GE ArcamEBM Spectra H, Installation Manual

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7
Installation
7 7..6 6..1 10 0 C Ch he ecckk T Th he e C Ciirrccu uiitt F Fllo ow wss
1. Turbo pump circuit
2. Z-actuator circuit
3. Heat exchanger circuits
1. Check the flow of the circuits:
• Chamber cabinet heat exchanger circuit: 2 2..5 5 ll//
m miin n (1.0 to 3.5)
• Control cabinet heat exchanger circuit: 2 2..5 5 ll//m miin n
(1.0 to 3.5)
• Turbo pumps circuit: 1 1..5 5 ll//m miin n (0.6 to 2.4)
• Z-actuator feedthrough circuit: 1 1..0 0 tto o 1 1..5 5 ll//m miin n
2. If necessary, adjust the flow.
3. Check and adjust the column circuit flow switch to
trigger the alarm at a flow less than 0 0..5 5 ll//m miin n.
1. Shut-off valve
2. Internal shuttle
3. Switch position
4. Turn off the cooling media supply with the shut-off
valve (1) while monitoring the internal shuttle (2) in
the flow switch. The position (3) of the switch can
be moved to adjust the switch point.
5. Verify that a warning appears in EBM control when
the flow is too low.
80 01 IM-710429 en-GB