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Gatan 600 DUOMILL, Instruction Manual, Page: 1 / 70

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Summary of Contents for 600 DUOMILL

Page 1: ...uy your excess underutilized and idle equipment along with credit for buybacks and trade ins Custom engineering so your equipment works exactly as you specify Critical and expedited services Leasing R...

Page 2: ...rmany Gatan Singapore Tel 925 463 0200 http www gatan com Tel 089 352 374 Tel 65 235 0995 Fax 925 463 0204 info gatan com Fax 089 359 1642 Fax 65 235 8869 Gatan Inc USA help gatan com Gatan UK Nippon...

Page 3: ...Part number 600 82001...

Page 4: ...when failure to observe the instruction could result in per sonal injury Caution Used when failure to comply with the instruction could damage the equipment Note Used to highlight advice directed at...

Page 5: ......

Page 6: ...ecimen Viewing 8 4 9 Cleaning Specimen Viewing Windows 8 5 DETAILED OPERATING INSTRUCTIONS 9 5 1 Pre Start Up Check List 9 5 2 Start Up Procedure 9 5 3 Specimen Loading and Sputter Shield 9 5 4 Millin...

Page 7: ...Seals in the Whisperlok Mechanism 23 7 3 Cleaning the Whisperlok Aperture Assembly 23 7 4 Changing Cathodes and Insulators 24 7 5 Using the Airlock O Ring Lubrication Tool see Figure 7 5 24 7 6 Clean...

Page 8: ...the two ion milling stations when their gas supplies are turned on and off Four precision needle valves and four 2 way solenoid valves are provided to regulate the gas flow to each Octogun The gas sup...

Page 9: ...laced under the control of a Dual Laser AutoTerminator that senses a perforation in the specimen and automatically shuts off the ion beam to prevent further milling The AutoTerminator socket is shown...

Page 10: ...reases However the momentum transferred to the specimen correspondingly decreases and hence there is an optimum angle for maximum sputtering which typically is in the range 20 25 see Figure 2 1b The a...

Page 11: ...un current A graph showing typical specimen current values for various beam angles in the DuoMill is shown in Figure 2 1b The proportion of ions to neutrals produced by the Octoguns in the DuoMill has...

Page 12: ...m chamber d Unbolt and remove the wooden hold down bar extending across the front of the base e Remove the wooden lifting lever and the plywood spacers located on either side of the base f Use the lif...

Page 13: ...6 January 1999 Rev 1...

Page 14: ...ot recommended for low energy guns a Remove the gun mount rotation tool from its holder on the inside of the left hand door of the cabinet b Insert the tool into its socket on the circumference of the...

Page 15: ...nto the Airlock for close viewing it is not necessary to interfere with any of the beam controls Simply depress Raise on the Airlock switch and following inspection under vacuum depress Lower on the s...

Page 16: ...es or ribbons should be fixed to the specimen holder using two small 0 2 mm diameter beads of silver paint Speci men clamping plates are also available for curled specimens that need to be held flat d...

Page 17: ...the HV switch light comes on d Set the Process Timer by pressing its Start Stop button and depress the Up Arrow button to set the desired thin ning time e Press the Process Timer Start Stop button ag...

Page 18: ...ched sample chart Figure 5 5 which can be copied for your use Always change cathode holes in sequence 1 through 8 so that it is clear which ones are worn out 5 6 Specimen Examination a Depress Raise o...

Page 19: ...into their Airlocks d Rotate both High Voltage selector knobs to their neutral positions e Turn off Switch A if the DuoMill is not going to be used for more than a few days Both the diaphragm pump an...

Page 20: ...P switched on to operate the AutoTerminator WARNING As a safety precaution be sure that the laser shutter is closed see Figure 6 1b General Setup a Connect the laser assembly to one of the coaxial soc...

Page 21: ...tube is out of alignment see Section 6 1 5 If the digital meter reads 1400 proceed h Turn the sensitivity control fully counterclockwise essentially turning the sensitivity control off The digital rea...

Page 22: ...nsity is observed on the digital meter b Note the direction of deflection required to maximize the intensity since this will quickly indicate which screws must Loosen the four locking screws after rem...

Page 23: ...be longer than usual as explained above d Fill the dewar with liquid nitrogen and install it under the Whisperlok centering it relative to the end of the piston rod Place the Anti Icing collar over th...

