLE WHT BLK GRA zi SHIELD SHIELD L 2 Z 24 BB w r z i B 18 U LOX 21 19 NC 1 C 12 13 21 19 NC NC LENGTH 2 EACH 0 46 METRE 1 112 FT 1 EACH 0 3 METRE 1 FT Figure C 10 70760 60002 Reference Cable ...

Page 268: ...HT BUN RED WHT BRN ORN WHT BUN YEL WHT ERN GRN WHT ORN WHT BLK BRN CONN A 17 18 T L W P R s 12 X Y BARE WIRES N CONNECTOR IN 5060 8339 LENGTH 1 EACH 0 9 METRES 3 FT 2 EACH 4 57 METRES 15 FT CABLE B TO CONN A COLOR I PIN NO WHT 2 SHIELD 1 BLK I I I CABLE C TO CONN A I COLOR PIN NO SHIELD Figure C 77 70763 60002 Controller Interface Cable ...

Page 269: ... C AND D WIRING Rear View CONNECTOR A WIRING WHT WHT GRA INNER OUTER GRA GRN SHIELD SHIELD 22 Z 24 BB 21 23 17 17 C 18 V 20 X 21 23 NC NC D 14 R 16 T 21 23 NC NC E 12 13 21 23 NC NC Connect shields with 22 GA insulated jumper Figure C 72 70764 60005 Reference and Doppler Cable ...

Page 270: ...1 B LENGTH 1 EACH 0 3 METRES 1 FT 2 EACH 0 46 METRES 1 112 FT Figure C 73 70787 60003 Reference and Doppler Cable 1 L C 14 PIN A 3 C D E F G H J K L M N P R S T U WIREIFROM CONN BOTH SHIELDSIB BLKIB WHTIB WHT GRAIB WHTID WHT GRAID N C WHT GRAIC BLKIC WHTIC N C WHT GRN GRAIC WHT GRN GRAIB N C BLKID N C N C WHT GRN GRAID HOOK SHIELDS OF WIRE FROM CONN B TO CONN A PIN A WITH 22 GAUGE INSULATED WIRE ...

Page 271: ...RED WIRE PIN D BLK WIRE PIN A 18 PIN CONNECTOR HP PIN 1251 2797 LENGTH 4 57 METRES 15 FT Figure C 74 10787 60004 Power Cable ...

Page 272: ...Figure C 75 70783 60003 Power Cable LENGTH 4 57 METRES 15 FT ...

Page 273: ... 10 WHTIBLKIRED 23 a 0 M 11 WHT BLK ORN 49 N 12 WHTIBLKIYEL 42 P 13 WHTIBLKIGRN 17 LT W R 14 WHTIBLKIBLU 24 a I S 15 WHTIBLKIVIO 48 2 T 16 WHTIBRNIRED 43 U 17 V 18 WHTIBRNIYE L W 19 WHTIBLU X 20 BLU Y 21 ORN 9CONNECTOR C WHTJORN SAME COLOR 2 22 SAME PINS AA WHTIBRN WHT BRNlGRN 3 EmN WHTIBRNIBLU 10 28 35 LENGTH ONNECT BRAID TO AA AND BE HIS END ONLY 3 METRE 1 FT 4 57 METRES 15 FT Figure C 76 59995 ...

Page 274: ...D PAlR WlTH 6 P I 0 TWISTED PAlR WlTH 7 ISHOULD BE GROUNDED P I 0 TWISTED PAlR WlTH 8 NEAR TERMINATION OF OTHER WIRE P I 0 TWISTED PAlR WlTH 9 oFT W I S PAIR P I 0 TWISTED PAlR WlTH 10 P I 0 TWISTED PAIR WITH 11 i 1 1 SIGNAL GROUND LENGTH 9 METRE 3 FT 1 83 METRES 6 FT 3 66 METRES 12 F Figure C 77 10637A B C HP IB Cables ...

Page 275: ...b HP P N 1251 3447 LENGTH 20 METRES 65 FT RED WlRE PIN A YEL WlRE PIN D BLK WlRE PIN B Figure C 78 70774 60003 ower Cable ...

Page 276: ...Expansion Coefficients For your convenience Table 0 7 provides the linear thermal expansion coefficients of the most frequently used metals and alloys ...

Page 277: ...ass 80 Cartridge Brass 70 Yellow Brass Muntz Metal Leaded Commercial Bronze Low Leaded Brass Medium Leaded Brass High Leaded Brass Extra High Leaded Brass Free Cutting Brass Leaded Muntz Metal Forging Brass Architectural Bronze Inhibited Admiralty Naval Brass Leaded Naval Brass Manganese Bronze A Phosphorous Bronze 5 A Phosphorous Bronze 8 C Phosphorous Bronze 10 D Phosphorous Bronze 1 25 Free Cut...

