Hioki RM2610, Instruction Manual

Page: 59 / 138

55
Choosing the Unit for Composite Layer Resistance
4.4 Choosing the Unit for Composite Layer
Resistance
You can set the unit used to measure composite layer resistance to either Volume resistivity [
Ω
cm]
or Surface resistivity [ Ω
cm^2
] .
1
2
3
4
1
Choose [Settings] .
2
Choose [Measurement] .
3
Choose one of the following settings for [Composite layer unit] :
Volume resistivity [
Ω
cm]

Output the composite layer resistivity as volume resistivity [
Ω
cm].
Use this setting when calculating material properties.
Surface resistivity [
Ω
cm^2] Output the composite layer resistivity as surface resistivity [
Ω
cm
2
].
Use this setting when comparing the interface resistance [
Ω
cm
2
] and
resistance.
Comparing the interface resistance [
Ω
cm
2
] and resistance (p. 99, p. 100)
Formula:
Composite layer volume resistivity [
Ω
cm] × composite layer thickness [cm]
4
Click [Apply] or [OK] to accept the settings. (Clicking [OK] will cause you to return to the
main screen.)
Both the composite layer volume resistivity [
Ω
cm] and surface resistivity [
Ω
cm
2
] will be
output to the analysis results file.
4
Customizing Measurement Conditions