Page 24: ...nutes when the ion guns have warmed to their equilibrium temperatures 6 5 Electronic Gas Flow Control EGC 6 5 1 Installation a Turn off the DuoMill close the main gas valve on the argon cylinder unplu...

Page 25: ...torr This is OK c Repeat this procedure for the other knob d Now turn on the valve and check TP 1 and TP 2 e Adjust the knobs until you can get the voltages to within 7 0 VDC of one another 6 5 5 Swi...

Page 26: ...cles of the chemical source stuck to the outside of the capsule f Apply a very small amount of vacuum grease to the 032 size O ring and insert the capsule back into the gun knob Repeat Steps b through...

Page 27: ...pped Depressing the Start Stop button for more than 2 sec while in the Stop mode will reset the timer to the initial preset time interval Should power fail during a timing cycle the internal memory wi...

Page 28: ...holder in line with the reference mark at the top of the Whis perlok piston Figure 6 8a The mark should be placed when the holder is screwed fully down onto the Whisperlok piston This mark indicates...

Page 29: ...22 January 1999 Rev 1...

Page 30: ...hold the cover to the cylinder body Be careful to retain the limit switch plunger that activates the limit switch in the base k Remove the piston by pulling on the large nylon bevel gear see Figure 6...

Page 31: ...ng problems during subsequent gun operation h Assemble the insulator into the new cathode i Replace the gun in the mounting plate in such a manner that the slot at the end of the insulator faces the d...

Page 32: ...art must be clean c Carefully insert the anode with igniter into the tube replace the retainer and tighten the screws uniformly until the stop position is reached d Place the mounting tool if availabl...

Page 33: ...ibly the Whisperlok Oil Cartridge Replacement a Unplug the cables from the rear of the controller b Separate the controller from the MDP by removing the thumb screws between the two c Using a wide bla...

Page 34: ...le Complete overhaul of DuoMill every 8000 hr Section Maintenance Operation Frequency Fault Condition 7 1 Clean viewing window Every specimen exchange Specimen viewing becomes difficult 7 3 Clean aper...

Page 35: ...28 January 1999 Rev 1...

Page 36: ...ping type 3 mm 691 08601 1 The specimen stage descends 050 1 27 mm when cooled from room temperature to 150 C A special short speci men holder is required when the specimen stage is operated at room t...

Page 37: ...ase have your serial available when ordering 8 7 Gas Distribution Assembly Model 600 07000 3 way solenoid valve 03564 Solenoid valve coil 115 V 03501 Solenoid valve coil 230 V 03502 8 8 O Ring Kits Oc...

Page 38: ...s Distribution Assembly 2 WAY SOLENOID VALVES NORMALLY CLOSED SV4 5 6 AND 7 3 WAY SOLENOID VALVES NORMALLY CLOSED SV2 AND SV3 Figure 1 1 Main Work Chamber 9 98 gatan gatan 3 PSI 2 BAR Ion Gun AIRLOCK...

Page 39: ...L VENT AIRLOCK EVACUATION VALVE VENT VALVE TURBOPUMP gatan VENT VAC SPECIMEN AIRLOCK CAPSULE VAC THERMOCOUPLE GAUGE TUBE DIAPHRAGM PUMP FLOW RESTRICTING ORIFICE AIRLOCK VACUUM SENSING SWITCH SV2 AC NE...

Page 40: ...UMP TMP READY LIGHT COLD CATHODE GAUGE 115 230 VAC INPUT MAIN BREAKER SWITCH A Red TMP CONTROLLER T C GAUGE RELAY TMP VAC RELAY Live Neutral TMP VENT SOLENOID SV 8 Live Neutral See Figure 1 4c Output...

Page 41: ...NATOR SWITCH SHOWN IN OFF POSITION AUTOTERMINATOR SOCKET SPECIMEN HEIGHT SENSING SWITCH 1K 1K CURRENT LIMIT SPECIMEN CURRENT kV GUN GAS SOLENOID SV6 or SV7 0 1 F VOLTAGE LIMIT ROTARY HV SWITCH ION GUN...

Page 42: ...iewing lamp 28 Left autoterminator socket 29 Right autoterminator socket 30 Left autoterminator switch 31 Right autoterminator switch 32 Cooling fan 33 Light Sensitive resistor COMPONENTS gatan 1C 1A...