Page 278: ...5 5 5 7 5 8 5 8 6 5 5 6 5 6 5 6 5 9 Coefficient Expansion PPm O C 19 8 17 0 17 0 of P P O F 11 0 9 5 9 5 9 0 6 5 6 5 6 5 6 3 6 0 5 6 to1 1 10 0 5 6 5 5 9 2 6 2 5 7 6 7 16 3 16 0 14 8 13 0 16 1 15 5 15 2 14 9 14 7 10 9 13 4 14 1 14 1 14 6 14 5 14 1 14 9 15 1 15 1 14 6 14 6 14 6 14 5 14 5 14 5 14 5 14 6 Aluminum Bronze Alloys9C 9D lron and lron Alloys Pure lron Fe C Alloys 0 06 C 0 22 C 0 40 C 0 56 ...

Page 279: ... 0 08 Pb 32 5 03 Pb 0 3 Cd 33 9 Rolled Zinc Alloy 1 Cu 0 010 Mg 34 8 Zn Cu Ti Alloy 0 8 Cu 0 15 Ti 1 24 9 Pure Metals Beryllium Cadmium Calcium Chromium n Coefficientsof MetalsandAlloy Alloy Cobalt Gold Iridium Lithium Manganese Palladium Platinum Rhenium Rhodium Ruthenium Silicon Silver Tungsten Vandium Zirconium With the grain 23 4 across tl With the grain 21 1 across tl With the grain 19 4 acro...

Page 280: ...orresponding new model numbers For calculator based systems the calculators and accessories are no longer available a s options to the 5501 system but may be ordered directly by model number Included in this backdating section is the Calculator Interface Electronics Checkout procedure Systems ordered after December 31 1979 are supplied with all necessarycables fully assembled Older systems require...

Page 281: ...us HP IB conipat ble controller Configured for two axes of measurement wlth manual compensat on nputAddl tlonal capab l tles can be selected from optlons below DESCRIPTION Addttlonal Measurement axes for Optlons 250 and 251 Can only be ordered when Optlons 250 and 251 are ordered Numeric Display for Opt ons 250 and 251 Automatic Compensation for Opt ons 250 and 251 Also deletes 10756A Manual Compe...

Page 282: ...ounter 10763 Engllsh Metrlc Pulse Output C10 5510 Automatic Compensator 5501A Optlon 020 15V Power Supply 5501A Optlon 018 5V Power Supply CONSIDERATIONS Speclfy cable length between the 5501A Laser Transducer and the Interface Electronics One cable requlred per measurement system Maxlmum cable length of 20 m 65 ft Speclfy cable length between each 10780A Recelver and the Interface Electrontcs One...

Page 283: ...A H05 5510A K15 5510A 305 59995A 307 59995A 312 59995A 317 59995A C19 59995A K14 59995A K32 59995A K70 59995A Following is the checkout procedure as removed from Section 5 The Diagnostic Cassette P N 05501 10001 is no longer supplied Output Current 3 0A Ea Side 3 OA Ea Side 8 OA 16 OA 60 OA 8 OA 16 OA 60 OA New Model No 5510A Option 010 1 5510A 1 10563A Option 001 Obsolete 10780 60003 and 05501 60...

Page 284: ...ansducer Option 250 are contained in acassette tape for the 9825A Calculator There are several programs stored on the cassette which are used for testing the Calculator lnterface Electronics The file locations for each program are listed below File Number Program 0 Test Configuration Program seeFigure 5 72 1 Test Program see Figure 5 73 2 Storage File 3 Blank 4 Test Configuration Program Duplicati...

Page 285: ...INITIALIZE BUS HP 18 INITIALIZE I VARIABLES r CONFIGURE L TlnN NTER Y 2 A B C ARAMETERS IN THE AME MANNER GO TO TEST PROGRAM Figure 5 72 Test ConfigurationProgram Flowchart ...

Page 286: ...1 TO Y AXIS C AXES ARE VERY SIMILAR DISPLAY X IN PROPER UNITS I PRINT X IN PROPER UNITS ...

Page 287: ...xis if it was requested independently Lines 22 and lnput the X axis information 23 Line 25 Line 26 Line 28 Line 29 Goes out and does a status check to see if there are any errors on the X axis measurement or reference channel or if an overload has taken place Takes care of the offset When the counter cards are preset they either go to 160 or to 16 0 The subroutine converts the number to the approp...

