HE 5750 Operating Instructions
#371627 | Version 1.1
49
9.5.1 Parameter description (parameter groups 7-12)
Parameter
Description
7 Chamber control
Online
:
In the Online mode the chambers are cleaned with opened raw gas and
pure gas dampers.
Offline
:
Only entire chambers are cleaned in the Offline mode. Therefore, the
raw gas dampers and / or pure gas dampers are closed before cleaning
and are afterwards opened (
parameter 7.6 Damper offline cleaning)
.
7.1 Raw gas dampers / chamber
Number of raw gas dampers per chamber.
7.2 Pure gas dampers / chamber
Number of pure gas dampers per chamber.
7.3 Chamber cleaning (level)
(Function not implemented)
Signal level for the input for chamber isolation 0=low 2= high
7.4 Chamber output (level)
Signal level for closing the dampers
(Pure gas dampers / raw gas dampers)
0=low
1=high
7.5 Damper limit level
The signal level by which the dampers report their limit level.
High: the limit level of the damper is reported with high level (+24 V).
0=low
1=high
7.6 Damper Offline Cleaning
For the Offline cleaning the closed damper can be selected. This may be
the raw gas or the pure gas damper or both.
7.7 Semi-Offline-Cleaning
Note!
To guarantee the Semi-Offline cleaning, the following
conditions must be fulfilled:
The first and second Slave must have the
same amount of valves assigned. One
additional valve may be assigned to the first
Slave.
The amount of valves in the first manifold must
be equal to the amount of valves in the first
manifold on the second Slave. Valve in 1.
Manifold = valve in 1. manifold Sl.2)
Depending on the wiring of the isolation valves at the local pressure
manifolds.
1 Virtual Semi-Offline - Mode
2. True Semi-Offline - Mode
