Solarus 950 Owner’s Manual and User’s Guide
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consistent, even as the impedance varies due to aging, odd sized samples, or
changes in gas pressure or species.
Vacuum/Gas Pumping
A two-stage variable-speed diaphragm pump (electronic speed control) backs a 70
liters/second turbo molecular drag pump.
Chamber
The chamber is 3.5” in diameter x 2.0” deep, and includes multiple entry ports. A
front viewing port displays plasma when activated. An inline electromagnetic
valve isolates the vacuum pump from the chamber, resulting in less than one
minute pump down and less than a ten-second vent cycle.
Mass Flow Controllers
Mass flow controllers accurately gauge gas levels to achieve superior and repeat-
able cleaning results.
Touch Screen User Interface
A touch screen interface to the Solarus 950 software offers one touch operation
through user-programmable recipes, providing greater flexibility and repeatability
than competitive products.
Simple Four-Step Cleaning
1.
Load a sample
, either from the front (TEM holders) or top (stand-alone
TEM/SEM samples)
2.
Select a recipe
for TEM, STEM, SEM or carbon film cleaning using either
H
2
/O
2
or Ar/O
2
plasma cleaning.
3.
Touch START
to begin the cleaning cycle.
4.
Touch VENT
to vent the chamber and permit sample removal.