Page 288: ...ay 1 Display 1 Display X 3 0 No Printout A 3 0 No Printout 1Printout 1Printout Y AXIS B AXIS Y l 1Normal Resolution B l 1 Normal Resolution 10ExtendedResolution 10ExtendedResolution Y 2 0 No Display B 2 0 No Display 1Display 1 Display Y 3 0 No Printout B 3 0 No Printout 1 Printout 1Printout Z AXIS C AXIS Z l 1Normal Resolution C l 1 Normal Resolution 10ExtendedResolution 10ExtendedResolution Z 2 0...

Page 289: ...references to the foot pedal if one is not supplied with your system To print an axis press f for X f for Y f for Z f for A f for B f for C X will be printed out Y will be printed out Z will be printed out A will be printed out B will be printed out C will be printed out I o checkout the system after it is running perform the following steps a Verify that the two LED indicators on the lower front ...

Page 290: ...eratureprobes are being used make sure the appropriate sensor switches are lighted TI T2 T3 The 9825A Calculator display will now be showing the total velocity of light compensation number in the following format The 0 999 portion is hardwired and the Automatic Compensator computes the XYZT portion i e 0 999 7325 This total compensation number includes air temperature humidity air pressure and the...

Page 291: ...itch to the TEMP COEF position The number 999XYZT will be displayed but is interpreted as YZ T parts per million i e 9990062 6 2 ppm E 4 CABLE FABRICATION Following is information supplied with older systems prior to series prefix 1948A to fabricate the required cables ITEM I U ITEM 3 Figure E 7 Typical Reference Measurernent Cable Wiring ITEM 1 2 3 4 QTY 3 1 3 4 DESCRIPTION CONNECTOR 48 PIN KIT C...

Page 292: ...c No Duet e m two 26 twistad pair wDthin inner shieM two 22 HP Pert No 1261 3050 C O W B S A vc wiraa hrefyfhiogendorad by a m insulatedshield or eauirdent CABLE SIDEVlEW DIAGNOSTICS HP Part No 1251 2797 POWER HPSpec No Th 20 wbm HPPat NO 1251 7 C07 JBggSA or 0qU walent NOTE DIMENSIONSI N INCHES CMI Figure E 2 5507A Laser Transducer Interconnecting Plugs HP Spec No C0859995A or equivalent Sixteen ...

Page 293: ...ELD 1251 3450 1 INNER SHIELD INSULATED FROM OUTER SHIELD 2 NEITHER SHIELD ISCONNECTEDTO EQUIPMENT RED EXTERNAL CO7 59995A YEL SYSCOM OWE CABLE OR EQUIV DIAGNOSTICS I SYSTEM PLUG 1251 2797 7 15V TEST 15V TEST 5 TEST SYS COM RETUNE CMD F TUNE FAILURE G f NOT USED H i NOT USED RETUNE STATUS LASER CURRENT STATUS LASER STATUS IMONTEST USER STATUS C08 59996A HP 8120 0181 CABLE OR EQUIV CABLE OR N t f PZ...

Page 294: ...SINGTHE TWISTEDPAIR AND POWER LEADS 0 INNER INNER OUTER TWISTED A SLIP CABLE THROUGH CABLE CLAMB B COMB FLAIR OUTOUTER SHIELD C STRIP OFF 518 INCHES116MMI OF INNER INSULATION SO THAT THE OUTER OWE AND INNER INSULATIONSARE THE SAME LEADS LENGTH D STRIP OFF 114 INCHES 6 MM OF TWISTED INNERSHIELD SO THAT INNER AND OUTER PAIRS SHIELD ARE THE SAME LENGTH E COMB OUT AND MESH INNER AND OUTER SHIELDS POWE...

Page 295: ...TED PAlR LEADS TO THE MALE PlNS AND THE POWER LEADS TO THE FEMALE PINS D INSERT PlNS INTO PIN BRACE MALE PlNS ON TOP AND PROTRUDING FEMALE PlNS ON THE BOTTOM ENSURE THAT THE INSERTED PIN CONFIGURATION CONFORMS TO REAR VlEW ILLUSTRATION CABLE CLAMP A COMB INNER AND OUTER SHIELD OVER SHIELD CLAMP B INSERT ASSEMBLED CABLE INTO BARREL C SCREW CABLE CLAMP INTO BARREL D CHECK PlNS TO ASCERTAIN THAT NO S...

