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Solarus 950 Owner’s Manual and User’s Guide
Maintenance
The turbo-molecular drag pump and diaphragm pumps require periodic mainte-
nance. Please see the individual operator manuals of these instruments (included
in the shipping crate) for instructions.
As the diaphragm pump ages, the rates at which it will pump H and O change by
different amounts. This will change the H/O partial pressure ratio during cleaning,
which can affect the plasma cleaning rate. Because of this, it is important to main-
tain the diaphragm pump properly.
Removing the Cabinet Covers
1.
Shut off the power to the system and unplug the power cord. The power
switch is located on the rear of the cabinet near the right side.
2.
Remove any plugs or holder-adapters from the front-entry ports.
