Programming and Operation
3-14
P/N 8040406
C
HELIX TECHNOLOGY CORPORATION
-
TI
CRYOGENICS
Delay Restart
The third parameter of the REGEN function allows you to delay the restart
of the Full regeneration cycle, if desired. Once the time delay has expired,
the cryopump is roughed out again (if applicable) and is cooled down. The
Delay Restart display is shown in Figure 3-14.
Figure 3-14: Delay Restart Display
Fast Rough Test
The fourth parameter of the REGEN function allows you to determine the
fast rough test time which checks to see whether or not Argon has been
eliminated from the cryopump during a Fast regeneration as shown in
Figure 3-15. If during the rough test, the pressure does not drop below
1000 microns, before the fast rough time has expired, then the cryopump
will automatically go into a repurge cycle.
NOTE: In the case of implanters, the pump typically will not contain liquid
cryogens and therefore will not have to repurge to boil off the liquid. If an
implanter pump fails the fast rough test, the pump will automatically go
back into the fast rough test cycle.
Figure 3-15: Fast Rough Test Display
Last
Next
Clear
MONITOR
REGEN
SERVICE
CONTROL
RELAYS
HELP
oo
ON
-BOARD
®
Enter
1
2
3
4
5
6
7
8
9
-
0
.
DLY RESTART 20.5 HRS.
Last
Next
Clear
MONITOR
REGEN
SERVICE
CONTROL
RELAYS
HELP
oo
ON
-BOARD
®
Enter
1
2
3
4
5
6
7
8
9
-
0
.
150 SEC FAST ROUGH TEST