Page 296: ...UG BODY 4 FUSED 15V AND 15V RET MAY BE SUPPLIED BY 5501A OR AN APPROPRIATE 15V POWER SUPPLY 5 REFER TO 10780A MANUAL FOR DETAILED 10780A PLUG WIRING INSTRUCTIONS 6 DO NOT USE SHIELD AS 15 RETURN LINE Figure E 5 70780A Receiver Rear Panel Wiring CABLE SPEC NO C07 59995A lC21 59995A FOR FACTORY CONFIGURED SYSTEMS TO 5501A LASER HEAD YEL F R O M SUPPLY f15V POWER CONNECTOR SYS f SHIELD CONNECTED TO C...

Page 297: ...IS CABLE REQUIRED ONLY IF 5501A OPTION 402 5510A AUTO MATIC COMPENSATOR IS USED CABLE SPEC NO C17 59995A 30MMON WHT SHIELD CONNECTED AT POWER SUPPLY END NO CONNECTION AT COUPLER END NOTE t 5 V RET AND k15V RET SHOULD BE CONNECTED TOGETHER AT POWER SUPPLIES Figure E 7 5 Volt and k75 Volt Power Cable Wiring Diagram ...

Page 298: ...ED AS EITHER BIDIRECTIONAL OR UNIDIRECTIONAL LINES BETWEEN THE 10746A BINARY INTERFACE AND THE SYSTEM CONTROLLER IF USED AS BIDIRECTIONAL LINES KEEP IN MIND THAT IT IS HALF DUPLEX OPERATION I E YOU MUST SEND OR RECEIVE SEPARATELY ALSO PlNS 9 THRU 16 AND K THRU T NEED NOT BE CONNECTED IP USED AS UNIDIRECTIONAL LINES THEN PlNS 1 THRU 8 AND A THRU J ARE THE OUTPUTS TO THE SYSTEM CONTROLLER AND PlNS 9...

Page 299: ...ALLOW EACH CIRCUIT BOARD TO BE USED WITH AN EXTENDER BOARD 15FOOTI 21 svs COmoN INNER AND OUTER SHIELDS CONNECTED TO t o m COUNTER HP SPEC NO WARD EDGE CONNECTOR C06 69996A Y AXIS IC20 69996A FOR FACTORY 1251 3462 CONNECTIONSFOR ADDITIONAL MEASUREMENT AXES ARE IDENTICAL TO THOSE SHOWN ABOVE I I I I 7 I I __ V ...

Page 300: ...8 9 Bit 7 8 Bit 6 7 Bit 5 6 Bit 4 5 Bit 3 4 Bit 2 3 Bit 1 2 Bit 0 1 Device Command 22 Z Device Flag 23 AA All Signals Return 24 BB For 125668 jumpering see 10746A PIN From Computer 12566B T Bit 15 S Bit 14 R Bit 13 P Bit 12 N Bit 1 1 M Bit 10 L Bit9 K Bit 8 16 Bit 7 15 Bit 6 14 Bit 5 13 Bit 4 12 Bit 3 11 Bit 2 10 Bit 1 9 Bit 0 To Computer 12566B J Bit 15 H Bit 14 F Bit 13 E Bit 12 D Bit 1 1 C Bit ...

Page 301: ... TO EXTERNAL DIGITAL TO ANALOG CONVERTER TO 10762A CONTROL SYSTEM ZERO SPEED NOT USED IF 10764A FAST PULSE CONVERTER IS CONNECTED 4 6 Figure E 70 70762A Comparator Interface Hood Connector Wiring ...

Page 302: ...VER 1 20 X I REFERENCE I SHIELD GROUND 21 I I 14 R I I 16 T 2 I I I I 22 3 REFERENCE FROM LASER HEAD I 24 BB I REPRODUCED 12 TO REFERENCE I 10764A 13 FAST PULSE I IF USED 9 REPRODUCED MEASUREMENT I 10 1 TO 10764A FAST PULSE CONVERTER BOARD EDGE CONNECTOR SEE FIGURF C 17 FOR REFERENCE AND MEASUREMENTSIGNAL LINES SHIELD GROUNDING ...

Page 303: ...RODUCED ADDITIONAL REFERENCE 2 107648 SIGNAL FAST PULSE REPRODUCED MEASUREMENT 2 IF USED SIGNAL REPRODUCED MEASUREMENT 1 SIGNAL SEE FIGURE C 17 FOR REFERENCE AND MEASUREMENT SIGNAL LINES SHIELD GROUNDING NOTE Grounds available at J1 are to be used only for cable shields grounded at one end 1 2 1 I 1 18 V I I 20 X I I 2 1 I I 14 R I 16 I T I I I I 22 t I 24 BE J K 12 1 3 9 10 F H i TO 10764A FAST P...

