HIGH RESOLUTION FIELD EMISSION
SCANNING ELECTRON MICROSCOPE: HITACHI S-4800
BEAM ALIGNMENT PROCEDURE
1.
Set V
acc
and I
e
to desired value.
2.
Move stage to desired working distance with
Z
manual knob on sample chamber.
The distance is in mm; this is the distance between the pole piece and the sample
surface.
3.
Under the
SEM
tab in the software interface, set
WD
(working distance).
4.
Select focus mode
UHR
.
5.
Press
F2
on the keyboard while the cursor is over the view window to degauss the
objective lens. This should be done every time focus is greatly changed (by changing
working distance), or V
acc
or I
e
are changed.
6.
Adjust
FOCUS
/
BRIGHTNESS
/
CONTRAST
knobs to obtain the best image
possible.
7.
Check that I
e
has not dropped from selected value. If it has, press
SET
.
8.
Click
Align
button along top row of screen to open align dialog box.
Note: In general you want to align the beam at twice the magnification that you will
be using for your images.
9.
Align beam:
a.
Click the
Beam Align
radio button.
b.
Adjust
BRIGHTNESS
/
CONTRAST
knobs to obtain a clear disc. Use
STIGMA/ALIGNMENT
knobs
X
and
Y
to center disc on the target.
10.
Align aperture:
a.
Click the
Aperture Align
radio button.
b.
Use
STIGMA/ALIGNMENT
knobs
X
and
Y
to minimize motion in image.
11.
Align Stigma Align.X and Stigma Align.Y:
a.
Click the
Stigma Align.X
radio button.
b.
Use
STIGMA/ALIGNMENT
knobs
X
and
Y
to minimize motion in image.
c.
Repeat for
Stigma Align.Y
radio button.
12.
Select
Off
radio button to turn off alignment functions.