Page 43: ...le degrees Specimen Current amps Figure 2 1a Typical Thinning Rate for Copper in Range 4 11kV gatan Figure 2 1b Specimen Current versus Beam Angle for Copper 1 86 1 86 0 20 40 60 80 100 4 2 6 8 10 12...

Page 44: ...these Circuits do not measure Ion Current IONS electrons FARADAY CAGE TARGET A 1 86 Figure 2 2b To measure Ion Current a Faraday Cage must be used Secondary ion and electrons must be collected and re...

Page 45: ...the Model 600 DuoMill REAR OF CABINET ARGON IN AUTOTERMINATOR SOCKET 20 508mm 16 25 420mm 41 1035mm AUSTRALIA AUSTRIA FINLAND GERMANY NORWAY BELGIUM FRANCE NETHERLANDS SWEDEN CEE 7 7 U S CANADA NEMA...

Page 46: ...50 0 TOP PLATE SIZE 154 06225 WINDOW 600 05160 0 SPUTTER SHIELD CAPSULE SIZE 120 600 05320 0 SPUTTER SHIELD SIZE 117 SIZE 224 Front of the DuoMill TOP VIEW OF SPUTTER SHIELD TO SEE ION BEAMS DURING OP...

Page 47: ...January 1999 Rev 1 1 86 gatan Figure 5 5 Record of Octogun Use RIGHT GUNS No Start Finish Hrs Remarks Name Date 1 2 3 4 5 6 7 8 LEFT GUNS No Start Finish Hrs Remarks Name Date 1 2 3 4 5 6 7 8 11Jan 19...

Page 48: ...B1 CR2 R38 10k 15 CN7 10 9 8 2 CN4 1 10 15V R10 15k 12 14 13 U2 9 8 10 15V U3 15 2 13 12 14 15V 10 C3 1 F R8 10k R9 47k R12 10k U3 1 16 R11 470 6 CN7 4 CN7 R13 10k 15V 8 9 11 1 2 U5 CLR SET CLK D Q Q...

Page 49: ...00 32000 0 9 98 CAUTION LASER TUBE 600 32090 0 SHV CONNECTOR MOUNTING NUT ALIGNMENT SCREW x4 LASER SHUTTER SHOWN IN CLOSED POSITION ROTATE 90 TO OPEN LOCKING SCREW x4 LASER SUPPORT BASE LOCKING SCREW...

Page 50: ...B3 COLD STAGE SPECIMEN HOLDER COPPER 600 5115C3 ROOM TEMP SPECIMEN HOLDER OPTIONAL ITEM USED WHEN COLD STAGE IS OPERATED AT ROOM TEMPERATURE BRASS Model 600 48003 600 48004 Liquid Nitrogen Cold Stage...

Page 51: ...R BEAM INSULATOR O RINGS SIZE 016 VITON COMPRESSION NUT ALIGNMENT MARKS ALUMINUM CONDUCTOR EVACUATED STAINLESS STEEL JACKET PHOTO RESISTOR LASER WINDOW 600 33100 0 FLEXIBLE COPPER BRAID MIRROR DEFLECT...

Page 52: ...9 Rev 1 45 gatan Figure 6 2c Whisperlok removal 9 98 DO NOT REMOVE SOCKET HEAD SCREWS UNDERSIDE OF MAIN WORK CHAMBER 14 Sept 1998 VENT MAIN CHAMBER ROTATE WHISPERLOK CLOCKWISE 15 AND PULL ASSEMBLY STR...

Page 53: ...the work chamber and is useful when specimen contamination by hydrocarbons must be avoided The cold trap is installed in the top central port of the work chamber First close down and vent the ion mill...

Page 54: ...47 Figure 6 4 Model 600 36500 Microscope with Built in Illuminator 9 98 gatan 11 Sept 1998 AIRLOCK CAPSULE REFLECTOR TO REMOVE LAMP 08323 SLIDE OFF REFLECTOR AND UNPLUG LAMP FOCUS KNOB ADJUSTABLE EYEP...

Page 55: ...OWER TO TERMINALS A C IS CONTROLLED BY THE SPECIMEN HEIGHT SENSING SWITCH 10 1k 1k 4 10k 10k U2 _ VCC VEE 7 6 4 3 2 CR9 R10 CR8 R17 100k U4 _ VCC VEE 7 6 4 3 2 CR11 CR12 R2 1k 10k 6 R27 100k 1 8 CR4 C...