Page 304: ...ASER HEAD 24 88 17SYSTEM COMMON 23 15V 18 V MEASURE 1 HP SPEC NO 20 x K S E 1 C05 59995A FUSED 16V4 14 R MEASURE 2 TO 107608 FAST HP SPEC NO 16 T 2 PULSE CONVERTER BOARD EDGE C05 S9995A CONNECTOR J REF 1 HP SPEC NO K R E F l REPLICATED C05 59895A 12 REF 2 SIGNALS 13 REF 2 F MEASURE 1 iiGsEi REPLICATED SIGNALS 9 MEASURE 2 10MEASURE 2 I ...

Page 305: ...0783A Numeric Display Power Cable Wiring STRIP 1 TYP NOTE CUT FEMALE END OFF ITEM QTY DESCRIPTION PART NO I I I 1 1 POWER CORD 8120 1378 2 3 TERMINAL CRIMP RED 0360 0054 22 16 4 6 3 1 1 I SHRINK TUBING ELK 314 1 0890 0057 1 Figure E 14 Power Supply Line Cord ...

Page 306: ... unit manual for recommended termination of twisted pair cables ITEM QTY DESCRIPTION PART NO 1 1 2 CABLE 21 COND SHD 8120 0181 2 2 3 CABLE 8 COND SHD 8120 1263 3 6 15 CABLE 2 COND SHD 812 0 9 7 4 1 CONNECTOR 19 PIN 1251 4584 MATE 12514583 5 3 CONNECTOR 48 PIN KIT 5060 8339 ...

Page 307: ...HT 17 L WHT BLK BRN Y WHT BLK 18 R M WHT BLK RED Z RED T N WHT BLK GRN AA GRN L P WHT BLK VIO BB VIO W R BRN 20 BRN 20 BRN 17 S ORN 21 ORN 21 ORN 18 R T YEL 22 YEL 22 YEL T U BLU 23 BLU 23 BLU L V WHT BRN 24 WHT BRN 24 WHT BRN W NC SHIELD V SHIELD V SHIELD V CONN B ONLY CONN C ONLY CABLES J TO CONN A CABLES K TO CONN B CABLES L TO CONN C 6 WHT 7 SHIELD 8 BLK Figure E 15 Control and Output Cable Wi...

Page 308: ... 2 SYS W M PROVIDESPOWER RETURN FOR W ONLY TABLE C 10781AWIRING 3 FUSEDt16V RET NOTCONNECTEDTO SYSCOM 4 OUTPUT SIGNAL SHIELDSARE NOT CONNECTED 5 DUPLICATED OUTPUTS DENOTED BY AN A FOLLOWINGSIGNAL NAME E G REF A ISDUPLICATEDOUTPUT QNLY DUPLICATEDOUTPUTSIGNALS MAY BE USEDTO DRIVE OTHER DO NOTJUMPER INPUT SIGNAL LINES FOR OTHER AXES EXAMPLE FOR SECOND AXIS USE REF A R T F A DUPLICATEDSIGNALS NOT AND ...

Page 309: ...r or computer end of the interconnecting cable Figure E 77shows details of cable fabrication The procedure for wiring the 48 pin connector is a s follows a Insert the appropriate cables into the connector hood See the figures referencedfrom the individual boards to determine cable requirements b Strip the outer jacket of the cables back far enough to makethe necessaryconnections c Connect individu...

Page 310: ...IPTION CONNECTOR HOOD SELF TAPPING SCREW A MOUNTING BLOCK SELF TAPPING SCREW B PAN HEAD SCREW 4 40 x 562 HEX NUT 440 x 187 CONNECTOR 48 PIN CABLECLAMP SET SCREW CABLE PART NO 5040 6071 0624 0098 5040 6072 0624 0098 2200 0091 2260 0002 1251 0335 5040 6003 OR 5040 6004 3030 0143 SEE REFERENCED FIGURES ...

Page 311: ...HIELD GROUNDED ON OTHER ENDONLY MEAS 1 SHIELDED TWISTED PAIR SHIELD GROUNDED ON OTHER END ONLY REF SHIELDED TWISTED PAIR SHIELD GROUNDED ON THIS END ONLY MEAS SIGNAL RCVR 1 FROM RCVR 2 Figure E 78 C o n n e c t o r Wiring for Fast Pulse Converter ...

Page 312: ...Manual Part No 05501 90021 HEWLETT PACKARD Printedin U S A ...

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