Page 56: ...lectronic gas flow control GAS TO RED GUN GAS TO WHITE GUN FROM GAS OUTLET OF PRESSURE REGULATOR CURRENT SENSE RED GUN CURRENT SENSE WHITE GUN HV SET Electronic Gas Flow Control WHITE VALVE ADJUST KNO...

Page 57: ...T SPECIMEN SPECIMEN POST 600 51161 0 JET PROTECTOR PIN RAISE LOWER PISTON OCTOGUN MOUNT FAST NEUTRAL BEAM CHEMICAL SOURCE RETRACTION LIMIT SCREW VITON SIZE 111 VITON SIZE 032 VITON SIZE 006 VITON SIZE...

Page 58: ...ICAL INDEXING DISC COVER INSULATING SHIM SPECIMEN VIEWING LAMP SOCKET BASE ASSEMBLY ION BEAM and MARK ON HOLDER GLUE LINE SPECIMEN MUST BE ORIENTED SO THAT GLUE LINE IS PARALLEL TO AXIS OF ION MILL CH...

Page 59: ...4 74LS14 1 5K 6 8K 4 7K 2N3904 TIP100 500 1N4001 1N4001 47 3W 33uF 25V 470uF 25V MC7812 MC7805 470uF 1uF TP1 TP3 R3 1 0K 5V R2 C8 U3 2 3 4 1 8 10K LM311 001uF 7 TP2 1 2 3 4 5 6 7 8 F SPECIMEN CURRENT...

Page 60: ...v 1 53 Figure 7 3 9 98 gatan Room Temperature Whisperlok Aperture Assembly LASER BEAM O RING Size 010 APERTURE ASSEMBLY 600 03010 RAISE LOWER PISTON ROD O RING Size 004 WINDOW 06226 WINDOW RETAINING C...

Page 61: ...023 RED WHITE HV END CAP ASSY 600 01070 SCREW IN TEFLON CONNECTOR WITH BALL PLUNGER 600 05310 1 2 8 CATHODE RETRAINING SCREW EIGHT APERTURE CATHODE CERAMIC INSULATOR O RING SIZE 006 O RING SIZE 020 A...

Page 62: ...PER POSITION LOWER POSITION O RING Size 010 O RING Size 224 O RING Size 117 O RING Size 154 IMPORTANT Evacuate capsule before depressing the cleaning tool 22 Aug 1996 COMPACT CC GAUGE ELECTRONIC MODUL...

Page 63: ...2PL 600 09350 CHEMICAL INDICATOR STRIP CONNECTS TO INPUT OF ROTARY PUMP A CHANGE IN THE COLOR AND FINISH OF THE INDICATOR STRIP 600 09350 FROM A BRIGHT SILVER TO A DULL OR SATIN FINISH DEEP YELLOW OR...

Page 64: ...mber may be obtained through Gatan Service or directly from Gatan s Warrendale facil ity at 724 776 5260 If the item is not under warranty to obtain an RGA the customer must provide a Purchase Order P...

Page 65: ......

Page 66: ...972 3 532 5696 General Engineers Ltd P O Box 557 Herzliya 46105 Israel Italy 2M Strumenti Srl Via Pontano 9 00141 Roma Italy 011 39 68689 5319 011 39 68689 5241 Japan Enomoto Analytical Vacuum Instr C...

Page 67: ...na Sweden 011 46 8 626 8365 011 46 8 626 8355 Switzerland Gloor Instruments AG Herr Fritz Gloor Brauereistrasse 10 CH 8610 Uster Switzerland 011 411 940 9955 011 411 940 9914 Republic of China Sciente...

Page 68: ...E FOLLOWING EUROPEAN DIRECTIVES Low Voltage Directive 73 23 EEC EMC Directive 81 336 EEC As Modified by Directive 93 68 EEC Supplementary Information Safety EN 61010 1 1991 A2 1995 EMC EN 55022 Class...

Page 69: ......

Page 70: ...uipment Have surplus equipment taking up shelf space We ll give it a new home Learn more Visit us at artisantg com for more info on price quotes drivers technical specifications manuals and documentat...

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